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Magnetron sputtering – Milestones of 30 years

Vacuum, 2010-06, Vol.84 (12), p.1354-1359

2010

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Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering

Thin solid films, 1999-08, Vol.351 (1-2), p.164-169

Szyszka, B

1999

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Optimization of the post-deposition annealing process of high-mobility In2O3:H for photovoltaic applications

Thin solid films, 2016-01, Vol.599, p.78-83

2016

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Validation of a multiple linear regression model for CIGSSe photovoltaic module performance and Pmpp prediction

Solar energy, 2020-09, Vol.208, p.859-865

2020

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Surface technology for automotive engineering

CIRP annals, 2009, Vol.58 (2), p.608-627

2009

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High power pulsed magnetron sputtering of transparent conducting oxides

Thin solid films, 2008-07, Vol.516 (17), p.5847-5859

2008

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Applications of HIPIMS metal oxides

Thin solid films, 2013-12, Vol.548, p.18-26

2013

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High mobility In2O3:H as contact layer for a-Si:H/c-Si heterojunction and μc-Si:H thin film solar cells

Thin solid films, 2015-11, Vol.594, p.316-322

2015

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Optical modeling of free electron behavior in highly doped ZnO films

Thin solid films, 2009-12, Vol.518 (4), p.1289-1293

2009

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Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications

Thin solid films, 2007-10, Vol.515 (24), p.8695-8698

2007

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ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells

Thin solid films, 2006-02, Vol.496 (1), p.16-25

2006

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Scratch resistance analysis of coatings on glass and polycarbonate

Thin solid films, 2009-03, Vol.517 (10), p.3121-3125

2009

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Water-assisted nitrogen mediated crystallisation of ZnO films

Thin solid films, 2015-09, Vol.590, p.177-183

2015

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Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

Applied physics letters, 2002-04, Vol.80 (17), p.3090-3092

2002

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Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering

Applied surface science, 2003-02, Vol.207 (1), p.341-350

2003

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Combination of nitrogen mediated crystallisation with post-deposition annealing—Towards ultra-thin ZnO:Al contacts

Thin solid films, 2015-08, Vol.589, p.750-754

2015

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Heat treatable indium tin oxide films deposited with high power pulse magnetron sputtering

Thin solid films, 2009-03, Vol.517 (10), p.3178-3182

2009

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Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering

Thin solid films, 2008-05, Vol.516 (14), p.4472-4477

2008

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Potential of high-mobility sputtered zinc oxide as front contact for high efficiency thin film silicon solar cells

Thin solid films, 2014-03, Vol.555, p.138-142

2014

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Rotatable serial co-sputtering of doped titania

Vacuum, 2015-04, Vol.114, p.158-161

2015

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Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

Surface & coatings technology, 1998, Vol.98 (1), p.1304-1314

1998

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Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Thin solid films, 2003-10, Vol.442 (1), p.179-183

2003

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Thin film solar cell technology in Germany

Surface & coatings technology, 2005-04, Vol.193 (1), p.329-334

2005

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Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films

Thin solid films, 2010-03, Vol.518 (11), p.3115-3118

2010

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Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering

Lecture notes in computer science, 2006, p.383-390

2006

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Magnetron sputtering – Milestones of 30 years

Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering

Optimization of the post-deposition annealing process of high-mobility In2O3:H for photovoltaic applications

Validation of a multiple linear regression model for CIGSSe photovoltaic module performance and Pmpp prediction

Surface technology for automotive engineering

High power pulsed magnetron sputtering of transparent conducting oxides

Applications of HIPIMS metal oxides

High mobility In2O3:H as contact layer for a-Si:H/c-Si heterojunction and μc-Si:H thin film solar cells

Optical modeling of free electron behavior in highly doped ZnO films

Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications

ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells

Scratch resistance analysis of coatings on glass and polycarbonate

Water-assisted nitrogen mediated crystallisation of ZnO films

Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering

Combination of nitrogen mediated crystallisation with post-deposition annealing—Towards ultra-thin ZnO:Al contacts

Heat treatable indium tin oxide films deposited with high power pulse magnetron sputtering

Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering

Potential of high-mobility sputtered zinc oxide as front contact for high efficiency thin film silicon solar cells

Rotatable serial co-sputtering of doped titania

Comparison of transparent conductive oxide thin films prepared by a.c. and d.c. reactive magnetron sputtering

Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Thin film solar cell technology in Germany

Optical on-line monitoring for the long-term stabilization of a reactive mid-frequency sputtering process of Al-doped zinc oxide films

Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering

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