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Amplitude-modulated resonant accelerometer employing parametric pump

Applied physics letters, 2020-10, Vol.117 (16)

2020

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Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Nature communications, 2019-10, Vol.10 (1), p.4980-9, Article 4980

2019

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Feedthrough parasitic nonlinear resonance in micromechanical oscillators

Applied physics letters, 2020-09, Vol.117 (13)

2020

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0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

Microsystems & nanoengineering, 2021-10, Vol.7 (1), p.79-79, Article 79

2021

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Erratum: “Feedthrough parasitic nonlinear resonance in micromechanical oscillators” [Appl. Phys. Lett. 117, 133502 (2020)]

Applied physics letters, 2020-11, Vol.117 (19)

2020

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Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Microsystems & nanoengineering, 2022-02, Vol.8 (1), p.17-17, Article 17

2022

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Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching

Micromachines (Basel), 2024-08, Vol.15 (9), p.1094

2024

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Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope

Microsystems & nanoengineering, 2024-11, Vol.10 (1), p.164-11, Article 164

2024

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Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

Micromachines (Basel), 2023-09, Vol.14 (9), p.1755

2023

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Damping Asymmetry Trimming Based on the Resistance Heat Dissipation for Coriolis Vibratory Gyroscope in Whole-Angle Mode

Micromachines (Basel), 2020-10, Vol.11 (10), p.945

2020

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Research on cylindrical resonators’ damping asymmetry trimming method utilizing damping characteristic of piezoelectric electrodes

AIP advances, 2018-03, Vol.8 (3), p.035101-035101-9

2018

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Research on damping asymmetry based on Q factor circumferential distribution of Cylindrical Resonators

2017 IEEE SENSORS, 2017, p.1-3

2017

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A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

IEEE electron device letters, 2020-10, Vol.41 (10), p.1560-1563

2020

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A 0.017 ^ /h Rate-Integrating Micro-Shell Resonator Gyroscope Using Virtual Rotation Modulation

Journal of microelectromechanical systems, 2024-10, p.1-3

2024

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A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

IEEE electron device letters, 2021-04, Vol.42 (4), p.581-584

2021

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Achieving Sub-5-mHz Frequency Split Trimming of Micro Hemispherical Resonator Gyroscope With Method of Mass-Stiffness Decoupling

IEEE sensors journal, 2024-08, Vol.24 (15), p.23622-23631

2024

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Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope

Journal of microelectromechanical systems, 2022-02, Vol.31 (1), p.19-28

2022

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Achieving mode detection and precise mechanical trimming of uncoated micro shell resonator using interdigital electrode

IEEE sensors journal, 2024-04, Vol.24 (8), p.1-1

2024

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Investigation of Angle Drift Induced by Actuation Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope

IEEE sensors journal, 2022-02, Vol.22 (4), p.3105-3112

2022

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A Low-Noise High-Order Mode-Localized MEMS Accelerometer

Journal of microelectromechanical systems, 2021-04, Vol.30 (2), p.178-180

2021

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On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2021-04, Vol.68 (4), p.1448-1457

2021

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Identification and Correction of Phase Error for Whole-Angle Micro-Shell Resonator Gyroscope

IEEE sensors journal, 2022-10, Vol.22 (20), p.19228-19236

2022

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Research on Damping Error Tuning and Compensating Technology of Whole Angle Mode Hemispherical Resonator Gyroscope

Ji xie gong cheng xue bao, 2022, Vol.58 (16), p.145

2022

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Analysis of the Damping Characteristics of Cylindrical Resonators Influenced by Piezoelectric Electrodes

Sensors (Basel, Switzerland), 2017-05, Vol.17 (5), p.1017

2017

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Investigation of cylindrical resonators’ damping asymmetry via analyzing Q factor circumferential distribution

Sensors and actuators. A. Physical., 2018-01, Vol.269, p.535-544

2018

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Amplitude-modulated resonant accelerometer employing parametric pump

Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Feedthrough parasitic nonlinear resonance in micromechanical oscillators

0.79 ppm scale-factor nonlinearity whole-angle microshell gyroscope realized by real-time calibration of capacitive displacement detection

Erratum: “Feedthrough parasitic nonlinear resonance in micromechanical oscillators” [Appl. Phys. Lett. 117, 133502 (2020)]

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Low-Damage Trimming of Micro Hemispherical Resonators by Chemical Etching

Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope

Investigation of the Charge Accumulation Based on Stiffness Variation of the Micro-Shell Resonator Gyroscope

Damping Asymmetry Trimming Based on the Resistance Heat Dissipation for Coriolis Vibratory Gyroscope in Whole-Angle Mode

Research on cylindrical resonators’ damping asymmetry trimming method utilizing damping characteristic of piezoelectric electrodes

Research on damping asymmetry based on Q factor circumferential distribution of Cylindrical Resonators

A High-Performance Mode-Localized Accelerometer Employing a Quasi-Rigid Coupler

A 0.017 ^ /h Rate-Integrating Micro-Shell Resonator Gyroscope Using Virtual Rotation Modulation

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

Achieving Sub-5-mHz Frequency Split Trimming of Micro Hemispherical Resonator Gyroscope With Method of Mass-Stiffness Decoupling

Characterization and Compensation of Detection Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope

Achieving mode detection and precise mechanical trimming of uncoated micro shell resonator using interdigital electrode

Investigation of Angle Drift Induced by Actuation Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope

A Low-Noise High-Order Mode-Localized MEMS Accelerometer

On Weakly Coupled Resonant MEMS Transducers Operating in the Modal Overlap Regime

Identification and Correction of Phase Error for Whole-Angle Micro-Shell Resonator Gyroscope

Research on Damping Error Tuning and Compensating Technology of Whole Angle Mode Hemispherical Resonator Gyroscope

Analysis of the Damping Characteristics of Cylindrical Resonators Influenced by Piezoelectric Electrodes

Investigation of cylindrical resonators’ damping asymmetry via analyzing Q factor circumferential distribution

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