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Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature

Materials science & engineering. B, Solid-state materials for advanced technology, 2000-08, Vol.77 (1), p.110-114

2000

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Investigations on the crystallisation properties of RF magnetron sputtered indium tin oxide thin films

Thin solid films, 2001-06, Vol.388 (1), p.34-40

2001

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Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics

IEEE journal of selected topics in quantum electronics, 1998-11, Vol.4 (6), p.997-1002

1998

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Amorphous silicon waveguides and light modulators for integrated photonics realized by low-temperature plasma-enhanced chemical-vapor deposition

Optics letters, 1996-12, Vol.21 (24), p.2002

1996

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Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

Japanese Journal of Applied Physics, 1999-06, Vol.38 (6R), p.3448

1999

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Changes of hydrogen evolution thermodynamics induced by He and H2 dilution in PECVD a-Si:H films: influence on thermal crystallization

Journal of non-crystalline solids, 2000-05, Vol.266-269, p.635-639

2000

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Fast infrared light modulation in a-Si:H micro-devices for fiber-to-the-home applications

Journal of non-crystalline solids, 2000-05, Vol.266, p.1247-1251

2000

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Interaction of phosphorus and boron in compensated amorphous silicon films

Journal of non-crystalline solids, 1998-05, Vol.227-230, p.380-384

1998

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Investigation of amorphous silicon compensated materials over a wide range of dopant concentrations

Thin solid films, 1997-07, Vol.303 (1), p.269-272

1997

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Large area a-Si/a-Si tandem module with 9.1% conversion efficiency

1997

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Application of Nd:YLF laser to amorphous silicon crystallization process

Materials science & engineering. B, Solid-state materials for advanced technology, 2000, Vol.69, p.227-231

2000

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a-Si:H/a-SiC:H waveguides and modulators for low-cost silicon-integrated optoelectronics

Journal of non-crystalline solids, 1998-01, Vol.227, p.1118-1122

1998

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Development and application of low temperature RF magnetron sputtered ITO thin films for a-Si:H based p/i/n junction solar cells

Conference record of the IEEE Photovoltaic Specialists Conference, 1997

1997

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Development and application of low temperature RF magnetron sputtered ITO thin films for a-Si:H based p/i/n junction solar cells

1997

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Large area a-Si/a-Si tandem module with 9.1% conversion efficiency

Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997, 1997, p.707-710

1997

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The Effect of ZnO Sputtering Deposition Parameters on the Performances of Back Reflector Enhanced Amorphous Silicon Solar Cells

MRS proceedings, 1995, Vol.377, Article 681

1995

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On the Compensation Mechanism of Amorphous Silicon Films: Study of Stability

MRS proceedings, 1997, Vol.467, Article 91

1997

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Demonstration of space-charge-limited time of flight as a new tool for characterization of real a-Si:H solar cells

Journal of non-crystalline solids, 1993-12, Vol.164, p.489-492

1993

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Efficiency Improvement of a-Si Solar Cells Deposited in a Single Chamber, Large Area, Pecvd Reactor

MRS proceedings, 1996, Vol.420, Article 15

1996

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Development and application of low temperature magnetron sputtered ITO thin films for a-Si:H based junction solar cells

Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997, 1997, p.667-670

1997

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Properties of Poly-Si Obtained by Solid Phase Crystallization of Differently Produced a:Si:H Thin Films

Solid state phenomena, 1999-01, Vol.67-68, p.199-204

1999

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Structural and electrical properties of highly conductive μc-Si(P) layers

Applied surface science, 1993-01, Vol.70 (1-4), p.660-663

1993

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Study on Structural, Electrical and Optical Properties of Microcrystalline Si:H and SiC:H Films

MRS proceedings, 1993, Vol.297, Article 515

1993

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Changes of hydrogen evolution thermodynamics induced by He and H 2 dilution in PECVD a-Si:H films: influence on thermal crystallization

Journal of non-crystalline solids, 2000-05, Vol.266, p.635-639

2000

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Correlation Between Minority Carrier Diffusion Length and Microstructure in a-Si:H Thin Films

MRS proceedings, 1993, Vol.297, Article 485

1993

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Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature

Investigations on the crystallisation properties of RF magnetron sputtered indium tin oxide thin films

Amorphous silicon-based guided-wave passive and active devices for silicon integrated optoelectronics

Amorphous silicon waveguides and light modulators for integrated photonics realized by low-temperature plasma-enhanced chemical-vapor deposition

Influences of Sputtering Power and Substrate Temperature on the Properties of RF Magnetron Sputtered Indium Tin Oxide Thin Films

Changes of hydrogen evolution thermodynamics induced by He and H2 dilution in PECVD a-Si:H films: influence on thermal crystallization

Fast infrared light modulation in a-Si:H micro-devices for fiber-to-the-home applications

Interaction of phosphorus and boron in compensated amorphous silicon films

Investigation of amorphous silicon compensated materials over a wide range of dopant concentrations

Large area a-Si/a-Si tandem module with 9.1% conversion efficiency

Application of Nd:YLF laser to amorphous silicon crystallization process

a-Si:H/a-SiC:H waveguides and modulators for low-cost silicon-integrated optoelectronics

Development and application of low temperature RF magnetron sputtered ITO thin films for a-Si:H based p/i/n junction solar cells

Development and application of low temperature RF magnetron sputtered ITO thin films for a-Si:H based p/i/n junction solar cells

Large area a-Si/a-Si tandem module with 9.1% conversion efficiency

The Effect of ZnO Sputtering Deposition Parameters on the Performances of Back Reflector Enhanced Amorphous Silicon Solar Cells

On the Compensation Mechanism of Amorphous Silicon Films: Study of Stability

Demonstration of space-charge-limited time of flight as a new tool for characterization of real a-Si:H solar cells

Efficiency Improvement of a-Si Solar Cells Deposited in a Single Chamber, Large Area, Pecvd Reactor

Development and application of low temperature magnetron sputtered ITO thin films for a-Si:H based junction solar cells

Properties of Poly-Si Obtained by Solid Phase Crystallization of Differently Produced a:Si:H Thin Films

Structural and electrical properties of highly conductive μc-Si(P) layers

Study on Structural, Electrical and Optical Properties of Microcrystalline Si:H and SiC:H Films

Changes of hydrogen evolution thermodynamics induced by He and H 2 dilution in PECVD a-Si:H films: influence on thermal crystallization

Correlation Between Minority Carrier Diffusion Length and Microstructure in a-Si:H Thin Films

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