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Integration of EBDW of one entire metal layer as substitution for optical lithography in 220 nm node microcontrollers

Microelectronic engineering, 2008-05, Vol.85 (5-6), p.792-795

2008

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CD control of direct versus complementary exposure for shaped beam writers and its correlation to the local registration error

Microelectronic engineering, 2007-05, Vol.84 (5), p.1033-1036

2007

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Improved primary Josephson voltage standard with a new microwave driving source

IEEE transactions on applied superconductivity, 1999-06, Vol.9 (2), p.4150-4153

1999

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Evaluation of hybrid lithography and mix and match scenarios for electron beam direct write applications

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-11, Vol.25 (6), p.2038-2040

2007

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Integrated SQUID gradiometers for measurement in disturbed environments

IEEE transactions on applied superconductivity, 1997-06, Vol.7 (2), p.3473-3476

1997

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Magnetoresistance and Kerr effect investigations of Co/Cu multilayers with wedge shaped Cu layers

Journal of magnetism and magnetic materials, 1993-03, Vol.121 (1), p.424-428

1993

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Integration of EBDW of one entire metal layer as substitution for optical lithography in 220nm node microcontrollers

Microelectronic engineering, 2008-05, Vol.85 (5-6), p.792-795

2008

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Stacked niobium Josephson junction arrays under x-band irradiation

IEEE transactions on applied superconductivity, 1997-06, Vol.7 (2), p.2423-2425

1997

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Magnetic behaviour of Pt/Co/Pt layered films: experiments and micromagnetic modelling

Journal of magnetism and magnetic materials, 1992-07, Vol.113 (1), p.155-160

1992

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Josephson voltage standard microwave circuits fabricated in a modified all-niobium technology for operation at low drive frequencies

IEEE transactions on applied superconductivity, 1997-06, Vol.7 (2), p.3247-3250

1997

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Interface Controlled Electrical Percolation of CrNi/SiOx Metal/Insulator Thin Films at T > 850 K

Physica status solidi. A, Applied research, 1991-11, Vol.128 (1), p.139-144

1991

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Nodular growth in thin films: Preparation and transmission electron microscopy characterization in CoCr layers on silicon substrates

Thin solid films, 1990-07, Vol.188 (2), p.335-340

1990

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The Homogeneous Distribution of Non-Metallic Bonds in As-Deposited NiCrO Resistive Films

Physica status solidi. A, Applied research, 1989-02, Vol.111 (2), p.551-557

1989

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D.C. conductivity of highly disordered NiCr-O thin films

Thin solid films, 1988-10, Vol.164, p.455-460

1988

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Interface Controlled Electrical Percolation of CrNi/SiOx Metal/Insulator Thin Films atT > 850 K

Physica status solidi. A, Applied research, 1991-11, Vol.128 (1), p.139-144

1991

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Magnetic and structural properties of dc magnetron sputtered CoCr thin films

Vacuum, 1990-01, Vol.40 (6), p.513-515

1990

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The Homogeneous Distribution of Non-Metallic Bonds in As-Deposited NiCrO Resistive Films

Physica status solidi. A, Applied research, 1989-02, Vol.111 (2), p.551-557

1989

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Tl2Ba2Ca1Cu2Ox thin films for microstrip filters

IEEE transactions on applied superconductivity, 1999, Vol.9 (2), p.3897-3900

1999

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Tl(2)Ba(2)Ca(1)Cu(2)O(x ) thin films for microstrip filters

IEEE transactions on applied superconductivity, 1999-06, Vol.9 (2), p.3897-3900

1999

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Tl/sub 2/Ba/sub 2/Ca/sub 1/Cu/sub 2/O/sub x/ thin films for microstrip filters

IEEE transactions on applied superconductivity, 1999-06, Vol.9 (2), p.3897-3900

1999

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Tl sub(2)Ba sub(2)Ca sub(1)Cu sub(2)O sub(x) thin films for microstrip filters

IEEE transactions on applied superconductivity, 1999-01, Vol.9 (2 III), p.3897-3900

1999

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Preparation of Nb/Al-AlO sub x /Nb Josephson junctions with critical current densities down to 1 A/cm exp 2

Physica. C, Superconductivity, 1998-02, Vol.296 (3-4), p.319-324

1998

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Preparation of Nb/Al-AlOx/Nb Josephson junctions with critical current densities down to 1 A/cm2

Physica. C, Superconductivity, 1998-02, Vol.296 (3-4), p.319-324

1998

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Preparation of Nb/Al–AlO x/Nb Josephson junctions with critical current densities down to 1 A/cm 2

Physica. C, Superconductivity, 1998, Vol.296 (3), p.319-324

1998

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Interface Controlled Electrical Percolation of CrNi/SiO sub x Metal/Insulator Thin Films at T > 850K

Physica status solidi. A, Applied research, 1991-11, Vol.128 (1), p.139-144

1991

Volltextzugriff (PDF)

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Integration of EBDW of one entire metal layer as substitution for optical lithography in 220 nm node microcontrollers

CD control of direct versus complementary exposure for shaped beam writers and its correlation to the local registration error

Improved primary Josephson voltage standard with a new microwave driving source

Evaluation of hybrid lithography and mix and match scenarios for electron beam direct write applications

Integrated SQUID gradiometers for measurement in disturbed environments

Magnetoresistance and Kerr effect investigations of Co/Cu multilayers with wedge shaped Cu layers

Integration of EBDW of one entire metal layer as substitution for optical lithography in 220nm node microcontrollers

Stacked niobium Josephson junction arrays under x-band irradiation

Magnetic behaviour of Pt/Co/Pt layered films: experiments and micromagnetic modelling

Josephson voltage standard microwave circuits fabricated in a modified all-niobium technology for operation at low drive frequencies

Interface Controlled Electrical Percolation of CrNi/SiOx Metal/Insulator Thin Films at T > 850 K

Nodular growth in thin films: Preparation and transmission electron microscopy characterization in CoCr layers on silicon substrates

The Homogeneous Distribution of Non-Metallic Bonds in As-Deposited NiCrO Resistive Films

D.C. conductivity of highly disordered NiCr-O thin films

Interface Controlled Electrical Percolation of CrNi/SiOx Metal/Insulator Thin Films atT > 850 K

Magnetic and structural properties of dc magnetron sputtered CoCr thin films

The Homogeneous Distribution of Non-Metallic Bonds in As-Deposited NiCrO Resistive Films

Tl2Ba2Ca1Cu2Ox thin films for microstrip filters

Tl(2)Ba(2)Ca(1)Cu(2)O(x ) thin films for microstrip filters

Tl/sub 2/Ba/sub 2/Ca/sub 1/Cu/sub 2/O/sub x/ thin films for microstrip filters

Tl sub(2)Ba sub(2)Ca sub(1)Cu sub(2)O sub(x) thin films for microstrip filters

Preparation of Nb/Al-AlO sub x /Nb Josephson junctions with critical current densities down to 1 A/cm exp 2

Preparation of Nb/Al-AlOx/Nb Josephson junctions with critical current densities down to 1 A/cm2

Preparation of Nb/Al–AlO x/Nb Josephson junctions with critical current densities down to 1 A/cm 2

Interface Controlled Electrical Percolation of CrNi/SiO sub x Metal/Insulator Thin Films at T > 850K

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