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Size Effects in Thin Films

1, 1982

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Characterization of the anisotropic chemical attack of ( h h l ) silicon plates in a TMAH 25 wt.% solution: micromachining and adequacy of the dissolution slowness surface

Sensors and actuators. A. Physical., 2003-06, Vol.105 (1), p.62-75

2003

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Etch pits on (hk0) and (hh${\sf \ell}$) silicon surfaces. Experimental shapes and simulations

European physical journal. Applied physics, 2009-09, Vol.47 (3), p.30303

Tellier, C. R.

2009

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Micromachining of GaAs structures with an acidic hydrogen peroxide solution Experimental and theoretical 3D etching shapes

Sensors and actuators. A. Physical., 2006-02, Vol.127 (1), p.179-193

2006

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Anisotropic etching of silicon crystals in KOH solution. Part III. Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates

Journal of materials science, 1998, Vol.33 (1), p.117-131

TELLIER, C. R

1998

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Some investigations on doubly-rotated quartz resonant temperature sensors

Sensors and actuators. A. Physical., 2002-06, Vol.99 (3), p.256-269

2002

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ANISOTROPIC CHEMICAL ETCHING OF III-V CRYSTALS DISSOLUTION SLOWNESS SURFACE AND APPLICATION TO GaAs

Active and Passive Electronic Components, 2004-09, Vol.2004 (3), p.133-154

2004

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On the design of GaAs (hhl) resonant cantilevers: Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure

Sensors and actuators. A. Physical., 2006-11, Vol.132 (1), p.224-235

2006

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Computer aided design of Langasite resonant cantilevers: analytical models and simulations

European physical journal. Applied physics, 2010-05, Vol.50 (2), p.20303

2010

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SOME INVESTIGATIONS ON THE ANISOTROPY OF THE CHEMICAL ETCHING OF (h k 0) AND (h h l) SILICON PLATES IN A NaOH 35% SOLUTION. PART III: DETERMINATION OF A DATABASE FOR THE SIMULATOR TENSOSIM AND PREDICTION OF 2D ETCHING SHAPES

Active and Passive Electronic Components, 2003, Vol.2003 (2), p.95-109

2003

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Scratching experiments on quartz crystals : orientation effects in chipping

Journal of materials science, 1994-06, Vol.29 (12), p.3281-3294

1994

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SOME INVESTIGATIONS ON THE ANISOTROPY OF THE CHEMICAL ETCHING OF (hk0) AND (hhl) SILICON PLATES IN A NaOH 35% SOLUTION. PART I: 2D ETCHING SHAPES

Active and Passive Electronic Components, 2001, Vol.2001 (1), p.31-56

2001

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A kinetic formulation of piezoresistance in N-type silicon: Application to non-linear effects

European physical journal. Applied physics, 1999-07, Vol.7 (1), p.1-11

1999

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Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes

Microsystem technologies : sensors, actuators, systems integration, 1999-07, Vol.5 (4), p.194-199

1999

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CHEMICAL ETCHING OF {hk0} SILICON PLATES IN EDP PART I: EXPERIMENTS AND COMPARISON WITH TMAH

Active and Passive Electronic Components, 2000, Vol.2000 (1), p.37-51

2000

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GaAs micromachining in the 1 H 2 SO 4 :1 H 2 O 2 :8 H 2 O system. From anisotropy to simulation

European physical journal. Applied physics, 2011-02, Vol.53 (2), p.20301

Tellier, C. R.

2011

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A soffer-cottey model for the galvanomagnetic properties of thin polycrystalline metal films

Journal of materials science, 1991-03, Vol.26 (6), p.1421-1430

TELLIER, C. R

1991

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A tensorial representation of the dissolution slowness: application to etched singly rotated quartz plates

Journal of materials science, 1989-03, Vol.24 (3), p.1077-1088

1989

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A two-band model for the galvanomagnetic properties of thin semimetal films

Journal of materials science, 1989-07, Vol.24 (7), p.2309-2318

TELLIER, C. R

1989

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Characterization of the anisotropic chemical attack of { hk0} silicon plates in a T.M.A.H. solution : Determination of a database

Sensors and actuators. A. Physical., 1999-10, Vol.77 (2), p.81-97

1999

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Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2000-09, Vol.47 (5), p.1204-1216

2000

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A theoretical description of grain boundary electron scattering by an effective mean free path

Thin solid films, 1978-06, Vol.51 (3), p.311-317

Tellier, C.R.

1978

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Theoretical size effects in galvanomagnetic properties of thin metal films in a Soffer-Cottey model: interpretation of experiments

Journal of materials science, 1988-04, Vol.23 (4), p.1464-1473

TELLIER, C. R

1988

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Size Effects in Thin Films

2016

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Temperature coefficient of resistivity and deviation from Matthiessen's rule in a combined Soffer-Cottey model

Journal of materials science, 1987-06, Vol.22 (6), p.2043-2050

TELLIER, C. R

1987

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Size Effects in Thin Films

Characterization of the anisotropic chemical attack of ( h h l ) silicon plates in a TMAH 25 wt.% solution: micromachining and adequacy of the dissolution slowness surface

Etch pits on (hk0) and (hh${\sf \ell}$) silicon surfaces. Experimental shapes and simulations

Micromachining of GaAs structures with an acidic hydrogen peroxide solution Experimental and theoretical 3D etching shapes

Anisotropic etching of silicon crystals in KOH solution. Part III. Experimental and theoretical shapes for 3D structures micro-machined in (hk0) plates

Some investigations on doubly-rotated quartz resonant temperature sensors

ANISOTROPIC CHEMICAL ETCHING OF III-V CRYSTALS DISSOLUTION SLOWNESS SURFACE AND APPLICATION TO GaAs

On the design of GaAs (hhl) resonant cantilevers: Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure

Computer aided design of Langasite resonant cantilevers: analytical models and simulations

SOME INVESTIGATIONS ON THE ANISOTROPY OF THE CHEMICAL ETCHING OF (h k 0) AND (h h l) SILICON PLATES IN A NaOH 35% SOLUTION. PART III: DETERMINATION OF A DATABASE FOR THE SIMULATOR TENSOSIM AND PREDICTION OF 2D ETCHING SHAPES

Scratching experiments on quartz crystals : orientation effects in chipping

SOME INVESTIGATIONS ON THE ANISOTROPY OF THE CHEMICAL ETCHING OF (hk0) AND (hhl) SILICON PLATES IN A NaOH 35% SOLUTION. PART I: 2D ETCHING SHAPES

A kinetic formulation of piezoresistance in N-type silicon: Application to non-linear effects

Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes

CHEMICAL ETCHING OF {hk0} SILICON PLATES IN EDP PART I: EXPERIMENTS AND COMPARISON WITH TMAH

GaAs micromachining in the 1 H 2 SO 4 :1 H 2 O 2 :8 H 2 O system. From anisotropy to simulation

A soffer-cottey model for the galvanomagnetic properties of thin polycrystalline metal films

A tensorial representation of the dissolution slowness: application to etched singly rotated quartz plates

A two-band model for the galvanomagnetic properties of thin semimetal films

Characterization of the anisotropic chemical attack of { hk0} silicon plates in a T.M.A.H. solution : Determination of a database

Micromachining of quartz plates: determination of a database by combined stereographic analysis and 3-D simulation of etching shapes

A theoretical description of grain boundary electron scattering by an effective mean free path

Theoretical size effects in galvanomagnetic properties of thin metal films in a Soffer-Cottey model: interpretation of experiments

Size Effects in Thin Films

Temperature coefficient of resistivity and deviation from Matthiessen's rule in a combined Soffer-Cottey model

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