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Non‐self‐sustained electron beam RF‐generated plasma in application for functional surface pretreatment

Plasma processes and polymers, 2021-07, Vol.18 (7), p.n/a

2021

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Boron-doped Homoepitaxial Diamond CVD from Microwave Plasma-Activated Ethanol/Trimethyl Borate/Hydrogen Mixtures

Chemical vapor deposition, 2012-09, Vol.18 (10-12), p.302-308

2012

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Carbon nanowalls decorated with silicon for lithium-ion batteries

Carbon (New York), 2012-03, Vol.50 (3), p.1438-1442

2012

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Pore sealing mechanism in OSG low‐k films under ion bombardment

Plasma processes and polymers, 2020-02, Vol.17 (2), p.n/a

2020

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Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate films

Plasma processes and polymers, 2018-04, Vol.15 (4), p.n/a

2018

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Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

IEEE transactions on plasma science, 2007-10, Vol.35 (5), p.1229-1240

2007

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Electrochemical activation of carbon nanowalls

Mendeleev communications, 2011-09, Vol.21 (5), p.264-265

2011

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Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-09, Vol.38 (5)

2020

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Helium electron beam rf plasma for low-k surface functionalization

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2022-12, Vol.40 (6)

2022

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Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2018-11, Vol.36 (6)

2018

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Simulation of Gas-Phase Kinetics in \hbox:\hbox: \hbox Mixtures

IEEE transactions on plasma science, 2007-12, Vol.35 (6), p.1691-1703

2007

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Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission

ACS applied electronic materials, 2022-06, Vol.4 (6), p.2760-2776

2022

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Emission properties of carbon nanowalls on porous silicon

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2012-03, Vol.30 (2)

2012

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics

IEEE transactions on plasma science, 2009-09, Vol.37 (9), p.1697-1704

2009

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Carbon nanowalls decorated with silicon for lithium-ion batteries

Carbon (New York), 2012, Vol.50 (3), p.1438-1442

2012

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Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in Ar/CF4 and Ar/CHF3 Mixtures: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

IEEE transactions on plasma science, 2009, Vol.37 (9), p.1683-1696

2009

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Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

IEEE transactions on plasma science, 2009, Vol.37 (9), p.1697-1704

2009

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Simulation of Gas-Phase Kinetics in CHF3 : H2 : O2 Mixtures

IEEE transactions on plasma science, 2007, Vol.35 (6), p.1691-1703

2007

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Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges: Modeling and simulation of collisional low-temperature plasmas

IEEE transactions on plasma science, 2007, Vol.35 (5), p.1229-1240

2007

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Assessment of the stress-strain behavior of structural elements of the railway superstructures in the Republic of Uzbekistan during the operation of rolling stock with increased axle loads

Bulletin of scientific research results, 2019-11 (3), p.67-88

Rakhimov, Rustam

2019

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Relativistic photoeffect for s states in a central field

The European physical journal. D, Atomic, molecular, and optical physics, 2020-08, Vol.74 (8), Article 166

2020

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Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

Beilstein journal of nanotechnology, 2020, Vol.11 (1), p.383-390

2020

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Chromite placer occurrences of the Volga-Ural basin – genesis, sources and industrial potential

Georesursy, 2021-08, Vol.23 (3), p.143-148

2021

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Optical and IR absorption of multilayer carbon nanowalls

Carbon (New York), 2014-04, Vol.70, p.111-118

2014

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Morphology of lithium niobium oxide thin film ultrasonic transducers deposited by RF magnetron sputtering

Ceramics international, 2023-05, Vol.49 (10), p.16297-16304

2023

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Non‐self‐sustained electron beam RF‐generated plasma in application for functional surface pretreatment

Boron-doped Homoepitaxial Diamond CVD from Microwave Plasma-Activated Ethanol/Trimethyl Borate/Hydrogen Mixtures

Carbon nanowalls decorated with silicon for lithium-ion batteries

Pore sealing mechanism in OSG low‐k films under ion bombardment

Synergistic effect of VUV photons and F atoms on damage and etching of porous organosilicate films

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

Electrochemical activation of carbon nanowalls

Irradiation of nanoporous structures with light and heavy low-energy ions: Sputtering enhancement and pore sealing

Helium electron beam rf plasma for low-k surface functionalization

Argon clustering in silicon under low-energy irradiation: Molecular dynamics simulation with different Ar–Si potentials

Simulation of Gas-Phase Kinetics in \hbox:\hbox: \hbox Mixtures

Modification of Porous Ultralow‑k Film by Vacuum Ultraviolet Emission

Emission properties of carbon nanowalls on porous silicon

Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics

Carbon nanowalls decorated with silicon for lithium-ion batteries

Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in Ar/CF4 and Ar/CHF3 Mixtures: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics: Special Issue on Advances on Plasma Processing for Semiconductor Manufacturing

Simulation of Gas-Phase Kinetics in CHF3 : H2 : O2 Mixtures

Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges: Modeling and simulation of collisional low-temperature plasmas

Assessment of the stress-strain behavior of structural elements of the railway superstructures in the Republic of Uzbekistan during the operation of rolling stock with increased axle loads

Relativistic photoeffect for s states in a central field

Formation of nanoripples on ZnO flat substrates and nanorods by gas cluster ion bombardment

Chromite placer occurrences of the Volga-Ural basin – genesis, sources and industrial potential

Optical and IR absorption of multilayer carbon nanowalls

Morphology of lithium niobium oxide thin film ultrasonic transducers deposited by RF magnetron sputtering

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