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Cell culture on MEMS materials in microenvironment limited by a physical condition

Micro & nano letters, 2012-08, Vol.7 (8), p.725-725

2012

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Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

Journal of lightwave technology, 1999-01, Vol.17 (1), p.14-18

1999

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Improvement of switching time in a thermocapillarity optical switch

Journal of lightwave technology, 2001-07, Vol.19 (7), p.1023-1027

2001

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Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition

2019 IEEE International Electron Devices Meeting (IEDM), 2019, p.18.2.1-18.2.4

2019

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Silicon (110) grid for ion beam processing systems

Journal of micromechanics and microengineering, 2001-09, Vol.11 (5), p.561-566

2001

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Wavelength dependence of insertion loss caused by intermodal interference

Electronics letters, 1999-08, Vol.35 (16), p.1370-1371

1999

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A novel optical self-alignment technology for realization of compact optical multi-gas sensor system

2015 IEEE SENSORS, 2015, p.1-4

2015

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A rotational MEMS diffraction grating for realization of micro-sized spectroscope system

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015, p.208-211

2015

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A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structure

2012 IEEE Sensors, 2012, p.1-4

2012

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Fluorinated polyimide fabrication by magnetically controlled reactive ion etching (MC RIE)

Journal of micromechanics and microengineering, 1994-06, Vol.4 (2), p.67-73

1994

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Micro fluidic circuit design with "spice" simulation

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011, p.1154-1157

2011

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Crystalline anisotropic dry etching for single crystal silicon

2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 2011, p.221-224

2011

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Continuous-wave operation and mirror loss of a U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrors

Applied physics letters, 1990-04, Vol.56 (17), p.1617-1619

1990

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High-power fast-atom beam source and its application to dry etching

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1992-07, Vol.10 (4), p.1352-1357

Shimokawa, Fusao

1992

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Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocomposite

2012 International Conference on Optical MEMS and Nanophotonics, 2012, p.204-205

2012

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Development of high resolution electrostatic tactile display

2017 International Conference on Electronics Packaging (ICEP), 2017, p.484-486

2017

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Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication

Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999, p.418-423

1999

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Development of a multi-electrode electrovibration tactile display with 1 mm resolution

2017 IEEE World Haptics Conference (WHC), 2017, p.659-664

2017

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Nanoblade array for spatial dissection of single cells and tissues

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017, p.577-580

2017

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Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Journal of micromechanics and microengineering, 1996-09, Vol.6 (3), p.310-319

1996

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New high-power fast atom beam source

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1994-09, Vol.12 (5), p.2739-2744

1994

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Reactive-fast-atom beam etching of GaAs using Cl2 gas

Journal of applied physics, 1989-09, Vol.66 (6), p.2613-2618

1989

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Low-loss intersecting grooved waveguides with low Δ for a self-holding optical matrix switch

IEEE transactions on components, packaging, and manufacturing technology. Part B, Advanced packaging, 1995-05, Vol.18 (2), p.241-244

1995

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Silicon dioxide fine patterning by reactive fast atom beam etching

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1988-09, Vol.6 (5), p.1565-1569

1988

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Energy distribution and formation mechanism of fast atoms in a fast atom beam

Journal of applied physics, 1992-07, Vol.72 (1), p.13-17

1992

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Cell culture on MEMS materials in microenvironment limited by a physical condition

Micromechanical optical switches based on thermocapillary integrated in waveguide substrate

Improvement of switching time in a thermocapillarity optical switch

Highly Sensitive Silicon Slip Sensing Imager for Forceps Grippers Used under Low Friction Condition

Silicon (110) grid for ion beam processing systems

Wavelength dependence of insertion loss caused by intermodal interference

A novel optical self-alignment technology for realization of compact optical multi-gas sensor system

A rotational MEMS diffraction grating for realization of micro-sized spectroscope system

A novel integrated tactile image sensor for detection of surface friction and hardness using the reference plane structure

Fluorinated polyimide fabrication by magnetically controlled reactive ion etching (MC RIE)

Micro fluidic circuit design with "spice" simulation

Crystalline anisotropic dry etching for single crystal silicon

Continuous-wave operation and mirror loss of a U-shaped GaAs/AlGaAs laser diode with two totally reflecting mirrors

High-power fast-atom beam source and its application to dry etching

Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocomposite

Development of high resolution electrostatic tactile display

Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication

Development of a multi-electrode electrovibration tactile display with 1 mm resolution

Nanoblade array for spatial dissection of single cells and tissues

Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

New high-power fast atom beam source

Reactive-fast-atom beam etching of GaAs using Cl2 gas

Low-loss intersecting grooved waveguides with low Δ for a self-holding optical matrix switch

Silicon dioxide fine patterning by reactive fast atom beam etching

Energy distribution and formation mechanism of fast atoms in a fast atom beam

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