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Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform

Physics of plasmas, 2021-10, Vol.28 (10)

2021

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Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field

Physics of plasmas, 2024-08, Vol.31 (8)

2024

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Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study

Physics of plasmas, 2023-07, Vol.30 (7)

2023

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Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field

Physics of plasmas, 2023-09, Vol.30 (9)

2023

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Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

Physics of plasmas, 2019-10, Vol.26 (10)

2019

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Kinetics of highly vibrationally excited O2(X) molecules in inductively-coupled oxygen plasmas

Plasma sources science & technology, 2018-04, Vol.27 (4)

2018

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High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Plasma sources science & technology, 2020-11, Vol.29 (11), p.114001

2020

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Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms

Journal of physics. D, Applied physics, 2022-07, Vol.55 (27), p.275202

2022

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Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities

Journal of physics. D, Applied physics, 2021-02, Vol.54 (5), p.55205

2021

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Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas

Physics letters. A, 2023-04, Vol.468, p.128745, Article 128745

2023

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A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms

Physics letters. A, 2024-02, Vol.498, p.129346, Article 129346

2024

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Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency

Plasma sources science & technology, 2020-03, Vol.29 (4), p.45003

2020

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Kinetics of highly vibrationally excited O 2 ( X ) molecules in inductively-coupled oxygen plasmas

Plasma sources science & technology, 2018-04, Vol.27 (4), p.45006

2018

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Electron density modulation in a pulsed dual-frequency (2/13.56 MHz) dual-antenna inductively coupled plasma discharge

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2016-09, Vol.34 (5)

2016

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Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push-pull plasma source

Journal of physics. D, Applied physics, 2016-10, Vol.49 (39), p.395201

2016

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Numerical experiment to estimate the validity of negative ion diagnostic using photo-detachment combined with Langmuir probing

Physics of plasmas, 2015-07, Vol.22 (7)

2015

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Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Plasma sources science & technology, 2014-12, Vol.23 (6), p.62003-4

2014

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Absolute atomic chlorine densities in a Cl2 ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Journal of physics. D, Applied physics, 2012, Vol.45

2012

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Chlorine atom densities in the (3p5)2 P01/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Journal of physics. D, Applied physics, 2013, Vol.46 (29)

2013

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Resonance hairpin probe for electronegative plasma diagnostics

Sirse, Nishant

2013

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Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2011-05, Vol.29 (3), p.031305-031305-7

2011

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Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2010, Vol.28 (2), p.360-372

2010

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Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform

Experimental investigation of an electronegative cylindrical capacitively coupled geometrically asymmetric plasma discharge with an axisymmetric magnetic field

Spatial flux and energy asymmetry in a low pressure capacitively coupled plasma discharge excited by sawtooth waveform: A harmonic study

Discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma with an axisymmetric magnetic field

Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges

Kinetics of highly vibrationally excited O2(X) molecules in inductively-coupled oxygen plasmas

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms

Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities

Magnetic field induced electron temperature inhomogeneity effects on discharge properties in cylindrical capacitively coupled plasmas

A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms

Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency

Kinetics of highly vibrationally excited O 2 ( X ) molecules in inductively-coupled oxygen plasmas

Electron density modulation in a pulsed dual-frequency (2/13.56 MHz) dual-antenna inductively coupled plasma discharge

Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push-pull plasma source

Numerical experiment to estimate the validity of negative ion diagnostic using photo-detachment combined with Langmuir probing

Ground state bromine atom density measurements by two-photon absorption laser-induced fluorescence

Absolute atomic chlorine densities in a Cl2 ICP determined by Two-Photon Laser Induced Fluorescence with a new calibration method

Chlorine atom densities in the (3p5)2 P01/2 excited spin-orbit state measured by two-photon absorption laser-induced fluorescence in a chlorine inductively coupled plasma

Resonance hairpin probe for electronegative plasma diagnostics

Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge

Surface loss rates of H and Cl atoms in an inductively coupled plasma etcher using time-resolved electron density and optical emission measurements

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