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Advances in 3D Sensor Technology by Using Stepper Lithography

Frontiers in physics, 2021-01, Vol.8

2021

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32-Channel silicon strip detection module for combined X-ray fluorescence spectroscopy and X-ray diffractometry analysis

Frontiers in physics, 2022-09, Vol.10

2022

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Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask

Journal of microelectromechanical systems, 2017-08, Vol.26 (4), p.926-934

2017

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3D trenched-electrode sensors for charged particle tracking and timing

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2019-05, Vol.927, p.24-30

2019

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Development of a new generation of 3D pixel sensors for HL-LHC

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2016-07, Vol.824, p.386-387

2016

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SiCILIA-Silicon Carbide Detectors for Intense Luminosity Investigations and Applications

Sensors (Basel, Switzerland), 2018-07, Vol.18 (7), p.2289

2018

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The INFN–FBK “Phase-2” R&D program

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2016-07, Vol.824, p.388-391

2016

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First production of new thin 3D sensors for HL-LHC at FBK

Journal of instrumentation, 2017-01, Vol.12 (1), p.C01022-C01022

2017

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Characterization of iLGADs using soft X-rays

Journal of instrumentation, 2023-12, Vol.18 (12), p.P12006

2023

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Double-Sided, Double-Type-Column 3-D Detectors: Design, Fabrication, and Technology Evaluation

IEEE transactions on nuclear science, 2008-10, Vol.55 (5), p.2775-2784

2008

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Development of thin pixel detectors on epitaxial silicon for HEP experiments

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2013-08, Vol.718, p.295-296

2013

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Development of 3D detectors featuring columnar electrodes of the same doping type

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2005-04, Vol.541 (1), p.441-448

2005

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Thin and edgeless sensors for ATLAS pixel detector upgrade

Journal of instrumentation, 2017-12, Vol.12 (12), p.C12038-C12038

2017

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Performance evaluation of 3D-DDTC detectors on p-type substrates

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2010-12, Vol.624 (2), p.459-464

2010

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A Three-Dimensional Gated Diode Structure for Surface Parameter Characterization in a 3D Sensor Technology

2017 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2017, p.1-4

2017

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Development of 3D-DDTC pixel detectors for the ATLAS upgrade

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2011-04, Vol.636 (1), p.S15-S23

2011

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Development of new 3D pixel sensors for phase 2 upgrades at LHC

2015 IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2015, p.1-4

2015

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Fabrication of 3D detectors with columnar electrodes of the same doping type

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-04, Vol.573 (1), p.224-227

2007

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First electrical characterization of 3D detectors with electrodes of the same doping type

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-01, Vol.570 (2), p.317-321

2007

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Study of the signal formation in single-type column 3D silicon detectors

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2007-09, Vol.579 (2), p.633-637

2007

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Fabrication of PIN diode detectors on thinned silicon wafers

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 2004-09, Vol.530 (1), p.134-138