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Handbook of Ellipsometry

1, 2005

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Industrial applications of spectroscopic ellipsometry

Thin solid films, 2004-05, Vol.455 (Complete), p.772-778

Tompkins, Harland G.

2004

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Zircon growth experiments reveal limited equilibrium Zr isotope fractionation in magmas

Geochemical perspectives letters, 2023-03, Vol.25, p.25-29

2023

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Effect of process parameters on the optical constants of thin metal films

Surface and interface analysis, 2000-03, Vol.29 (3), p.227-231

2000

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Oxidation of titanium nitride in room air and in dry O2

Journal of applied physics, 1991-10, Vol.70 (7), p.3876-3880

TOMPKINS, H. G

1991

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Spectroscopic ellipsometry measurements of thin metal films

Surface and interface analysis, 2000-03, Vol.29 (3), p.179-187

2000

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The initial stages of the oxidation of titanium nitride

Journal of applied physics, 1992-01, Vol.71 (2), p.980-983

TOMPKINS, H. G

1992

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Determining the thickness of very thin films of TiW

Surface and interface analysis, 1992-02, Vol.18 (2), p.93-97

Tompkins, Harland G.

1992

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Use of surface and thin film analysis techniques to study metal-organic and metal-polymer interaction: A review

Thin solid films, 1984-09, Vol.119 (4), p.337-348

Tompkins, H.G.

1984

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Ellipsometry for rapid characterization of Si1-xGex layers

Applied physics letters, 1992-05, Vol.60 (18), p.2225-2227

1992

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Titanium nitride oxidation chemistry : an x-ray photoelectron spectroscopy study

Journal of applied physics, 1992-10, Vol.72 (7), p.3072-3079

1992

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An investigation of the oxidation of Ti:W

Journal of applied physics, 1988-09, Vol.64 (6), p.3269-3272

1988

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Optical properties of titanium nitride thin films

Surface and interface analysis, 1991-01, Vol.17 (1), p.22-24

1991

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Influences of Processing Chemistry of Silicon Nitride Films on the Charge Trapping Behavior of Oxide/CVD‐Nitride/Oxide Capacitors

Journal of the Electrochemical Society, 1988-03, Vol.135 (3), p.776-777

1988

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The poisoning of silver zeolite by organics

Journal of materials science, 1984-09, Vol.19 (9), p.2870-2874

1984

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A User's Guide to Ellipsometry

Tompkins, Harland G

1, 1993

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Low-temperature diffusion of copper through gold

Journal of applied physics, 1976-09, Vol.47 (9), p.3804-3812

1976

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On the effect of a partial sink in binary diffusion in thin films

Journal of applied physics, 1978-01, Vol.49 (1), p.223-228

Tompkins, H. G.

1978

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Controlled crystallization of LPCVD amorphous silicon

Thin solid films, 1996, Vol.272 (1), p.93-98

1996

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Use of Molecular Vibrations to Analyze Very Thin Films with Infrared Ellipsometry

The journal of physical chemistry. B, 2004-03, Vol.108 (12), p.3777-3780

2004

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Desorption from Spin‐On Glass

Journal of the Electrochemical Society, 1989-08, Vol.136 (8), p.2331-2335

1989

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On the rate-controlling step of copper diffusion/oxidation through gold

Journal of applied physics, 1979-11, Vol.50 (11), p.7243-7244

1979

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Molecular orientation and structure of copper-benzimidazole films

Surface and interface analysis, 1983-06, Vol.5 (3), p.101-104

1983

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Film thickness measurements using ellipsometry when the lower interface is uncharacterized

Thin solid films, 1989-12, Vol.181 (1), p.285-294

Tompkins, Harland G

1989

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The oxidation of cobalt in air from room temperature to 467 C

Oxidation of metals, 1981-12, Vol.16 (5-6), p.355-369

1981

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Handbook of Ellipsometry

Industrial applications of spectroscopic ellipsometry

Zircon growth experiments reveal limited equilibrium Zr isotope fractionation in magmas

Effect of process parameters on the optical constants of thin metal films

Oxidation of titanium nitride in room air and in dry O2

Spectroscopic ellipsometry measurements of thin metal films

The initial stages of the oxidation of titanium nitride

Determining the thickness of very thin films of TiW

Use of surface and thin film analysis techniques to study metal-organic and metal-polymer interaction: A review

Ellipsometry for rapid characterization of Si1-xGex layers

Titanium nitride oxidation chemistry : an x-ray photoelectron spectroscopy study

An investigation of the oxidation of Ti:W

Optical properties of titanium nitride thin films

Influences of Processing Chemistry of Silicon Nitride Films on the Charge Trapping Behavior of Oxide/CVD‐Nitride/Oxide Capacitors

The poisoning of silver zeolite by organics

A User's Guide to Ellipsometry

Low-temperature diffusion of copper through gold

On the effect of a partial sink in binary diffusion in thin films

Controlled crystallization of LPCVD amorphous silicon

Use of Molecular Vibrations to Analyze Very Thin Films with Infrared Ellipsometry

Desorption from Spin‐On Glass

On the rate-controlling step of copper diffusion/oxidation through gold

Molecular orientation and structure of copper-benzimidazole films

Film thickness measurements using ellipsometry when the lower interface is uncharacterized

The oxidation of cobalt in air from room temperature to 467 C

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