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Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Advanced materials (Weinheim), 2009-02, Vol.21 (5), p.593-596

2009

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Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity

Journal of micromechanics and microengineering, 2013-03, Vol.23 (3), p.35032-11

2013

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Automotive Applications of MEMS Technologies

Hyōmen gijutsu, 2017-07, Vol.68 (7), p.392-396

TAKEUCHI, Yukihiro

2017

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Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

Japanese Journal of Applied Physics, 2012-11, Vol.51 (11), p.11PA02-11PA02-7

2012

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High-Power Vertical-Cavity Surface-Emitting Laser under a Short Pulsed Operation

Applied physics express, 2009-05, Vol.2, p.52102

2009

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Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

Japanese Journal of Applied Physics, 2012-11, Vol.51 (11S), p.11

2012

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Automotive Application of MEMS Sensor

Journal of the Japan Society for Precision Engineering, 2010/05/05, Vol.76(5), pp.506-509

TAKEUCHI, Yukihiro

2010

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Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method

IEEJ transactions on electrical and electronic engineering, 2010-03, Vol.5 (2), p.125-130

2010

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Development of Si DRIE process allowing simultaneous etching from narrow and wide mask openings

Electronics and communications in Japan, 2011-04, Vol.94 (4), p.36-43

2011

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Improvement of high aspect ratio Si etching by optimized oxygen plasma irradiation inserted DRIE

Journal of micromechanics and microengineering, 2009-09, Vol.19 (9), p.095022-095022 (10)

2009

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Automotive Application of MEMS Sensor

Seimitsu Kōgakkaishi, 2010, Vol.76 (5), p.506-509

TAKEUCHI, Yukihiro

2010

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Technological History of Silicon Dry Etching Process

IEEJ transactions on sensors and micromachines, 2011, Vol.131 (1), p.14-18

2011

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Improvement of the optical transmittance of a micro prism made from a Si substrate by DRIE, oxidation and SiO2 film refilling

Journal of micromechanics and microengineering, 2009-05, Vol.19 (5), p.055019

2009

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Infrared absorption sensor for multiple gas sensing. Development of a Fabry-Perot spectrometer with ultrawide wavelength range

Electronics and communications in Japan, 2013-05, Vol.96 (5), p.50-57

2013

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Improvement of the optical transmittance of a micro prism made from a Si substrate by DRIE, oxidation and SiO 2 film refilling

Journal of micromechanics and microengineering, 2009-05, Vol.19 (5), p.55019

2009

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Development of fabrication process for integrated micro-optical elements on Si substrate

Sensors and actuators. A. Physical., 2008-05, Vol.143 (1), p.77-83

2008

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Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

Sensors and actuators. A. Physical., 2006-08, Vol.130, p.397-402

2006

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High-Pulsed-Power (49W) Vertical-Cavity Surface-Emitting Laser with Five Quantum Wells by Uniform Current Injection into Large Emitting Area

IEICE Electronics Express, 2011-01, Vol.8 (2), p.109-113

2011

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Evaluation of a Post-analysis Method for Cumulative Dose Distribution in Stereotactic Body Radiotherapy

Nippon Hōshasen Gijutsu Gakkai zasshi, 2016-03, Vol.72 (3), p.251-260

2016

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Evaluation of In Vivo Volumetric Dosimetry for Prostate Cancer Using Electronic Portal Imaging Device

Japanese Journal of Radiological Technology, 2016, Vol.72(11), pp.1128-1136

2016

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Infrared Absorption Sensor for Multiple Gas Sensing: Development of Fabry-Perot Spectrometer with Ultra Wide Wavelength Range

IEEJ transactions on sensors and micromachines, 2011, Vol.131 (7), p.264-269

2011

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Critical-layer thickness of a pseudomorphic In0.8Ga0.2As heterostructure grown on InP

Applied physics letters, 1991-05, Vol.58 (21), p.2420-2422

1991

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Dose Reconstruction Using Respiratory Signals and Machine Parameters during Treatment in Stereotactic Body Radiotherapy

Japanese Journal of Radiological Technology, 2014, Vol.70(11), pp.1225-1234

2014

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Out-of-plane Bending Vibration Fracture Test of Polycrystalline Silicon Thin-film Membrane

IEEJ transactions on sensors and micromachines, 2012, Vol.132 (7), p.224-229

2012

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Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method : State-of-the-art MEMS Tecnologies

IEEJ transactions on electrical and electronic engineering, 2010, Vol.5 (2), p.125-130

2010

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Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity

Automotive Applications of MEMS Technologies

Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

High-Power Vertical-Cavity Surface-Emitting Laser under a Short Pulsed Operation

Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration

Automotive Application of MEMS Sensor

Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method

Development of Si DRIE process allowing simultaneous etching from narrow and wide mask openings

Improvement of high aspect ratio Si etching by optimized oxygen plasma irradiation inserted DRIE

Automotive Application of MEMS Sensor

Technological History of Silicon Dry Etching Process

Improvement of the optical transmittance of a micro prism made from a Si substrate by DRIE, oxidation and SiO2 film refilling

Infrared absorption sensor for multiple gas sensing. Development of a Fabry-Perot spectrometer with ultrawide wavelength range

Improvement of the optical transmittance of a micro prism made from a Si substrate by DRIE, oxidation and SiO 2 film refilling

Development of fabrication process for integrated micro-optical elements on Si substrate

Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate

High-Pulsed-Power (49W) Vertical-Cavity Surface-Emitting Laser with Five Quantum Wells by Uniform Current Injection into Large Emitting Area

Evaluation of a Post-analysis Method for Cumulative Dose Distribution in Stereotactic Body Radiotherapy

Evaluation of In Vivo Volumetric Dosimetry for Prostate Cancer Using Electronic Portal Imaging Device

Infrared Absorption Sensor for Multiple Gas Sensing: Development of Fabry-Perot Spectrometer with Ultra Wide Wavelength Range

Critical-layer thickness of a pseudomorphic In0.8Ga0.2As heterostructure grown on InP

Dose Reconstruction Using Respiratory Signals and Machine Parameters during Treatment in Stereotactic Body Radiotherapy

Out-of-plane Bending Vibration Fracture Test of Polycrystalline Silicon Thin-film Membrane

Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method : State-of-the-art MEMS Tecnologies

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