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Finite-Time Task-Space Coordinated Tracking of Networked Robotic Manipulators With Uncertain Dynamics and Disturbances

IEEE transactions on control of network systems, 2021-09, Vol.8 (3), p.1513-1527

2021

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Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators

Composite structures, 2024-07, Vol.340, p.118203, Article 118203

2024

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Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators

Journal of microelectromechanical systems, 2015-10, Vol.24 (5), p.1575-1582

2015

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Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Journal of microelectromechanical systems, 2023-06, Vol.32 (3), p.1-8

2023

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Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches

Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1878-1886

2015

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Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film

Micromachines (Basel), 2022-04, Vol.13 (4), p.641

2022

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Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Microsystems & nanoengineering, 2022-11, Vol.8 (1), p.124-124, Article 124

2022

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Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators

Electronics (Basel), 2022-07, Vol.11 (14), p.2167

2022

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Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C

Journal of microelectromechanical systems, 2015-12, Vol.24 (6), p.1906-1915

2015

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Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes

Journal of micromechanics and microengineering, 2012-12, Vol.22 (12), p.125020-11

2012

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Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

Journal of microelectromechanical systems, 2012-08, Vol.21 (4), p.801-810

2012

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Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors

IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2023-10, Vol.PP (10), p.1-1

2023

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Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure

Journal of microelectromechanical systems, 2023-04, Vol.32 (2), p.1-7

2023

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Suspended 2-D photonic crystal aluminum nitride membrane reflector

Optics express, 2015-04, Vol.23 (8), p.10598-10603

2015

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Investigation of film bulk acoustic resonators for sensing applications in liquid environment

Applied physics letters, 2022-11, Vol.121 (21)

2022

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Optimized response of AlN stack for chipscale GHz ultrasonics

2015 IEEE International Ultrasonics Symposium (IUS), 2015, p.1-4

2015

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Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Japanese Journal of Applied Physics, 2022-11, Vol.61 (11), p.114001

2022

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Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators

Applied physics letters, 2015-06, Vol.106 (25)

2015

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All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

Nanoscale, 2014-06, Vol.6 (11), p.5606-5611

2014

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A bi-stable nanoelectromechanical non-volatile memory based on van der Waals force

Applied physics letters, 2013-07, Vol.103 (5)

2013

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Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Journal of micromechanics and microengineering, 2023-04, Vol.33 (4)

2023

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Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO 3 membrane-based laterally-excited bulk acoustic resonator

Journal of micromechanics and microengineering, 2023-04, Vol.33 (4), p.45006

2023

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All metal nanoelectromechanical switch working at 300 °C for rugged electronics applicationsElectronic supplementary information (ESI) available. See DOI: 10.1039/c3nr05255a

2014-05

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All metal nanoelectromechanical switch working at 300 degree C for rugged electronics applications

Nanoscale, 2014-05, Vol.6 (11), p.5606-5611

2014

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Study of hybrid driven micromirrors for 3-D variable optical attenuator applications

Optics express, 2012-09, Vol.20 (19), p.21598-21611

2012

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Finite-Time Task-Space Coordinated Tracking of Networked Robotic Manipulators With Uncertain Dynamics and Disturbances

Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators

Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators

Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches

Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film

Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications

Effects of Electric Bias on Different Sc-Doped AlN-Based Film Bulk Acoustic Resonators

Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C

Feasibility study of a 3D vibration-driven electromagnetic MEMS energy harvester with multiple vibration modes

Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors

Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure

Suspended 2-D photonic crystal aluminum nitride membrane reflector

Investigation of film bulk acoustic resonators for sensing applications in liquid environment

Optimized response of AlN stack for chipscale GHz ultrasonics

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators

All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

A bi-stable nanoelectromechanical non-volatile memory based on van der Waals force

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO3 membrane-based laterally-excited bulk acoustic resonator

Investigation of electrode pitch on resonant and capacitive characteristics in X-cut LiNbO 3 membrane-based laterally-excited bulk acoustic resonator

All metal nanoelectromechanical switch working at 300 °C for rugged electronics applicationsElectronic supplementary information (ESI) available. See DOI: 10.1039/c3nr05255a

All metal nanoelectromechanical switch working at 300 degree C for rugged electronics applications

Study of hybrid driven micromirrors for 3-D variable optical attenuator applications

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