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Excimer laser crystallization and doping of silicon films on plastic substrates

Applied physics letters, 1997-01, Vol.70 (3), p.342-344

1997

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High-performance thin-film transistors fabricated using excimer laser processing and grain engineering

IEEE transactions on electron devices, 1998-04, Vol.45 (4), p.925-932

1998

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Diffusion of Metals in Silicon Dioxide

Journal of the Electrochemical Society, 1986-06, Vol.133 (6), p.1242-1246

1986

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Laser-processed thin-film transistors fabricated from sputtered amorphous-silicon films

IEEE transactions on electron devices, 2000-01, Vol.47 (1), p.207-213

2000

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High-performance laser-processed polysilicon thin-film transistors

IEEE electron device letters, 1999-02, Vol.20 (2), p.77-79

1999

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Microstructural characterization of solid-phase crystallized amorphous silicon films recrystallized using an excimer laser

Applied physics letters, 1997-02, Vol.70 (6), p.767-769

1997

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Self-aligned aluminum top-gate polysilicon thin-film transistors fabricated using laser recrystallization and gas-immersion laser doping

IEEE electron device letters, 1997-08, Vol.18 (8), p.394-396

1997

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Comparison of excimer laser recrystallized prepatterned and unpatterned silicon films on SiO2

Journal of applied physics, 1997-02, Vol.81 (3), p.1204-1211

1997

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Laser recrystallization of polycrystalline silicon in recessed structures

Journal of electronic materials, 1997-08, Vol.26 (8), p.L13-L16

1997

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Formation and control of boron buried layers in silicon using an excimer laser

IEEE electron device letters, 1995-01, Vol.16 (1), p.14-16

1995

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Optical and electrical properties of self-assembled, ordered gold nanocrystal/silica thin films prepared by sol–gel processing

Thin solid films, 2005-11, Vol.491 (1), p.38-42

2005

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Performance improvement obtained for thin-film transistors fabricated in prepatterned laser-recrystallized polysilicon

IEEE electron device letters, 1997-06, Vol.18 (6), p.296-298

1997

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Annealing of implantation damage and redistribution of impurities in SiC using a pulsed excimer laser

Applied physics letters, 1990-02, Vol.56 (6), p.530-532

1990

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Formation and control of phosphorus buried layers in silicon using a pulsed XeCl excimer laser

Applied physics letters, 1996-07, Vol.69 (3), p.319-321

1996

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Fabrication and doping of poly-SiGe using excimer-laser processing

Applied Physics A Solids and Surfaces, 1994-08, Vol.59 (2), p.203-207

1994

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Ultra-shallow high-concentration boron profiles for CMOS processing

IEEE electron device letters, 1985-06, Vol.6 (6), p.291-293

1985

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Grain Engineering Approaches for High-Performance Polysilicon Thin-Film Transistor Fabrication

MRS proceedings, 1998, Vol.508, p.55-65, Article 55

1998

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A study of Ni-Ge interdiffusion on GaAS using rapid thermal annealing with temperature standards

Journal of applied physics, 1990-08, Vol.68 (4), p.1641-1648

1990

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Surface Evolution in a Pulsed Laser Induced Epitaxy Process of Submicron SiGe Wires

Journal of the Electrochemical Society, 1996-08, Vol.143 (8), p.2678-2680

1996

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Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films

Journal of applied physics, 1999-06, Vol.85 (11), p.7914-7918

1999

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Iron redistribution and compensation mechanisms in semi-insulating Si-implanted InP

Journal of applied physics, 1989-02, Vol.65 (3), p.1009-1017

1989

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Ion implantation into gallium arsenide

Journal of applied physics, 1988-10, Vol.64 (7), p.3429-3438

1988

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Formation of poly-Si1-xGex using excimer-laser processing

Applied surface science, 1995-02, Vol.86 (1-4), p.346-352

1995

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Deep level transient spectroscopy study of GaAs surface states treated with inorganic sulfides

Applied physics letters, 1988-09, Vol.53 (12), p.1059-1061

1988

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Substrate-impurities effects on GaAs MESFETs

Journal of electronic materials, 1988, Vol.17 (1), p.5-10

1988

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Excimer laser crystallization and doping of silicon films on plastic substrates

High-performance thin-film transistors fabricated using excimer laser processing and grain engineering

Diffusion of Metals in Silicon Dioxide

Laser-processed thin-film transistors fabricated from sputtered amorphous-silicon films

High-performance laser-processed polysilicon thin-film transistors

Microstructural characterization of solid-phase crystallized amorphous silicon films recrystallized using an excimer laser

Self-aligned aluminum top-gate polysilicon thin-film transistors fabricated using laser recrystallization and gas-immersion laser doping

Comparison of excimer laser recrystallized prepatterned and unpatterned silicon films on SiO2

Laser recrystallization of polycrystalline silicon in recessed structures

Formation and control of boron buried layers in silicon using an excimer laser

Optical and electrical properties of self-assembled, ordered gold nanocrystal/silica thin films prepared by sol–gel processing

Performance improvement obtained for thin-film transistors fabricated in prepatterned laser-recrystallized polysilicon

Annealing of implantation damage and redistribution of impurities in SiC using a pulsed excimer laser

Formation and control of phosphorus buried layers in silicon using a pulsed XeCl excimer laser

Fabrication and doping of poly-SiGe using excimer-laser processing

Ultra-shallow high-concentration boron profiles for CMOS processing

Grain Engineering Approaches for High-Performance Polysilicon Thin-Film Transistor Fabrication

A study of Ni-Ge interdiffusion on GaAS using rapid thermal annealing with temperature standards

Surface Evolution in a Pulsed Laser Induced Epitaxy Process of Submicron SiGe Wires

Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films

Iron redistribution and compensation mechanisms in semi-insulating Si-implanted InP

Ion implantation into gallium arsenide

Formation of poly-Si1-xGex using excimer-laser processing

Deep level transient spectroscopy study of GaAs surface states treated with inorganic sulfides

Substrate-impurities effects on GaAs MESFETs

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