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Nanotechnology, 2006-02, Vol.17 (4), p.1134-1139
2006
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Journal of microelectromechanical systems, 2008-10, Vol.17 (5), p.1172-1177
2008
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Journal of microelectromechanical systems, 2007-06, Vol.16 (3), p.728-733
2007
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Sensors and actuators. A. Physical., 1994, Vol.45 (3), p.227-236
1994
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Nanotechnology, 2007-11, Vol.18 (45), p.459001
2007
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Journal of micromechanics and microengineering, 1994-03, Vol.4 (1), p.1-13
1994
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Journal of applied physics, 1990-12, Vol.68 (11), p.5840-5844
1990
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Journal of applied physics, 1988-05, Vol.63 (10), p.4799-4803
1988
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IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 1999, Vol.46 (4), p.981-992
1999
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IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 1997-07, Vol.44 (4), p.829-838
1997
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Materials Research Society Symposia Proceedings, 2000, p.57-72
2000
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Sensors and actuators. A, Physical, 1999-04, Vol.74 (1), p.126-133
1999
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MRS bulletin, 1992-07, Vol.17 (7), p.34-45
1992
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Journal of applied physics, 1993-06, Vol.73 (11), p.7864-7871
1993
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Sensors and actuators. A, Physical, 1994, Vol.43 (1), p.322-329
1994
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Thin solid films, 1995-04, Vol.259 (2), p.181-187
1995
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High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation
1997
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Thin solid films, 1994-10, Vol.250 (1-2), p.157-163
1994
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Thin solid films, 1991-03, Vol.197 (1), p.67-83
1991
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Journal of applied physics, 1991-02, Vol.69 (4), p.2097-2104
1991
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Journal of applied physics, 1989, Vol.65 (1), p.122-128
1989
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Metallurgical transactions. A, Physical metallurgy and materials science, 1985-05, Vol.16 (5), p.841-852
1985
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Journal of micromechanics and microengineering, 1991-03, Vol.1 (1), p.10-15
1991
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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007, p.2429-2432
2007
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Sensors and actuators. A. Physical., 2002-02, Vol.96 (2), p.189-195
2002
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