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Copper metallization in microelectronics using filtered vacuum arc deposition — principles and technological development

Surface & coatings technology, 2000, Vol.133, p.106-113

2000

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Macroparticle filtering of high-current vacuum arc plasmas

IEEE transactions on plasma science, 1997-08, Vol.25 (4), p.660-664

1997

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Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

IEEE transactions on plasma science, 1997-08, Vol.25 (4), p.571-579

1997

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Ecological Restoration of Southwestern Ponderosa Pine Ecosystems: A Broad Perspective

Ecological applications, 2002-10, Vol.12 (5), p.1418-1433

2002

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Microscopic high speed investigations of vacuum arc cathode spots

IEEE transactions on plasma science, 1995-12, Vol.23 (6), p.919-925

1995

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Ion charge state distributions of alloy-cathode vacuum arc plasmas

IEEE transactions on plasma science, 1999-08, Vol.27 (4), p.911-914

1999

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Vacuum arc cathode spots as a self-similarity phenomenon

IEEE transactions on plasma science, 1996-02, Vol.24 (1), p.63-64

1996

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Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs

Plasma sources science & technology, 1999-11, Vol.8 (4), p.567-571

1999

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Metallization of sub-micron trenches and vias with high aspect ratio

Thin solid films, 1997-10, Vol.308, p.455-459

1997

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Fundamental processes in vacuum arc deposition

Surface & coatings technology, 1995-09, Vol.74 (1-3), p.92-96

1995

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Vacuum arc evaporation with programable erosion and deposition profile

Surface & coatings technology, 1997-10, Vol.94 (1-3), p.592-596

1997

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Short-time investigation of laser and arc-assisted deposition processes

Surface & coatings technology, 1994-12, Vol.68, p.713-718

1994

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High-current arc—a new source for high-rate deposition

Surface & coatings technology, 1994-12, Vol.68, p.314-319

1994

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Gap filling with PVD processes for copper metallized integrated circuits

Microelectronic engineering, 1997, Vol.33 (1), p.31-38

1997

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Coastal Landscapes of the Mesolithic: Human Engagement with the Coast from the Atlantic to the Baltic Sea

1st edition., 2020

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Zur Ökonomik von Spitzenleistungen im internationalen Sport (Volume 3.0)

2012

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Quality control of ultra-thin and super-hard coatings by laser-acoustics

Surface & coatings technology, 2002-04, Vol.153 (2), p.252-260

2002

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A Citizen's Call for Ecological Forest Restoration: Forest Restoration Principles and Criteria

Ecological Restoration, 2003-03, Vol.21 (1), p.14-23

2003

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Coastal Landscapes of the Mesolithic: Human Engagement with the Coast from the Atlantic to the Baltic Sea

Schülke, Almut

2020

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Predicting ion charge state distributions of vacuum arc plasmas

Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum, 1996, Vol.1, p.199-203 vol.1

1996

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Dynamics of vacuum arc spots at a point cathode

Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum, 1996, Vol.1, p.123-127 vol.1

1996

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Macroparticle filtering of high-current vacuum arc plasmas

Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum, 1996, Vol.2, p.914-917 vol.2

1996

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Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum, 1996, Vol.1, p.226-230 vol.1

1996

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Ion charge state distributions of alloy-cathode vacuum arc plasmas

Proceedings ISDEIV. 18th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.98CH36073), 1998, Vol.1, p.329-332 vol.1

1998

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No evidence for an effect of working from home on neck pain and neck disability among Swiss office workers: Short-term impact of COVID-19

European spine journal, 2021-06, Vol.30 (6), p.1699-1707

2021

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Copper metallization in microelectronics using filtered vacuum arc deposition — principles and technological development

Macroparticle filtering of high-current vacuum arc plasmas

Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Ecological Restoration of Southwestern Ponderosa Pine Ecosystems: A Broad Perspective

Microscopic high speed investigations of vacuum arc cathode spots

Ion charge state distributions of alloy-cathode vacuum arc plasmas

Vacuum arc cathode spots as a self-similarity phenomenon

Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs

Metallization of sub-micron trenches and vias with high aspect ratio

Fundamental processes in vacuum arc deposition

Vacuum arc evaporation with programable erosion and deposition profile

Short-time investigation of laser and arc-assisted deposition processes

High-current arc—a new source for high-rate deposition

Gap filling with PVD processes for copper metallized integrated circuits

Coastal Landscapes of the Mesolithic: Human Engagement with the Coast from the Atlantic to the Baltic Sea

Zur Ökonomik von Spitzenleistungen im internationalen Sport (Volume 3.0)

Quality control of ultra-thin and super-hard coatings by laser-acoustics

A Citizen's Call for Ecological Forest Restoration: Forest Restoration Principles and Criteria

Coastal Landscapes of the Mesolithic: Human Engagement with the Coast from the Atlantic to the Baltic Sea

Predicting ion charge state distributions of vacuum arc plasmas

Dynamics of vacuum arc spots at a point cathode

Macroparticle filtering of high-current vacuum arc plasmas

Investigation of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectroscopy

Ion charge state distributions of alloy-cathode vacuum arc plasmas

No evidence for an effect of working from home on neck pain and neck disability among Swiss office workers: Short-term impact of COVID-19

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