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Hybrid metrology for nanometric energy harvesting devices

Measurement science & technology, 2023-09, Vol.34 (9), p.94008

2023

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Thermoelectric Properties of High-Doped Silicon from Room Temperature to 900 K

Journal of electronic materials, 2013-07, Vol.42 (7), p.2381-2387

2013

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Self-diffusion in single crystalline silicon nanowires

Journal of applied physics, 2018-04, Vol.123 (16)

2018

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Self-reading femtogram microbalance for highly sensitive airborne nanoparticle detection

Journal of physics. Conference series, 2019-09, Vol.1319 (1), p.12004

2019

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Thermoelectric and Structural Properties of Zr-/Hf-Based Half-Heusler Compounds Produced at a Large Scale

Journal of electronic materials, 2018-02, Vol.47 (2), p.1546-1554

2018

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Measurements of thermoelectric properties of silicon pillars

Sensors and actuators. A. Physical., 2011-11, Vol.171 (1), p.48-53

2011

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Enhancement of real-time resonance tracking in electrothermally actuated cantilever sensor with optimized phase characteristic

Journal of physics. Conference series, 2019-09, Vol.1319 (1), p.12003

2019

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Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

Journal of micromechanics and microengineering, 2009-10, Vol.19 (10), p.105005-105005 (8)

2009

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Production of vertical nanowire resonators by cryogenic-ICP–DRIE

Microsystem technologies, 2014-04, Vol.20 (4-5), p.759-767

2014

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Design and fabrication of AlN-on-Si chirped surface acoustic wave resonators for label-free cell detection

Journal of physics. Conference series, 2019-09, Vol.1319 (1), p.12011

2019

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Angle-dependent spin-wave resonance spectroscopy of (Ga,Mn)As films

Physical review. B, Condensed matter and materials physics, 2013-06, Vol.87 (22), Article 224422

2013

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Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes

IEEE sensors journal, 2008-12, Vol.8 (12), p.1960-1967

2008

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Adsorption and detection of microparticles using silicon microcantilevers

Journal of physics. Conference series, 2019-09, Vol.1319 (1), p.12010

2019

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Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

Journal of sensors and sensor systems, 2015-01, Vol.4 (1), p.111-123

2015

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Micro force sensor with piezoresistive amorphous carbon strain gauge

Sensors and actuators. A. Physical., 2006-08, Vol.130, p.75-82

2006

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Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Journal of micromechanics and microengineering, 2010-06, Vol.20 (6), p.064007-064007

2010

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Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films

Applied surface science, 2006-05, Vol.252 (15), p.5387-5390

2006

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Tactile probes for dimensional metrology with microcomponents at nanometre resolution

Measurement science & technology, 2008-06, Vol.19 (6), p.064001-064001 (8)

2008

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Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Microsystem technologies : sensors, actuators, systems integration, 2010-05, Vol.16 (5), p.863-870

2010

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Nanowire silicon as a material for thermoelectric energy conversion

Microsystem technologies, 2012-08, Vol.18 (7-8), p.857-862

2012

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Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

Microsystem technologies, 2012-08, Vol.18 (7-8), p.869-878

2012

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Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films

Thin solid films, 2007-07, Vol.515 (20), p.8028-8033

2007

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Electrical performance analysis and characterization of two port piezoelectric resonators

Microsystem technologies : sensors, actuators, systems integration, 2013-08, Vol.19 (8), p.1131-1136

2013

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Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

Microsystem technologies, 2012-08, Vol.18 (7-8), p.905-915

2012

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The piezoresistive effect in diamond-like carbon films

Journal of micromechanics and microengineering, 2007-07, Vol.17 (7), p.S77-S82

2007

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Hybrid metrology for nanometric energy harvesting devices

Thermoelectric Properties of High-Doped Silicon from Room Temperature to 900 K

Self-diffusion in single crystalline silicon nanowires

Self-reading femtogram microbalance for highly sensitive airborne nanoparticle detection

Thermoelectric and Structural Properties of Zr-/Hf-Based Half-Heusler Compounds Produced at a Large Scale

Measurements of thermoelectric properties of silicon pillars

Enhancement of real-time resonance tracking in electrothermally actuated cantilever sensor with optimized phase characteristic

Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

Production of vertical nanowire resonators by cryogenic-ICP–DRIE

Design and fabrication of AlN-on-Si chirped surface acoustic wave resonators for label-free cell detection

Angle-dependent spin-wave resonance spectroscopy of (Ga,Mn)As films

Slender Tactile Sensor for Contour and Roughness Measurements Within Deep and Narrow Holes

Adsorption and detection of microparticles using silicon microcantilevers

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

Micro force sensor with piezoresistive amorphous carbon strain gauge

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Transport and optical properties of amorphous carbon and hydrogenated amorphous carbon films

Tactile probes for dimensional metrology with microcomponents at nanometre resolution

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Nanowire silicon as a material for thermoelectric energy conversion

Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films

Electrical performance analysis and characterization of two port piezoelectric resonators

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

The piezoresistive effect in diamond-like carbon films

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