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Japanese Journal of Applied Physics, 2016-06, Vol.55 (6S3), p.6-06JA01
2016
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Japanese Journal of Applied Physics, 2022-08, Vol.61 (SJ), p.SJ0801
2022
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Journal of the Japan Society for Precision Engineering, 2017/03/05, Vol.83(3), pp.220-223
2017
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Japanese Journal of Applied Physics, 2011-05, Vol.50 (5), p.05EC04-05EC04-2
2011
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Japanese Journal of Applied Physics, 2011-05, Vol.50 (5S1), p.5
2011
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Japanese Journal of Applied Physics, 2010-05, Vol.49 (5), p.05FF05-05FF05-6
2010
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Journal of the Japan Society for Precision Engineering, 2007, Vol.73(7), pp.760-763
2007
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Journal of the Vacuum Society of Japan, 2013, Vol.56(10), pp.397-398
2013
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Journal of the Vacuum Society of Japan, 2012, Vol.55(9), pp.424-425
2012
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Japanese Journal of Applied Physics, 2005-12, Vol.44 (12R), p.8396
2005
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2020 China Semiconductor Technology International Conference (CSTIC), 2020, p.1-4
2020
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Hyōmen gijutsu, 2010-02, Vol.61 (2), p.184-185
2010
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精密工学会誌, 2017/03/05, Vol.83(3), pp.220-223
2017
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MRS proceedings, 2007, Vol.991, Article 0991-C11-01
2007
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Japanese Journal of Applied Physics, 2005-12, Vol.44 (12R), p.8401
2005
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Transactions of the Japan Society of Mechanical Engineers Series C, 2006/07/25, Vol.72(719), pp.2330-2335
2006
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Electronics & communications in Japan. Part 2, Electronics, 2006-11, Vol.89 (11), p.19-30
2006
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MRS proceedings, 2003, Vol.767, Article F7.2
2003
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Transactions of the Japan Society of Mechanical Engineers Series C, 2004/03/25, Vol.70(691), pp.855-860
2004
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Journal of the Vacuum Society of Japan, 2013, Vol.56(10), pp.397-398
2013
Link zum Volltext
Journal of the Vacuum Society of Japan, 2012, Vol.55(9), pp.424-425
2012
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Journal of the Japan Society for Precision Engineering, 2001/08/05, Vol.67(8), pp.1289-1293
2001
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Nihon Kikai Gakkai ronbunshū. C, 2010-06, Vol.76 (766), p.1610-1616
2010
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Transactions of the Japan Society of Mechanical Engineers Series C, 2010/06/25, Vol.76(766), pp.1610-1616
2010
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Japanese Journal of Applied Physics, 2007-04, Vol.46 (4S), p.1974
2007
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