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Direct writing laser of high aspect ratio epoxy microstructures

Journal of micromechanics and microengineering, 2011-01, Vol.21 (1), p.017003

2011

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Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Journal of microelectromechanical systems, 1997-12, Vol.6 (4), p.337-346

1997

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Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor

Microelectronic engineering, 2006-04, Vol.83 (4), p.1185-1188

2006

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Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems

Journal of micromechanics and microengineering, 1998-12, Vol.8 (4), p.272-278

1998

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Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

Sensors and actuators. A. Physical., 1998-10, Vol.70 (1), p.42-47

1998

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Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Sensors and actuators. A. Physical., 1996-06, Vol.54 (1), p.530-535

1996

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Atomic force microscopy using cantilevers with integrated tips and piezoelectric layers for actuation and detection

Journal of micromechanics and microengineering, 1997-09, Vol.7 (3), p.218-220

1997

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Vortex dynamics and phase transitions in a two-dimensional array of Josephson junctions

Physical review letters, 1986-03, Vol.56 (12), p.1291-1294

1986

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Inductive conductance measurements in two-dimensional superconducting systems

Applied physics letters, 1989-11, Vol.55 (22), p.2336-2338

1989

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Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Microsystem technologies, 1998-05, Vol.4 (3), p.147-150

1998

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Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Sensors and actuators. A. Physical., 1998, Vol.64 (1), p.41-49

1998

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Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy

Applied physics letters, 1997-04, Vol.70 (17), p.2318-2320

1997

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Piezoelectric position sensor for ultrasonic EFM motors

Sensors and actuators. A, Physical, 1994-04, Vol.42 (1), p.661-665

1994

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New design of micromachined capacitive force sensor

Journal of micromechanics and microengineering, 1993-12, Vol.3 (4), p.239-242

1993

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Growth and structural properties of epitaxial Pb(Zr x Ti1− x )O3 films and Pb(Zr x Ti1− x )O3-cuprate heterostructures

Journal of applied physics, 1996-04, Vol.79 (8), p.4298-4305

1996

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Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

Sensors and actuators. A. Physical., 1997-05, Vol.60 (1), p.186-190

1997

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Design of an integrated electrostatic stepper motor with axial field

Sensors and actuators. A. Physical., 1991, Vol.27 (1), p.597-603

1991

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Hybrid ultrasonic elastic force motors micromachined in silicon

Integrated ferroelectrics, 1995-03, Vol.8 (1-2), p.25-34

1995

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Shear Modulus Softening of a Lattice of Superconducting Vortices

Japanese Journal of Applied Physics, 1987-01, Vol.26 (S3-2), p.1497

1987

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Low-temperature operating silicon bolometers for nuclear radiation detection

Sensors and actuators. A. Physical., 1990-06, Vol.22 (1-3), p.478-481

1990

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Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating

Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems, 1994, p.81-85

1994

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Locking-unlocking transition of a two-dimensional lattice of superconducting vortices

Physica B + C, 1981-01, Vol.107 (1), p.455-457

1981

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PZT films for micro-pumps

Integrated ferroelectrics, 1995-03, Vol.8 (1-2), p.13-23

1995

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Polyolefin Elastomers with Isotactic Propylene Crystallinity

Nihon Gomu Kyōkai shi, 2006-03, Vol.79 (3), p.154-154

2006

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Hybrid ultrasonic micromachined motors

[1993] Proceedings IEEE Micro Electro Mechanical Systems, 1993, p.128-132

1993

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Direct writing laser of high aspect ratio epoxy microstructures

Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor

Advanced deep reactive ion etching: a versatile tool for microelectromechanical systems

Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Atomic force microscopy using cantilevers with integrated tips and piezoelectric layers for actuation and detection

Vortex dynamics and phase transitions in a two-dimensional array of Josephson junctions

Inductive conductance measurements in two-dimensional superconducting systems

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy

Piezoelectric position sensor for ultrasonic EFM motors

New design of micromachined capacitive force sensor

Growth and structural properties of epitaxial Pb(Zr x Ti1− x )O3 films and Pb(Zr x Ti1− x )O3-cuprate heterostructures

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

Design of an integrated electrostatic stepper motor with axial field

Hybrid ultrasonic elastic force motors micromachined in silicon

Shear Modulus Softening of a Lattice of Superconducting Vortices

Low-temperature operating silicon bolometers for nuclear radiation detection

Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating

Locking-unlocking transition of a two-dimensional lattice of superconducting vortices

PZT films for micro-pumps

Polyolefin Elastomers with Isotactic Propylene Crystallinity

Hybrid ultrasonic micromachined motors

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