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Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography

Optics express, 2018-12, Vol.26 (26), p.33718-33731

2018

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Profiling the interface electron gas of LaAlO3/SrTiO3 heterostructures with hard x-ray photoelectron spectroscopy

Physical review letters, 2009-05, Vol.102 (17), p.176805-176805

2009

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The at-wavelength metrology facility for UV- and XUV-reflection and diffraction optics at BESSY-II

Journal of synchrotron radiation, 2016-01, Vol.23 (1), p.67-77

2016

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Potential Remedies for the High Synchrotron-Radiation-Induced Heat Load for Future Highest-Energy-Proton Circular Colliders

Physical review letters, 2015-12, Vol.115 (26), p.264804-264804, Article 264804

2015

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At-wavelength metrology facility for soft X-ray reflection optics

Review of scientific instruments, 2016-05, Vol.87 (5)

2016

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Highly efficient blazed grating with multilayer coating for tender X-ray energies

Optics express, 2016-06, Vol.24 (12), p.13220-13230

2016

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Efficient high‐order suppression system for a metrology beamline

Journal of synchrotron radiation, 2018-01, Vol.25 (1), p.100-107

2018

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Single-walled carbon nanotube membranes for optical applications in the extreme ultraviolet range

Carbon (New York), 2019-12, Vol.155, p.734-739

2019

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Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm

Optics express, 2022-05, Vol.30 (11), p.19332-19342

2022

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Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra‐precise gratings at Helmholtz Zentrum Berlin

Journal of synchrotron radiation, 2018-01, Vol.25 (1), p.91-99

2018

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The frozen elephant trunk technique in acute aortic dissection: the ultimate solution? An institutional experience

Frontiers in cardiovascular medicine, 2024-07, Vol.11, p.1330033

2024

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On the origin of a third spectral component of C1s XPS-spectra for nc-TiC/a-C nanocomposite thin films

Surface & coatings technology, 2008-04, Vol.202 (15), p.3563-3570

2008

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Soft X-ray Reflection Spectroscopy for Nano-Scaled Layered Structure Materials

Scientific reports, 2018-10, Vol.8 (1), p.15724-9, Article 15724

2018

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The high kinetic energy photoelectron spectroscopy facility at BESSY progress and first results

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2009, Vol.601 (1), p.48-53

2009

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Determination of the local environment of silicon and the microstructure of quaternary CrAl(Si)N films

Acta materialia, 2007-04, Vol.55 (6), p.2129-2135

2007

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Erratum: Determining Chemically and Spatially Resolved Atomic Profile of Low Contrast Interface Structure with High Resolution

Scientific reports, 2016-08, Vol.6 (1), p.31016-31016, Article 31016

2016

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The Energy Materials in-Situ Laboratory Berlin (EMIL) at BESSY II

Journal of physics. Conference series, 2013-03, Vol.425 (21), p.212003-4

2013

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A comparative study of root canal preparation using ProFile .04 and Lightspeed rotary Ni-Ti instruments

International endodontic journal, 2002-01, Vol.35 (1), p.37-46

2002

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Diastolic blood pressure is an important determinant of augmentation index and pulse wave velocity in young, healthy males

Journal of Human Hypertension, 2003-03, Vol.17 (3), p.153-158

2003

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A comparative study of root canal preparation using FlexMaster and HERO 642 rotary Ni-Ti instruments

International endodontic journal, 2003-05, Vol.36 (5), p.358-366

2003

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Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

Technical physics, 2019-11, Vol.64 (11), p.1688-1691

2019

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Measurements of x-ray scattering from accelerator vacuum chamber surfaces, and comparison with an analytical model

Physical review special topics. PRST-AB. Accelerators and beams, 2015-04, Vol.18 (4), p.040704, Article 040704

2015

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EUV Ellipsometry on Mo/Si Multilayers

Journal of physics. Conference series, 2013-01, Vol.425 (15), p.152011-4

2013

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Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Surface investigation, x-ray, synchrotron and neutron techniques, 2020, Vol.14 (1), p.124-134

2020

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Effect of roughness, deterministic and random errors in film thickness on the reflecting properties of aperiodic mirrors for the EUV range

Quantum electronics (Woodbury, N.Y.), 2016-01, Vol.46 (5), p.406-413

2016

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Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography

Profiling the interface electron gas of LaAlO3/SrTiO3 heterostructures with hard x-ray photoelectron spectroscopy

The at-wavelength metrology facility for UV- and XUV-reflection and diffraction optics at BESSY-II

Potential Remedies for the High Synchrotron-Radiation-Induced Heat Load for Future Highest-Energy-Proton Circular Colliders

At-wavelength metrology facility for soft X-ray reflection optics

Highly efficient blazed grating with multilayer coating for tender X-ray energies

Efficient high‐order suppression system for a metrology beamline

Single-walled carbon nanotube membranes for optical applications in the extreme ultraviolet range

Highly reflective Ru/Y multilayer mirrors for the spectral range of 9-11 nm

Gratings for synchrotron and FEL beamlines: a project for the manufacture of ultra‐precise gratings at Helmholtz Zentrum Berlin

The frozen elephant trunk technique in acute aortic dissection: the ultimate solution? An institutional experience

On the origin of a third spectral component of C1s XPS-spectra for nc-TiC/a-C nanocomposite thin films

Soft X-ray Reflection Spectroscopy for Nano-Scaled Layered Structure Materials

The high kinetic energy photoelectron spectroscopy facility at BESSY progress and first results

Determination of the local environment of silicon and the microstructure of quaternary CrAl(Si)N films

Erratum: Determining Chemically and Spatially Resolved Atomic Profile of Low Contrast Interface Structure with High Resolution

The Energy Materials in-Situ Laboratory Berlin (EMIL) at BESSY II

A comparative study of root canal preparation using ProFile .04 and Lightspeed rotary Ni-Ti instruments

Diastolic blood pressure is an important determinant of augmentation index and pulse wave velocity in young, healthy males

A comparative study of root canal preparation using FlexMaster and HERO 642 rotary Ni-Ti instruments

Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

Measurements of x-ray scattering from accelerator vacuum chamber surfaces, and comparison with an analytical model

EUV Ellipsometry on Mo/Si Multilayers

Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Effect of roughness, deterministic and random errors in film thickness on the reflecting properties of aperiodic mirrors for the EUV range

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