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Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Nanotechnology, 2013-01, Vol.24 (2), p.025601-025601

2013

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Elastic properties of ultrathin diamond/AlN membranes

Thin solid films, 2014-05, Vol.558, p.267-271

2014

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Transparent diamond electrodes for tunable micro-optical devices

Diamond and related materials, 2013-09, Vol.38, p.101-103

2013

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Piezoelectrically actuated diamond cantilevers for high-frequency applications

Diamond and related materials, 2013-09, Vol.38, p.69-72

2013

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Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition

Microelectronic engineering, 2003-10, Vol.70 (1), p.109-114

2003

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Enhanced mechanical performance of AlN nanodiamond micro-resonators

Journal of micromechanics and microengineering, 2013-12, Vol.23 (12), p.125017-6

2013

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Silicon Nitride Films Deposited Using ECR-PECVD Technique for Coating InGaAlAs High Power Laser Facets

Journal of the Electrochemical Society, 2003-07, Vol.150 (7), p.F129

2003

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AlN based microgenerators for powering implantable sensor devices

Physica status solidi. C, 2011-02, Vol.8 (2), p.476-478

2011

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Dynamic characterization of thin aluminum nitride microstructures

Physica status solidi. C, 2011-02, Vol.8 (2), p.479-481

2011

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Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes

Applied physics letters, 1985-04, Vol.46 (8), p.739-741

1985

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Diamond/AlN Thin Films for Optical Applications

AIP conference proceedings, 2010, Vol.1292 (1)

2010

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Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures

Journal of electronic materials, 1996-09, Vol.25 (9), p.1446-1450

1996

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Passivation of InP heterojunction bipolar transistors by strain controlled plasma assisted electron beam evaporated hafnium oxide

Applied physics letters, 2012-01, Vol.100 (1), p.014102-014102-4

2012

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Compositional study of silicon oxynitride thin films deposited using electron cyclotron resonance plasma-enhanced chemical vapor deposition technique

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2005-05, Vol.23 (3), p.545-550

2005

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Correlation Between Composition and Stress for High Density Plasma CVD Silicon Nitride Films

Journal of the Electrochemical Society, 2010, Vol.157 (2), p.G33

2010

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Room-temperature, high-deposition-rate, plasma-enhanced chemical vapour deposition of silicon oxynitride thin films producing low surface damage on lattice-matched and pseudomorphic III–V quantum-well structures

Thin solid films, 1995-04, Vol.259 (2), p.225-230

1995

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Electrostatically coupled vibration modes in unimorph complementary microcantilevers

Applied physics letters, 2012-03, Vol.100 (12), p.124104-124104-4

2012

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Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2010-05, Vol.28 (3), p.394-399

2010

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Enhanced mechanical performance of AIN/nanodiamond micro-resonators

Journal of micromechanics and microengineering, 2013, Vol.23 (12)

2013

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Characteristics of a two-component chemically-assisted ion-beam etching technique for dry-etching of high-speed multiple quantum well laser mirrors

Applied physics letters, 1995-08, Vol.67 (7), p.927-929

1995

Volltextzugriff (PDF)

Compositional study of silicon oxynitride thin films depositedusing electron cyclotron resonance plasma-enhanced chemicalvapor deposition technique

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2005-04, Vol.23 (3), p.545-550

2005

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Stress Changes in Silicon Nitride Thin Films on Thermal Cycling and Deconvolution of Separate Contributions

ECS transactions, 2009, Vol.19 (2), p.443-453

2009

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Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy-loss spectroscopy, and secondary ion mass spectrometry

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1987-07, Vol.5 (4), p.1470-1473

1987

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Low-bias-current direct modulation up to 33 GHz in InGaAs/GaAs/AlGaAs pseudomorphic MQWridge-waveguide lasers

IEEE photonics technology letters, 1994-01, Vol.6 (9), p.1076-1079

1994

Volltextzugriff (PDF)

Mass spectrometric study of gas evolution from plasma-deposited fluorohydrogenated amorphous carbon films on heating

Thin solid films, 1988-12, Vol.167 (1), p.255-260

Sah, R.E.

1988

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Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Elastic properties of ultrathin diamond/AlN membranes

Transparent diamond electrodes for tunable micro-optical devices

Piezoelectrically actuated diamond cantilevers for high-frequency applications

Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition

Enhanced mechanical performance of AlN nanodiamond micro-resonators

Silicon Nitride Films Deposited Using ECR-PECVD Technique for Coating InGaAlAs High Power Laser Facets

AlN based microgenerators for powering implantable sensor devices

Dynamic characterization of thin aluminum nitride microstructures

Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes

Diamond/AlN Thin Films for Optical Applications

Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures

Passivation of InP heterojunction bipolar transistors by strain controlled plasma assisted electron beam evaporated hafnium oxide

Compositional study of silicon oxynitride thin films deposited using electron cyclotron resonance plasma-enhanced chemical vapor deposition technique

Correlation Between Composition and Stress for High Density Plasma CVD Silicon Nitride Films

Room-temperature, high-deposition-rate, plasma-enhanced chemical vapour deposition of silicon oxynitride thin films producing low surface damage on lattice-matched and pseudomorphic III–V quantum-well structures

Electrostatically coupled vibration modes in unimorph complementary microcantilevers

Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering

Enhanced mechanical performance of AIN/nanodiamond micro-resonators

Characteristics of a two-component chemically-assisted ion-beam etching technique for dry-etching of high-speed multiple quantum well laser mirrors

Compositional study of silicon oxynitride thin films depositedusing electron cyclotron resonance plasma-enhanced chemicalvapor deposition technique

Stress Changes in Silicon Nitride Thin Films on Thermal Cycling and Deconvolution of Separate Contributions

Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energy-loss spectroscopy, and secondary ion mass spectrometry

Low-bias-current direct modulation up to 33 GHz in InGaAs/GaAs/AlGaAs pseudomorphic MQWridge-waveguide lasers

Mass spectrometric study of gas evolution from plasma-deposited fluorohydrogenated amorphous carbon films on heating

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