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Extreme ultraviolet lithography

IEEE journal of quantum electronics, 1999-05, Vol.35 (5), p.694-699

1999

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First lithographic results from the extreme ultraviolet Engineering Test Stand

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001-11, Vol.19 (6), p.2389-2395

2001

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The role of hydrogen on the diamond C(111)−(2 × 1) reconstruction

Surface science, 1988-11, Vol.206 (1), p.L833-L844

1988

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Effect of surface temperature on the sorption of hydrogen by Pd(111)

Surface science, 1987-03, Vol.181 (3), p.L147-L155

1987

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Order-disorder transitions and subsurface occupation for hydrogen on Pd(111)

Surface science, 1986-05, Vol.171 (1), p.L379-L386

1986

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Hydrogen chemisorption and the structure of the diamond C(100)-(2 × 1) surface

Surface science, 1990-11, Vol.237 (1-3), p.35-52

1990

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Incorporation of defects during processing of mercuric iodide detectors

Journal of applied physics, 1990-07, Vol.68 (1), p.86-92

1990

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13-nm extreme ultraviolet lithography

IEEE journal of selected topics in quantum electronics, 1995-09, Vol.1 (3), p.970-975

Stulen, R.H.

1995

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Recent developments in angle-resolved electron-stimulated desorption of ions from surfaces

Progress in surface science, 1989, Vol.32 (1), p.1-38

Stulen, Richard H.

1989

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Progress in the development of extreme ultraviolet lithography exposure systems

Microelectronic engineering, 1999, Vol.46 (1), p.19-22

Stulen, Richard. H.

1999

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Mechanisms of electron-stimulated desorption of protons from water: Gas, chemisorbed and ice phases

Surface science, 1985-07, Vol.157 (1), p.119-150

1985

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Investigation of copper electrodes for mercuric iodide detector applications

Journal of applied physics, 1990-06, Vol.67 (12), p.7265-7267

1990

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Effect of strain on the band structure of GaAs and In0.2Ga0.8As

Applied physics letters, 1988-01, Vol.52 (4), p.308-310

1988

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Mechanism of Near-Threshold Stimulated Desorption of Protons from Transition-Metal Surfaces

Physical review letters, 1982-05, Vol.48 (20), p.1429-1432

1982

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Photon-stimulated desorption of H+ and F+ from BeO, Al2O3 and SiO2: comparison of near edge structure to photoelectron yield

Surface science, 1983-10, Vol.133 (1), p.291-304

1983

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Electron-stimulated desorption and thermal desorption spectrometry of H2O on nickel (111)

Surface science, 1985-07, Vol.157 (1), p.99-118

1985

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At‐wavelength metrology of 13 nm lithography imaging optics

Review of Scientific Instruments, 1995-02, Vol.66 (2), p.2241-2243

1995

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Extreme ultraviolet lithography : Extreme Ultraviolet Lithography

IEEE journal of quantum electronics, 1999, Vol.35 (5), p.694-699

1999

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Rutherford backscattering and Auger spectroscopy of mercuric iodide detectors

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1989-11, Vol.283 (2), p.195-198

1989

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The photodissociative ionization of amorphous ice

Chemical physics letters, 1981-06, Vol.80 (3), p.488-494

1981

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Solid-state detection of energetic neutrons based on mercuric iodide crystals

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1990-09, Vol.294 (1), p.229-233