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Ion beam fabrication of metal/insulator/HT-superconductor nanostructures for field effect transistor
2003
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2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443), 2001, Vol.2, p.1391-1394 vol.2
2001
Volltextzugriff (PDF)
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- Engineering
- Engineering, Electrical & Electronic
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- Technology
- Atomic And Molecular Physics, And Optics
- Atomic Layer Deposition
- Bonding
- Chemicals
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- Field Effect
- High Temperature Superconductor
- High Temperature Superconductors
- Insulation
- Ion-Induced Restructuring
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