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Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge

Journal of physics. D, Applied physics, 2022-01, Vol.55 (1), p.15202

2022

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An ionization region model of the reactive Ar/O 2 high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2016-12, Vol.25 (6), p.65004

2016

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A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

Plasma sources science & technology, 2017-11, Vol.26 (12), p.125003

2017

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An ionization region model for high-power impulse magnetron sputtering discharges

Plasma sources science & technology, 2011-12, Vol.20 (6), p.065007-1-10

2011

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Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Plasma sources science & technology, 2012-04, Vol.21 (2), p.25005-1-9

2012

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Particle-balance models for pulsed sputtering magnetrons

Journal of physics. D, Applied physics, 2017-09, Vol.50 (35), p.354003

2017

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Target ion and neutral spread in high power impulse magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-01, Vol.41 (1)

2023

Volltextzugriff (PDF)

An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

Plasma sources science & technology, 2016-10, Vol.25 (6)

2016

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A study of the oxygen dynamics in a reactive Ar/O2 high power impulse magnetron sputtering discharge using an ionization region model

Journal of applied physics, 2017-05, Vol.121 (17)

2017

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A study of the oxygen dynamics in a reactive Ar/O 2 high power impulse magnetron sputtering discharge using an ionization region model

Journal of applied physics, 2017-05, Vol.121 (17)

2017

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Modeling of high power impulse magnetron sputtering discharges with graphite target

Plasma sources science & technology, 2021-11, Vol.30 (11), p.115017

2021

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The role of Ohmic heating in dc magnetron sputtering

Plasma sources science & technology, 2016-11, Vol.25 (6), p.65024

2016

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Radiation from an electron beam in magnetized plasma: excitation of a whistler mode wave packet by interacting, higher-frequency, electrostatic-wave eigenmodes

Plasma physics and controlled fusion, 2017-12, Vol.59 (12), p.124006

2017

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Faster-than-Bohm cross-B electron transport in strongly pulsed plasmas

Physical review letters, 2009-11, Vol.103 (22), p.225003-225003, Article 225003

2009

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A bulk plasma model for dc and HiPIMS magnetrons

Plasma sources science & technology, 2008-11, Vol.17 (4), p.045009

2008

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On Recycling in High Power Impulse Magnetron Sputtering Discharges

2018 IEEE International Conference on Plasma Science (ICOPS), 2018, p.1-1

2018

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Operating modes and target erosion in high power impulse magnetron sputtering

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-07, Vol.40 (4), p.043005

2022

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Radiation from an electron beam in a magnetized plasma: Whistler mode wave packets

Journal of Geophysical Research, 2006-11, Vol.111 (A11), p.A11212-n/a

2006

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Effective distribution functions for electrostatic waves in dusty plasmas with a dust-size distribution

IEEE transactions on plasma science, 2001-04, Vol.29 (2), p.182-185

Raadu, M.A.

2001

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The physics of double layers and their role in astrophysics

Physics reports, 1989-06, Vol.178 (2), p.25-97

Raadu, Michael A.

1989

Volltextzugriff (PDF)

On sheath energization and Ohmic heating in sputtering magnetrons

Plasma sources science & technology, 2013-08, Vol.22 (4), p.45005-1-7

2013

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Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

Plasma sources science & technology, 2012-08, Vol.21 (4), p.45004-1-12

2012

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Delayed shielding of a test charge due to dynamical grain charging in a dusty plasma

IEEE transactions on plasma science, 2004-04, Vol.32 (2), p.627-631

2004

Volltextzugriff (PDF)

On Electron Heating In Magnetron Sputtering Discharges

2017 IEEE International Conference on Plasma Science (ICOPS), 2017, p.1-1

2017

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The current waveform in reactive high power impulse magnetron sputtering

2016 IEEE International Conference on Plasma Science (ICOPS), 2016, p.1-1

2016

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Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge

An ionization region model of the reactive Ar/O 2 high power impulse magnetron sputtering discharge

A unified treatment of self-sputtering, process gas recycling, and runaway for high power impulse sputtering magnetrons

An ionization region model for high-power impulse magnetron sputtering discharges

Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields

Particle-balance models for pulsed sputtering magnetrons

Target ion and neutral spread in high power impulse magnetron sputtering

An ionization region model of the reactive Ar/O2 high power impulse magnetron sputtering discharge

A study of the oxygen dynamics in a reactive Ar/O2 high power impulse magnetron sputtering discharge using an ionization region model

A study of the oxygen dynamics in a reactive Ar/O 2 high power impulse magnetron sputtering discharge using an ionization region model

Modeling of high power impulse magnetron sputtering discharges with graphite target

The role of Ohmic heating in dc magnetron sputtering

Radiation from an electron beam in magnetized plasma: excitation of a whistler mode wave packet by interacting, higher-frequency, electrostatic-wave eigenmodes

Faster-than-Bohm cross-B electron transport in strongly pulsed plasmas

A bulk plasma model for dc and HiPIMS magnetrons

On Recycling in High Power Impulse Magnetron Sputtering Discharges

Operating modes and target erosion in high power impulse magnetron sputtering

Radiation from an electron beam in a magnetized plasma: Whistler mode wave packets

Effective distribution functions for electrostatic waves in dusty plasmas with a dust-size distribution

The physics of double layers and their role in astrophysics

On sheath energization and Ohmic heating in sputtering magnetrons

Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses

Delayed shielding of a test charge due to dynamical grain charging in a dusty plasma

On Electron Heating In Magnetron Sputtering Discharges

The current waveform in reactive high power impulse magnetron sputtering

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