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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Plasma sources science & technology, 2002-11, Vol.11 (4), p.525-543

2002

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Hairpin resonator probe measurements in RF plasmas

Plasma sources science & technology, 2005-11, Vol.14 (4), p.734-743

2005

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The hairpin resonator: A plasma density measuring technique revisited

Journal of applied physics, 2004-04, Vol.95 (7), p.3785-3791

2004

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Probe diagnostics of non-Maxwellian plasmas

Journal of applied physics, 1993-04, Vol.73 (8), p.3657-3663

1993

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Measurement of electron energy distribution in low-pressure RF discharges

Plasma sources science & technology, 1992-03, Vol.1 (1), p.36-58

1992

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Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Physical review letters, 1990-08, Vol.65 (8), p.996-999

1990

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Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Applied physics letters, 2008-02, Vol.92 (6)

2008

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Experimental setup and electrical characteristics of an inductively coupled plasma

Journal of applied physics, 1999-01, Vol.85 (2), p.703-712

1999

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Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

Physical review letters, 1992-01, Vol.68 (1), p.40-43

1992

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A simple analysis of an inductive RF discharge

Plasma sources science & technology, 1992-08, Vol.1 (3), p.179-186

1992

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Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge

Applied physics letters, 1993-12, Vol.63 (23), p.3137-3139

1993

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Experimental Evidence of Collisionless Power Absorption in Inductively Coupled Plasmas

Physical review letters, 1998-04, Vol.80 (15), p.3264-3267

1998

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Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge

Plasma sources science & technology, 1994-05, Vol.3 (2), p.169-176

1994

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Electromagnetic field structure in a weakly collisional inductively coupled plasma

Journal of applied physics, 1997-12, Vol.82 (12), p.5944-5947

1997

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The electron-energy distribution function in a shielded argon radiofrequency inductive discharge

Plasma sources science & technology, 1995-08, Vol.4 (3), p.332-336

1995

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Second harmonic and ponderomotive forces acting on electrons in an inhomogeneous radio frequency field of an inductive discharge

Applied physics letters, 2000-04, Vol.76 (16), p.2188-2190

2000

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Electrical characteristics of parallel-plate RF discharges in argon

IEEE transactions on plasma science, 1991-08, Vol.19 (4), p.660-676

1991

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Observation of Second Harmonic Currents in Inductively Coupled Plasmas

Physical review letters, 1999-08, Vol.83 (8), p.1610-1612

1999

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Effective electron collision frequency and electrical conductivity of radio frequency plasmas

Journal of applied physics, 1999-03, Vol.85 (6), p.3081-3083

1999

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Probe measurements of the space potential in a radio frequency discharge

Journal of applied physics, 1990-10, Vol.68 (7), p.3157-3162

1990

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Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge

Journal of applied physics, 1991-03, Vol.69 (6), p.3455-3460

1991

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An experimental system for symmetric capacitive rf discharge studies

Review of scientific instruments, 1990-09, Vol.61 (9), p.2401-2406

1990

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Hot plasma and nonlinear effects in inductive discharges

Physics of Plasmas, 1999-05, Vol.6 (5), p.1804-1812

1999

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Plasma power measurement and hysteresis in the E - H transitionof a rf inductively coupled plasma system

Applied physics letters, 2008-02, Vol.92 (6), p.061504-061504-3

2008

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A comparison of RF electrode sheath models

IEEE transactions on plasma science, 1993-08, Vol.21 (4), p.378-382

1993

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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Hairpin resonator probe measurements in RF plasmas

The hairpin resonator: A plasma density measuring technique revisited

Probe diagnostics of non-Maxwellian plasmas

Measurement of electron energy distribution in low-pressure RF discharges

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Experimental setup and electrical characteristics of an inductively coupled plasma

Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

A simple analysis of an inductive RF discharge

Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge

Experimental Evidence of Collisionless Power Absorption in Inductively Coupled Plasmas

Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge

Electromagnetic field structure in a weakly collisional inductively coupled plasma

The electron-energy distribution function in a shielded argon radiofrequency inductive discharge

Second harmonic and ponderomotive forces acting on electrons in an inhomogeneous radio frequency field of an inductive discharge

Electrical characteristics of parallel-plate RF discharges in argon

Observation of Second Harmonic Currents in Inductively Coupled Plasmas

Effective electron collision frequency and electrical conductivity of radio frequency plasmas

Probe measurements of the space potential in a radio frequency discharge

Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge

An experimental system for symmetric capacitive rf discharge studies

Hot plasma and nonlinear effects in inductive discharges

Plasma power measurement and hysteresis in the E - H transitionof a rf inductively coupled plasma system

A comparison of RF electrode sheath models

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