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Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications

Journal of micromechanics and microengineering, 2010-04, Vol.20 (4), p.045023-045023

2010

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Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

Journal of applied crystallography, 2012-10, Vol.45 (5), p.1038-1045

2012

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Mechanical detection of carbon nanotube resonator vibrations

Physical review letters, 2007-08, Vol.99 (8), p.085501-085501, Article 085501

2007

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Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Nanotechnology, 2014-04, Vol.25 (13), p.135302-9

2014

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Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

IEEE electron device letters, 2008-02, Vol.29 (2), p.146-148

2008

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Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Applied physics letters, 2015-08, Vol.107 (7)

2015

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Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

Nanotechnology, 2008-07, Vol.19 (30), p.305302-305302 (13)

2008

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Au cylindrical nanocup: A geometrically, tunable optical nanoresonator

Applied physics letters, 2015-07, Vol.107 (3)

2015

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On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

Journal of applied crystallography, 2014-04, Vol.47 (2), p.613-618

2014

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Benefits of using arrays of vertical nanowire FETs in integrated circuits to mitigate variability

Semiconductor science and technology, 2021-12, Vol.36 (12), p.125017

2021

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Influence of Quantum Dot Characteristics on the Performance of Hybrid SET-FET Circuits

IEEE transactions on electron devices, 2019-10, Vol.66 (10), p.1-7

2019

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Morphology of poly(propylene azelate) gratings prepared by nanoimprint lithography as revealed by atomic force microscopy and grazing incidence X-ray scattering

Polymer (Guilford), 2015-03, Vol.61, p.61-67

2015

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Exploring the Suitability of Stacking Devices in a Vertical Nanowire to Implement a CMOS Inverter

IEEE transactions on nanotechnology, 2024, Vol.23, p.435-440

2024

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Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

Lab on a chip, 2011-01, Vol.11 (16), p.2670-2672

2011

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Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion

Journal of applied physics, 2004-08, Vol.96 (4), p.2386-2392

2004

Volltextzugriff (PDF)

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Review of scientific instruments, 2012-01, Vol.83 (1), p.015002-015002-7

2012

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Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns

Molecular systems design & engineering, 2019-02, Vol.4 (1), p.175-185

2019

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Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling

Microelectronic engineering, 2014-05, Vol.119, p.44-47

2014

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Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Nanotechnology, 2018-04, Vol.29 (15), p.155303-155303

2018

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CMOS compatible manufacturing of a hybrid SET-FET circuit

Semiconductor science and technology, 2022-12, Vol.37 (12), p.125014

2022

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CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

Semiconductor science and technology, 2023-05, Vol.38 (5)

2023

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Thermal scanning probe lithography for the directed self-assembly of block copolymers

Nanotechnology, 2017-04, Vol.28 (17), p.175301-175301

2017

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CMOS-compatible manufacturability of sub-15 nm Si/SiO 2 /Si nanopillars containing single Si nanodots for single electron transistor applications

Semiconductor science and technology, 2023-05, Vol.38 (5), p.55011

2023

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Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Nanotechnology, 2001-06, Vol.12 (2), p.100-104

2001

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Massive manufacture and characterization of single-walled carbon nanotube field effect transistors

Microelectronic engineering, 2010-05, Vol.87 (5), p.1554-1556

2010

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Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications

Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

Mechanical detection of carbon nanotube resonator vibrations

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

Au cylindrical nanocup: A geometrically, tunable optical nanoresonator

On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

Benefits of using arrays of vertical nanowire FETs in integrated circuits to mitigate variability

Influence of Quantum Dot Characteristics on the Performance of Hybrid SET-FET Circuits

Morphology of poly(propylene azelate) gratings prepared by nanoimprint lithography as revealed by atomic force microscopy and grazing incidence X-ray scattering

Exploring the Suitability of Stacking Devices in a Vertical Nanowire to Implement a CMOS Inverter

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Self-assembly morphology of block copolymers in sub-10 nm topographical guiding patterns

Batch fabrication of insulated conductive scanning probe microscopy probes with reduced capacitive coupling

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

CMOS compatible manufacturing of a hybrid SET-FET circuit

CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications

Thermal scanning probe lithography for the directed self-assembly of block copolymers

CMOS-compatible manufacturability of sub-15 nm Si/SiO 2 /Si nanopillars containing single Si nanodots for single electron transistor applications

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Massive manufacture and characterization of single-walled carbon nanotube field effect transistors

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