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Fabrication of thin ferroelectric Hf0.5Zr0.5O2 films by millisecond flash lamp annealing

Japanese Journal of Applied Physics, 2023-04, Vol.62 (SC), p.SC1044

2023

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Fabrication of thin ferroelectric Hf 0.5 Zr 0.5 O 2 films by millisecond flash lamp annealing

Japanese Journal of Applied Physics, 2023-04, Vol.62 (SC), p.SC1044

2023

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Improvement in the polarization properties in thin ferroelectric Hf0.5Zr0.5O2 films by two-step flash lamp annealing

Japanese Journal of Applied Physics, 2024-02, Vol.63 (2), p.02SP80

2024

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Improvement in the polarization properties in thin ferroelectric Hf 0.5 Zr 0.5 O 2 films by two-step flash lamp annealing

Japanese Journal of Applied Physics, 2024-02, Vol.63 (2), p.2

2024

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Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO 2 films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 63 09SP10 (2024)]

Japanese Journal of Applied Physics, 2024-10, Vol.63 (10), p.109302

2024

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Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO2 films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 63 09SP10 (2024)]

Japanese Journal of Applied Physics, 2024-10, Vol.63 (10), p.109302

2024

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Low-thermal-budget crystallization of ferroelectric Al:HfO2 films by millisecond flash lamp annealing

Japanese Journal of Applied Physics, 2024-09, Vol.63 (9), p.09SP10

2024

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Low-thermal-budget crystallization of ferroelectric Al:HfO 2 films by millisecond flash lamp annealing

Japanese Journal of Applied Physics, 2024-09, Vol.63 (9), p.9

2024

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Low Thermal Budget Ohmic Contact Formation by Laser Anneal

Materials Science Forum, 2016-05, Vol.858, p.565-568

2016

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A novel approach for highly activated p+ diffusion layer formation in germanium by pre-heating oxygen desorption before ion implantation

2017 17th International Workshop on Junction Technology (IWJT), 2017, p.13-14

2017

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Forming Low-Resistivity Tungsten Contacts and Avoiding Fluorine Diffusion by Flash Lamp Annealing (FLA)

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 2021, p.1-3

2021

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Newly Developed Heat Source Combined with Short-Duration Flash Lamp Annealing (FLA) Featuring a Low Thermal Budget and Low Environmental Load

2021 20th International Workshop on Junction Technology (IWJT), 2021, p.1-4

2021

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Conformal SDE doping for FinFETs using an arsenic-doped Sol-Gel Coating (SGC) and Flash Lamp Annealing (FLA)

2017 17th International Workshop on Junction Technology (IWJT), 2017, p.66-68

2017

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Conformal Doping with High Dopant Concentration for n+/p and p+/n Si junctions in 3D Devices Using Sol-Gel Coating and Flash Lamp Annealing

2018 22nd International Conference on Ion Implantation Technology (IIT), 2018, p.346-348

2018

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Precise Diffusion Control in the Nanometer Range in n+/p and p+/n Ge Using Ion Implantation and Flash Lamp Annealing

2018 22nd International Conference on Ion Implantation Technology (IIT), 2018, p.349-352

2018

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High activation reaching supersaturation achieved by short-duration flash lamp annealing

2018 18th International Workshop on Junction Technology (IWJT), 2018, p.1-4

2018

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Low Specific Contact Resistivity Measurements using a New Test Structure and its Reduction to 10−9 ohm-cm2 in p-type SiGe/Metal Contacts using Flash Lamp Annealing

2019 19th International Workshop on Junction Technology (IWJT), 2019, p.1-4

2019

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Nanometer-deep junctions with high doping concentration for Ge SDEs using solid source doping and flash lamp annealing

2017 17th International Workshop on Junction Technology (IWJT), 2017, p.15-18

2017

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Profile Control of Donor Ions by Sn Co-implantation in Germanium

2018 22nd International Conference on Ion Implantation Technology (IIT), 2018, p.311-314

2018

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Simulating two-dimensional correlation spectroscopies with third-order infrared and fifth-order infrared–Raman processes of liquid water

The Journal of chemical physics, 2023-03, Vol.158 (12), p.124108-124108

2023

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Discretized hierarchical equations of motion in mixed Liouville–Wigner space for two-dimensional vibrational spectroscopies of liquid water

The Journal of chemical physics, 2023-01, Vol.158 (4), p.044115-044115

2023

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Signal-transducing adapter protein-1 is required for maintenance of leukemic stem cells in CML

Oncogene, 2020-08, Vol.39 (34), p.5601-5615

2020

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Open Quantum Dynamics Theory of Spin Relaxation: Application to μ SR and Low-Field NMR Spectroscopies

Journal of the Physical Society of Japan, 2020-06, Vol.89 (6), p.64710

2020

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Elucidation of diffusion blocking effect during anomalous structural change of L12 + D022 → L12 in Ni3Al1−xVx (0.4 < x < 0.55) alloys by a first-principles calculation

Computational materials science, 2023-03, Vol.221, Article 112072

2023

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Elucidation of diffusion blocking effect during anomalous structural change of L12 + D022 → L12 in Ni3Al1−V (0.4 < x < 0.55) alloys by a first-principles calculation

Computational materials science, 2023-03, Vol.221, p.112072, Article 112072

2023

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Fabrication of thin ferroelectric Hf0.5Zr0.5O2 films by millisecond flash lamp annealing

Fabrication of thin ferroelectric Hf 0.5 Zr 0.5 O 2 films by millisecond flash lamp annealing

Improvement in the polarization properties in thin ferroelectric Hf0.5Zr0.5O2 films by two-step flash lamp annealing

Improvement in the polarization properties in thin ferroelectric Hf 0.5 Zr 0.5 O 2 films by two-step flash lamp annealing

Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO 2 films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 63 09SP10 (2024)]

Corrigendum: “Low-thermal-budget crystallization of ferroelectric Al:HfO2 films by millisecond flash lamp annealing” [Jpn. J. Appl. Phys. 63 09SP10 (2024)]

Low-thermal-budget crystallization of ferroelectric Al:HfO2 films by millisecond flash lamp annealing

Low-thermal-budget crystallization of ferroelectric Al:HfO 2 films by millisecond flash lamp annealing

Low Thermal Budget Ohmic Contact Formation by Laser Anneal

A novel approach for highly activated p+ diffusion layer formation in germanium by pre-heating oxygen desorption before ion implantation

Forming Low-Resistivity Tungsten Contacts and Avoiding Fluorine Diffusion by Flash Lamp Annealing (FLA)

Newly Developed Heat Source Combined with Short-Duration Flash Lamp Annealing (FLA) Featuring a Low Thermal Budget and Low Environmental Load

Conformal SDE doping for FinFETs using an arsenic-doped Sol-Gel Coating (SGC) and Flash Lamp Annealing (FLA)

Conformal Doping with High Dopant Concentration for n+/p and p+/n Si junctions in 3D Devices Using Sol-Gel Coating and Flash Lamp Annealing

Precise Diffusion Control in the Nanometer Range in n+/p and p+/n Ge Using Ion Implantation and Flash Lamp Annealing

High activation reaching supersaturation achieved by short-duration flash lamp annealing

Low Specific Contact Resistivity Measurements using a New Test Structure and its Reduction to 10−9 ohm-cm2 in p-type SiGe/Metal Contacts using Flash Lamp Annealing

Nanometer-deep junctions with high doping concentration for Ge SDEs using solid source doping and flash lamp annealing

Profile Control of Donor Ions by Sn Co-implantation in Germanium

Simulating two-dimensional correlation spectroscopies with third-order infrared and fifth-order infrared–Raman processes of liquid water

Discretized hierarchical equations of motion in mixed Liouville–Wigner space for two-dimensional vibrational spectroscopies of liquid water

Signal-transducing adapter protein-1 is required for maintenance of leukemic stem cells in CML

Open Quantum Dynamics Theory of Spin Relaxation: Application to μ SR and Low-Field NMR Spectroscopies

Elucidation of diffusion blocking effect during anomalous structural change of L12 + D022 → L12 in Ni3Al1−xVx (0.4 < x < 0.55) alloys by a first-principles calculation

Elucidation of diffusion blocking effect during anomalous structural change of L12 + D022 → L12 in Ni3Al1−V (0.4 < x < 0.55) alloys by a first-principles calculation

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