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Characteristic of Immunosorbent Assay using Micro Capillary Arrays coated by SiCOxHy CVD Films

Journal of Photopolymer Science and Technology, 2024/06/25, Vol.37(3), pp.351-354

2024

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Investigation of Control of Water Contact Angle by Composition Control of SiCOxHy Film Formed on Si Substrate

Journal of Photopolymer Science and Technology, 2024/06/25, Vol.37(3), pp.345-350

2024

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Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method

Japanese Journal of Applied Physics, 2014-03, Vol.53 (3S2), p.3-1-03DB02-7

2014

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PIGプラズマCVD法によるダイヤモンドライクカーボン薄膜の作製

Journal of the Vacuum Society of Japan, 2017, Vol.60(3), pp.85-91

寺山, 暢之

2017

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Preparation of Diamond Like Carbon (DLC) Films by Hot Cathode Penning Ionization Gauge Type Plasma-Enhanced Chemical Vapor Deposition Method

Shinkū, 2017, Vol.60 (3), p.85-91

TERAYAMA, Nobuyuki

2017

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Preparation of Diamond Like Carbon (DLC) Films by Hot Cathode Penning Ionization Gauge Type Plasma-Enhanced Chemical Vapor Deposition Method

Journal of the Vacuum Society of Japan, 2017, Vol.60(3), pp.85-91

TERAYAMA, Nobuyuki

2017

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Development of AFM tensile test technique for evaluating mechanical properties of sub-micron thick DLC films

Journal of microelectromechanical systems, 2006-02, Vol.15 (1), p.169-180

2006

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Elementary and Structural Effects on Mechanical Properties of Silicon Incorporated Amorphous Hydrogenous Carbon Films

Transactions of the Japan Society of Mechanical Engineers Series A, 2003/03/25, Vol.69(679), pp.602-609

2003

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Dry Forming of Zinc Plated Steel Pipe Using DLC Coated Die

Journal of The Surface Finishing Society of Japan, 2013/10/01, Vol.64(10), pp.555-559

2013

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Evaluation of Adhesion Strength for Amorphous SiC Thin Film and DLC/a-SiC Laminated Thin Film Deposited on Steel Substrates for Cutting Tool

Transactions of the Japan Society of Mechanical Engineers Series A, 2000/04/25, Vol.66(644), pp.698-705

2000

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MICROSTRUCTURAL STUDY OF MECHANICAL AND THERMAL PROPERTIES OF DIAMOND-LIKE CARBON

Zairyō, 1998, Vol.47 (12Appendix), p.267-274

1998

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Tribological Properties of DLC Films Against Aluminum and Life of DLC Coated Die for Ironing Under Dry Condition(Machine Elements, Design and Manufacturing)

Transactions of the Japan Society of Mechanical Engineers Series C, 2010/04/25, Vol.76(764), pp.960-967

2010

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Microstructural Effect of Diamond-Like Carbon Thin Film on Micro-Tribological Propertis

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A, 1999, Vol.65 (634), p.1427-1434

1999

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Evaluation of Tribological Properties of Diamond-Like Carbon Thin Film Prepared by the Hot Cathode PIG Discharge Type Plasma-Enhanced CVD Method on Experiment and Molecular Dynamics Simulation

Transactions of the Japan Society of Mechanical Engineers Series A, 1998/04/26, Vol.64(620), pp.1061-1068

1998

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DLCコーテッド金型を用いた亜鉛めっき鋼管のドライ加工

表面技術, 2013/10/01, Vol.64(10), pp.555-559

2013

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アルミニウムに対するDLC膜のトライボロジー特性とドライしごき加工用DLCコーティッド金型の寿命(機械要素,潤滑,設計,生産加工,生産システムなど)

日本機械学会論文集 C編, 2010/04/25, Vol.76(764), pp.960-967

2010

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Preparation of Alumina Films by Ion Plating using Pulse Bias DC Source

Shinku, 1998/03/20, Vol.41(3), pp.159-163

1998

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Microstructural Effect of Diamond-Like Carbon Thin Film on Micro-Tribological Properties

Transactions of the Japan Society of Mechanical Engineers Series A, 1999/06/25, Vol.65(634), pp.1427-1434

1999

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Properties of Low Vollage Discharge in Vapor and Cr Film Deposited by its Discharge

Shinku, 1991/02/20, Vol.34(2), pp.101-106

1991

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Estimation of Strength of DLC Thin Film under Spherical Indentation

Proceedings of the 1992 Annual Meeting of JSME/MMD, 2004-07, Vol.2004, p.375-376

2004

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Preparations of Some Reactive Production Films by Arc Discharge Type High Vacuum Ion Plating

Shinku, 1985/05/20, Vol.28(5), pp.464-466

1985

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Mechanical characterization of sub-micrometer thick DLC films by AFM tensile testing for surface modification in MEMS

Proceedings, IEEE micro electro mechanical systems, 2002, p.431-434

2002

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Development of micro tensile tester operated in AFM to measure mechanical properties of DLC films

The Proceedings of Conference of Kansai Branch, 2002, Vol.2002.77, p.1-29-1-30

2002

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Preparation of Diamond Like Carbon Films by Hot Cathode Penning Ionization Gauge Discharge Type Plasma-Enhanced Chemical Vapor Deposition Method

Shinku, 1995/07/20, Vol.38(7), pp.653-656

1995

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Applications of Ion Plating

Shinku, 1984/05/20, Vol.27(5), pp.489-492

1984

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Characteristic of Immunosorbent Assay using Micro Capillary Arrays coated by SiCOxHy CVD Films

Investigation of Control of Water Contact Angle by Composition Control of SiCOxHy Film Formed on Si Substrate

Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method

PIGプラズマCVD法によるダイヤモンドライクカーボン薄膜の作製

Preparation of Diamond Like Carbon (DLC) Films by Hot Cathode Penning Ionization Gauge Type Plasma-Enhanced Chemical Vapor Deposition Method

Preparation of Diamond Like Carbon (DLC) Films by Hot Cathode Penning Ionization Gauge Type Plasma-Enhanced Chemical Vapor Deposition Method

Development of AFM tensile test technique for evaluating mechanical properties of sub-micron thick DLC films

Elementary and Structural Effects on Mechanical Properties of Silicon Incorporated Amorphous Hydrogenous Carbon Films

Dry Forming of Zinc Plated Steel Pipe Using DLC Coated Die

Evaluation of Adhesion Strength for Amorphous SiC Thin Film and DLC/a-SiC Laminated Thin Film Deposited on Steel Substrates for Cutting Tool

MICROSTRUCTURAL STUDY OF MECHANICAL AND THERMAL PROPERTIES OF DIAMOND-LIKE CARBON

Tribological Properties of DLC Films Against Aluminum and Life of DLC Coated Die for Ironing Under Dry Condition(Machine Elements, Design and Manufacturing)

Microstructural Effect of Diamond-Like Carbon Thin Film on Micro-Tribological Propertis

Evaluation of Tribological Properties of Diamond-Like Carbon Thin Film Prepared by the Hot Cathode PIG Discharge Type Plasma-Enhanced CVD Method on Experiment and Molecular Dynamics Simulation

DLCコーテッド金型を用いた亜鉛めっき鋼管のドライ加工

アルミニウムに対するDLC膜のトライボロジー特性とドライしごき加工用DLCコーティッド金型の寿命(機械要素,潤滑,設計,生産加工,生産システムなど)

Preparation of Alumina Films by Ion Plating using Pulse Bias DC Source

Microstructural Effect of Diamond-Like Carbon Thin Film on Micro-Tribological Properties

Properties of Low Vollage Discharge in Vapor and Cr Film Deposited by its Discharge

Estimation of Strength of DLC Thin Film under Spherical Indentation

Preparations of Some Reactive Production Films by Arc Discharge Type High Vacuum Ion Plating

Mechanical characterization of sub-micrometer thick DLC films by AFM tensile testing for surface modification in MEMS

Development of micro tensile tester operated in AFM to measure mechanical properties of DLC films

Preparation of Diamond Like Carbon Films by Hot Cathode Penning Ionization Gauge Discharge Type Plasma-Enhanced Chemical Vapor Deposition Method

Applications of Ion Plating

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