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2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2020, p.1-5
2020
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2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), 2021, p.1-4
2021
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Japanese Journal of Applied Physics, 1983-02, Vol.22 (2R), p.329
1983
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Japanese Journal of Applied Physics, 1982-01, Vol.21 (5A), p.L277
1982
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Journal of the Japan Society for Precision Engineering, 1993/09/05, Vol.59(9), pp.1531-1536
1993
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Journal of the Japan Society for Precision Engineering, 1992/07/05, Vol.58(7), pp.1161-1166
1992
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Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1989-02, Vol.37, p.891-896
1989
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Thema
- Science & Technology
- Physical Sciences
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- Failure Analysis
- Focused Ion Beam
- Gallium Arsenide
- General Engineering
- General Physics And Astronomy
- Image Resolution
- Integrated Circuits
- Light Sources
- Lsi
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- Physics, Applied
- Silicon
- Technology
- 930 Nm Incoherent Light Source
- Absorption
- Circuit Design
- End Point Detection
Kollektion
Zeitschrift / Serie
- Japanese Journal Of Applied Physics
- Journal Of The Japan Society For Precision Engineering
- Seimitsu Kōgakkaishi
- 精密工学会誌
- Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
- Japanese Journal Of Applied Physics Part 2-Letters
- Japanese Journal Of Applied Physics, Part 1: Regular Papers & Short Notes
- Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms