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AIChE journal, 1996-04, Vol.42 (4), p.1174-1180
1996
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AIChE journal, 1994-04, Vol.40 (4), p.627-646
1994
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Industrial & engineering chemistry research, 1996, Vol.35 (5), p.1642-1651
1996
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Chemical engineering science, 1996-04, Vol.51 (8), p.1187-1198
1996
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Industrial & engineering chemistry research, 1992-03, Vol.31 (3), p.855-860
1992
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2004-07, Vol.22 (4), p.1679-1687
2004
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Industrial & engineering chemistry research, 2005-06, Vol.44 (13), p.4676-4686
2005
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Automatica (Oxford), 2000-05, Vol.36 (5), p.705-715
2000
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Microelectronic engineering, 2003-03, Vol.65 (3), p.345-356
2003
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AIChE journal, 1990-08, Vol.36 (8), p.1267-1271
1990
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Chemical engineering science, 1992-08, Vol.47 (12), p.3085-3097
1992
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Canadian journal of chemical engineering, 1996-02, Vol.74 (1), p.132-143
1996
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Journal of process control, 1999-04, Vol.9 (2), p.161-169
1999
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2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846), 2004, p.107-110
2004
- Link zum Volltext
AIChE journal, 1994, Vol.40 (4), p.627-646
1994
Link zum Volltext
Canadian journal of chemical engineering, 1996, Vol.74 (1), p.132-143
1996
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Industrial & engineering chemistry research, 1992-12, Vol.31 (12), p.2807-2807
1992
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IFAC Proceedings Volumes, 2004-07, Vol.37 (9), p.871-876
2004
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