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Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition

Microelectronic engineering, 2003-03, Vol.65 (3), p.259-272

2003

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Effects of surface pretreatments on interface structure during formation of ultra-thin yttrium silicate dielectric films on silicon

Applied surface science, 2001-09, Vol.181 (1), p.78-93

2001

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The 27Al (p,γ)28Si reaction: direct capture cross-section and resonance strengths at Ep = 0.2-1.12 MeV

The European physical journal. A, Hadrons and nuclei, 2000-12, Vol.9 (4), p.479-489

2000

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Interconnected UHV facilities for materials preparation and analysis

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1999-10, Vol.435 (3), p.514-522

1999

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Advances in high κ gate dielectrics for Si and III–V semiconductors

Journal of crystal growth, 2003-04, Vol.251 (1), p.645-650

2003

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Cross section and resonance strength measurements of 19F(p, αγ)16O at Ep= 200–800 keV

The European physical journal. A, Hadrons and nuclei, 2000-01, Vol.7 (1), p.79-85

2000

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22Na( 3He,d) 23Mg reaction studies of states near the proton threshold and hydrogen burning of 22Na

Nuclear physics. A, 1995-08, Vol.591 (2), p.227-243

1995

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Concept and status of the new sample preparation and analyzing facility at Bochum

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1996-06, Vol.113 (1), p.63-66

1996

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High-resolution depth profiling of ultrathin gate oxides using medium-energy ion scattering

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2001-07, Vol.183 (1), p.146-153

2001

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Limitations to depth resolution in ion scattering experiments

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2001-07, Vol.183 (1), p.16-24

2001

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Laboratory for Underground Nuclear Astrophysics (LUNA)

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1994-10, Vol.350 (1), p.327-337

1994

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Layer-resolved depth profiling at single crystal surfaces

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2001-07, Vol.183 (1), p.88-96

2001

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Production of short ion pulses for TOF-RBS

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1999-11, Vol.437 (2), p.521-530

1999

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A recoil separator for the measurement of radiative capture reactions

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1996-07, Vol.376 (2), p.174-184

1996

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A fast beam deflection system for the application in a time of flight spectrometer

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1998, Vol.136, p.1235-1239

1998

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Gamma-ray detection with a 4π NaI spectrometer for material analysis

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1997-12, Vol.132 (4), p.671-684

1997

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Hydrogen doppler spectroscopy using 15N ions

The European physical journal. A, Hadrons and nuclei, 1999-07, Vol.5 (3), p.327-336

1999

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Total cross section of the 14N(d,pγ) 15N nuclear reaction for analytical applications

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1998-03, Vol.136, p.72-76

1998

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22Na( p, γ) 23Mg resonant reaction at low energies

Nuclear physics. A, 1996-05, Vol.601 (2), p.168-180

1996

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Ion dose determination using beam chopper techniques

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1994-09, Vol.349 (1), p.18-26

1994

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Isotopic tracing of Si during thermal growth of Si3N4 ultrathin films

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1996-09, Vol.118 (1-4), p.499-504

1996

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Production of foil targets containing radioactive 22Na

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 1995-09, Vol.364 (1), p.70-73