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High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

Surface & coatings technology, 2010, Vol.204 (11), p.1661-1684

2010

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A kinetic model for stress generation in thin films grown from energetic vapor fluxes

Journal of applied physics, 2016-04, Vol.119 (14)

2016

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The effect of kinetics on intrinsic stress generation and evolution in sputter-deposited films at conditions of high atomic mobility

Journal of applied physics, 2020-01, Vol.127 (4)

2020

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Atomic-scale diffusion rates during growth of thin metal films on weakly-interacting substrates

Scientific reports, 2019-04, Vol.9 (1), p.6640-6640, Article 6640

2019

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Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films

Journal of applied physics, 2016-02, Vol.119 (5), p.055305

2016

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On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

Journal of physics. D, Applied physics, 2009-01, Vol.42 (1), p.015304-015304 (7)

2009

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Semi-Empirical Force-Field Model for the Ti1−xAlxN (0 ≤ x ≤ 1) System

Materials, 2019-01, Vol.12 (2), p.215

2019

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High power pulsed magnetron sputtering: Fundamentals and applications

Journal of alloys and compounds, 2009-08, Vol.483 (1), p.530-534

2009

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Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Surface & coatings technology, 2012-01, Vol.206 (10), p.2706-2710

2012

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Semi-Empirical Force-Field Model for the Ti 1-x Al x N (0 ≤ x ≤ 1) System

Materials, 2019-01, Vol.12 (2)

2019

Volltextzugriff (PDF)

Growth of Nb films on Cu for superconducting radio frequency cavities by direct current and high power impulse magnetron sputtering: A molecular dynamics and experimental study

Surface & coatings technology, 2024-01, Vol.476, p.130199, Article 130199

2024

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Coalescence dynamics of 3D islands on weakly-interacting substrates

Scientific reports, 2020-02, Vol.10 (1), p.2031-2031, Article 2031

2020

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Process characteristics and film properties upon growth of TiOx films by high power pulsed magnetron sputtering

Journal of physics. D, Applied physics, 2007-04, Vol.40 (7), p.2108-2114

2007

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Scaling of elongation transition thickness during thin-film growth on weakly interacting substrates

Applied physics letters, 2017-08, Vol.111 (8)

2017

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Atomic arrangement in immiscible Ag–Cu alloys synthesized far-from-equilibrium

Acta materialia, 2016-05, Vol.110, p.114-121

2016

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On the deposition rate in a high power pulsed magnetron sputtering discharge

Applied physics letters, 2006-10, Vol.89 (15), p.154104-154104-3

2006

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Dynamic competition between island growth and coalescence in metal-on-insulator deposition

Applied physics letters, 2014-10, Vol.105 (16), p.163107

2014

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Unravelling the physical mechanisms that determine microstructural evolution of ultrathin Volmer-Weber films

Journal of applied physics, 2014-07, Vol.116 (4), p.044302

2014

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Coalescence-controlled and coalescence-free growth regimes during deposition of pulsed metal vapor fluxes on insulating surfaces

Journal of applied physics, 2015-04, Vol.117 (13)

2015

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On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering

Journal of physics. D, Applied physics, 2009-06, Vol.42 (11), p.115204-115204 (5)

2009

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Interplay between thin silver films and epitaxial graphene

Surface & coatings technology, 2020-01, Vol.381, p.125200, Article 125200

2020

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Tilt of the columnar microstructure in off-normally deposited thin films using highly ionized vapor fluxes

Journal of applied physics, 2013-05, Vol.113 (17), p.7 pages

2013

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Probing the uniformity of silver-doped epitaxial graphene by micro-Raman mapping

Physica. B, Condensed matter, 2020-03, Vol.580, p.411751, Article 411751

2020

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Theoretical and experimental study of metastable solid solutions and phase stability within the immiscible Ag-Mo binary system

Journal of applied physics, 2016-03, Vol.119 (9), p.095303

2016

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Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide

Surface & coatings technology, 2008-07, Vol.202 (20), p.5033-5035

2008

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High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

A kinetic model for stress generation in thin films grown from energetic vapor fluxes

The effect of kinetics on intrinsic stress generation and evolution in sputter-deposited films at conditions of high atomic mobility

Atomic-scale diffusion rates during growth of thin metal films on weakly-interacting substrates

Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films

On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

Semi-Empirical Force-Field Model for the Ti1−xAlxN (0 ≤ x ≤ 1) System

High power pulsed magnetron sputtering: Fundamentals and applications

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Semi-Empirical Force-Field Model for the Ti 1-x Al x N (0 ≤ x ≤ 1) System

Growth of Nb films on Cu for superconducting radio frequency cavities by direct current and high power impulse magnetron sputtering: A molecular dynamics and experimental study

Coalescence dynamics of 3D islands on weakly-interacting substrates

Process characteristics and film properties upon growth of TiOx films by high power pulsed magnetron sputtering

Scaling of elongation transition thickness during thin-film growth on weakly interacting substrates

Atomic arrangement in immiscible Ag–Cu alloys synthesized far-from-equilibrium

On the deposition rate in a high power pulsed magnetron sputtering discharge

Dynamic competition between island growth and coalescence in metal-on-insulator deposition

Unravelling the physical mechanisms that determine microstructural evolution of ultrathin Volmer-Weber films

Coalescence-controlled and coalescence-free growth regimes during deposition of pulsed metal vapor fluxes on insulating surfaces

On the phase formation of titanium oxide films grown by reactive high power pulsed magnetron sputtering

Interplay between thin silver films and epitaxial graphene

Tilt of the columnar microstructure in off-normally deposited thin films using highly ionized vapor fluxes

Probing the uniformity of silver-doped epitaxial graphene by micro-Raman mapping

Theoretical and experimental study of metastable solid solutions and phase stability within the immiscible Ag-Mo binary system

Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide

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