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Unraveling the mechanisms responsible for the interfacial region formation in 4H-SiC dry thermal oxidation

Journal of applied physics, 2017-12, Vol.122 (21)

2017

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Morphological and compositional changes in the SiO2∕SiC interface region induced by oxide thermal growth

Applied physics letters, 2006-01, Vol.88 (4)

2006

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Initial stages of SiC oxidation investigated by ion scattering and angle-resolved x-ray photoelectron spectroscopies

Applied physics letters, 2001-06, Vol.78 (23), p.3601-3603

2001

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Oxygen transport and incorporation mechanisms in the dry thermal oxidation of 6H-SiC

Applied physics letters, 2004-10, Vol.85 (16), p.3402-3404

2004

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Atomic transport and chemical stability during annealing of ultrathin Al2O3 films on Si

Physical review letters, 2000-11, Vol.85 (19), p.4120-4123

2000

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Limiting step involved in the thermal growth of silicon oxide films on silicon carbide

Physical review letters, 2002-12, Vol.89 (25), p.256102-256102, Article 256102

2002

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Tracing the incorporation of water in SiO2/SiC structures formed by oxide deposition and thermal oxidation

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2014-08, Vol.332, p.19-21

2014

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Effects of nitrogen incorporation on the interfacial layer between thermally grown dielectric films and SiC

Applied physics letters, 2009-06, Vol.94 (25), p.251909-251909-3

2009

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Dynamics of thermal growth of silicon oxide films on Si

Physical review. B, Condensed matter, 2000-05, Vol.61 (19), p.12992-12999

2000

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Polypropylene functionalization with vinyltriethoxysilane

Journal of applied polymer science, 1999-06, Vol.72 (10), p.1313-1319

1999

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Comparison of nitrogen incorporation in SiO2/SiC and SiO2/Si structures

Applied physics letters, 2000-01, Vol.76 (5), p.568-570

2000

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Characterization of SiC thermal oxidation

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2002-05, Vol.190 (1), p.579-582

2002

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Influence of thermal growth parameters on the SiO2/4H-SiC interfacial region

APL materials, 2013-08, Vol.1 (2), p.022101-022101

2013

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Enhanced hydrogen bonding strength observed in hydrogenated SiC and SiO2∕SiC structures

Applied physics letters, 2007-02, Vol.90 (8)

2007

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Residual metal content in Ethylene-Propylene-Diene Monomers synthesized using vanadium- and zirconocene-based catalysts

Journal of applied polymer science, 1999-11, Vol.74 (8), p.1997-2003

1999

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Diffusion reaction of oxygen in aluminum oxide films on silicon

Physical review. B, Condensed matter, 2002-03, Vol.65 (12), Article 121303

2002

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Consequences of NO Thermal Treatments in the Properties of Dielectric Films / SiC Structures

Materials science forum, 2010-01, Vol.645-648, p.689-692

2010

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Narrow nuclear resonance profiling of Al with subnanometric depth resolution

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2002-05, Vol.190 (1), p.538-542

2002

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Chemical state of phosphorous at the SiC/SiO2 interface

Thin solid films, 2019-04, Vol.675, p.172-176

2019

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SiC Nitridation by NH3 Annealing and Its Effects in MOS Capacitors with Deposited SiO2 Films

Journal of electronic materials, 2015-08, Vol.44 (8), p.2823-2828

2015

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4H-SiC surface energy tuning by nitrogen up-take

Applied surface science, 2017-04, Vol.402, p.192-197

2017

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Characterization of Zirconocene Catalysts and of Polyethylenes Produced Using Them

Physica status solidi. A, Applied research, 1999-05, Vol.173 (1), p.123-134

1999

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Determination of catalyst metal residues in polymers by X-ray fluorescence

Spectrochimica acta. Part B: Atomic spectroscopy, 2005-06, Vol.60 (5), p.599-604

2005

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Free radical modification of LDPE with vinyltriethoxysilane

European polymer journal, 2004-06, Vol.40 (6), p.1119-1126

2004

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Investigation of phosphorous in thin films using the 31P(α,p)34S nuclear reaction

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2016-03, Vol.371, p.220-223

2016

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Unraveling the mechanisms responsible for the interfacial region formation in 4H-SiC dry thermal oxidation

Morphological and compositional changes in the SiO2∕SiC interface region induced by oxide thermal growth

Initial stages of SiC oxidation investigated by ion scattering and angle-resolved x-ray photoelectron spectroscopies

Oxygen transport and incorporation mechanisms in the dry thermal oxidation of 6H-SiC

Atomic transport and chemical stability during annealing of ultrathin Al2O3 films on Si

Limiting step involved in the thermal growth of silicon oxide films on silicon carbide

Tracing the incorporation of water in SiO2/SiC structures formed by oxide deposition and thermal oxidation

Effects of nitrogen incorporation on the interfacial layer between thermally grown dielectric films and SiC

Dynamics of thermal growth of silicon oxide films on Si

Polypropylene functionalization with vinyltriethoxysilane

Comparison of nitrogen incorporation in SiO2/SiC and SiO2/Si structures

Characterization of SiC thermal oxidation

Influence of thermal growth parameters on the SiO2/4H-SiC interfacial region

Enhanced hydrogen bonding strength observed in hydrogenated SiC and SiO2∕SiC structures

Residual metal content in Ethylene-Propylene-Diene Monomers synthesized using vanadium- and zirconocene-based catalysts

Diffusion reaction of oxygen in aluminum oxide films on silicon

Consequences of NO Thermal Treatments in the Properties of Dielectric Films / SiC Structures

Narrow nuclear resonance profiling of Al with subnanometric depth resolution

Chemical state of phosphorous at the SiC/SiO2 interface

SiC Nitridation by NH3 Annealing and Its Effects in MOS Capacitors with Deposited SiO2 Films

4H-SiC surface energy tuning by nitrogen up-take

Characterization of Zirconocene Catalysts and of Polyethylenes Produced Using Them

Determination of catalyst metal residues in polymers by X-ray fluorescence

Free radical modification of LDPE with vinyltriethoxysilane

Investigation of phosphorous in thin films using the 31P(α,p)34S nuclear reaction

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