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Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1996-09, Vol.118 (1), p.418-422
1996
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Japanese Journal of Applied Physics, 1992-12, Vol.31 (12S), p.4537
1992
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Japanese Journal of Applied Physics, 1985-07, Vol.24 (7), p.L566-L568
1985
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Japanese Journal of Applied Physics, 1989-10, Vol.28 (10R), p.2095
1989
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Journal of the Japan Society for Precision Engineering, 1990/07/05, Vol.56(7), pp.1181-1184
1990
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Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 1994-03, Vol.85 (1-4), p.756-759
1994
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Shinku, 1989/07/20, Vol.32(7), pp.600-607
1989
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Design of Ultra High Vacuum Scanning Electron Microscope Combined with Scanning Tunneling Microscope
1992
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MRS proceedings, 1992, Vol.295, Article 201
1992
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Shinku, 1982/06/20, Vol.25(6), pp.439-447
1982
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Thema
- Physical Sciences
- Physics
- Science & Technology
- Physics, Applied
- Focused Ion Beam
- General Engineering
- General Physics And Astronomy
- Exact Sciences And Technology
- Liquid Metal Ion Source
- Beryllium
- Channeling Effect
- Charged-Particle Beams
- Condensed Matter: Structure, Mechanical And Thermal Properties
- Deep-Level Transient Spectroscopy
- Defect
- Electromagnetism; Electron And Ion Optics
- Electron Channeling Pattern
- Etching
- Focused Ion Beam Process
- Focussed Ion Beam Process
Kollektion
Zeitschrift / Serie
- Japanese Journal Of Applied Physics
- Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
- Mrs Proceedings
- Nuclear Instruments & Methods In Physics Research. Section B, Beam Interactions With Materials And Atoms
- Shinku
- Japanese Journal Of Applied Physics Part 2-Letters
- Japanese Journal Of Applied Physics Part 2-Letters & Express Letters
- Journal Of The Japan Society For Precision Engineering
- Jpn. J. Appl. Phys. 2, Lett
- Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms