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The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

Journal of physics. D, Applied physics, 2009-05, Vol.42 (9), p.092005

2009

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Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

Plasma sources science & technology, 2016-06, Vol.25 (4)

2016

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The electrical asymmetry effect in capacitively coupled radio-frequency discharges

Plasma sources science & technology, 2011-04, Vol.20 (2), p.024010

2011

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The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

Journal of physics. D, Applied physics, 2013-05, Vol.46 (17), p.175205-1-13

2013

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Secondary electrons in dual-frequency capacitive radio frequency discharges

Plasma sources science & technology, 2011-08, Vol.20 (4), p.045007

2011

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Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

Plasma sources science & technology, 2019-09, Vol.28 (9)

2019

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Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

Journal of applied physics, 2016-04, Vol.119 (16)

2016

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The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

Plasma sources science & technology, 2011-02, Vol.20 (1), p.015017

2011

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Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Plasma physics and controlled fusion, 2012-12, Vol.54 (12), p.124003

2012

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Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment,simulation, and model

Journal of applied physics, 2009-09, Vol.106 (6), p.063307-063307-6

2009

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Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Journal of physics. D, Applied physics, 2011-07, Vol.44 (28), p.285205

2011

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Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

Journal of physics. D, Applied physics, 2016-07, Vol.49 (26), p.265203

2016

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The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

Applied physics letters, 2010-08, Vol.97 (8), p.081501-081501-3

2010

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The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas

Plasma sources science & technology, 2016-02, Vol.25 (1), p.15024

2016

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Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Plasma sources science & technology, 2015-12, Vol.25 (1)

2015

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Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF 4

Plasma sources science & technology, 2019-09, Vol.28 (9), p.95021

2019

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Deposition of microcrystalline intrinsic silicon by the Electrical Asymmetry Effect technique

Vacuum, 2013-01, Vol.87, p.114-118

2013

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Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Plasma sources science & technology, 2015-05, Vol.24 (3), p.34002-14

2015

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Effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Journal of physics. D, Applied physics, 2013-12, Vol.46 (50), p.505202-12

2013

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Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

Journal of physics. D, Applied physics, 2010-03, Vol.43 (12), p.124016-124016

2010

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Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

Plasma sources science & technology, 2015-08, Vol.24 (4), p.44009-18

2015

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Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma

Plasma sources science & technology, 2015-08, Vol.24 (4), p.44006-13

2015

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Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

Plasma sources science & technology, 2015-08, Vol.24 (4), p.45013-6

2015

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Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

Plasma sources science & technology, 2013-12, Vol.22 (6), p.65009-13

2013

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Charge dynamics in capacitively coupled radio frequency discharges

Journal of physics. D, Applied physics, 2010-06, Vol.43 (22), p.225201-225201

2010

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The electrical asymmetry effect in capacitively coupled radio frequency discharges – measurements of dc self bias, ion energy and ion flux

Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4

The electrical asymmetry effect in capacitively coupled radio-frequency discharges

The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

Secondary electrons in dual-frequency capacitive radio frequency discharges

Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4

Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

Fundamental investigations of capacitive radio frequency plasmas: simulations and experiments

Optimization of the electrical asymmetry effect in dual-frequency capacitively coupled radio frequency discharges: Experiment,simulation, and model

Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects

The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas

Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF 4

Deposition of microcrystalline intrinsic silicon by the Electrical Asymmetry Effect technique

Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Phase resolved optical emission spectroscopy: a non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

Electron heating via self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas

Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma

Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring

Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

Charge dynamics in capacitively coupled radio frequency discharges

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