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Generative Adversarial Networks for Synthetic Defect Generation in Assembly and Test Manufacturing

2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020, p.1-5

2020

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Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing

IEEE transactions on semiconductor manufacturing, 2022-05, Vol.35 (2), p.155-157

2022

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Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units

IEEE transactions on semiconductor manufacturing, 2020-08, Vol.33 (3), p.357-372

2020

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Model Regularization for High-Mix Control

IEEE transactions on semiconductor manufacturing, 2010-05, Vol.23 (2), p.151-158

Patel, Nital S

2010

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Introduction to the Special Section on Advanced Process Control

IEEE transactions on semiconductor manufacturing, 2010-05, Vol.23 (2), p.149-150

2010

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A Decentralized MILP Method for Rescheduling Semiconductor Assembly Systems with Re-Entrance and Time Window Constraints

2023 IEEE 19th International Conference on Automation Science and Engineering (CASE), 2023, p.1-6

2023

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Fast Schedule Recovery Method for Semiconductor Packaging Lines With Machine Failures and Constrained Time Windows

IEEE transactions on automation science and engineering, 2024, p.1-12

2024

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Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units

IEEE transactions on automation science and engineering, 2018-01, Vol.15 (1), p.145-159

2018

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Model Context Selection for Run-to-Run Control

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.506-516

2007

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Adaptive optimization of run-to-run controllers: the EWMA example

IEEE transactions on semiconductor manufacturing, 2000-02, Vol.13 (1), p.97-107

2000

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Supervisory control of LPCVD silicon nitride

IEEE transactions on semiconductor manufacturing, 2005-11, Vol.18 (4), p.584-591

2005

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Robust control of set-valued discrete-time dynamical systems

IEEE transactions on automatic control, 1998-01, Vol.43 (1), p.61-75

1998

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Model Regularization for High-Mix Control : Advanced process control

IEEE transactions on semiconductor manufacturing, 2010, Vol.23 (2), p.151-158

PATEL, Nital S

2010

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Device dependent control of chemical-mechanical polishing of dielectric films

IEEE transactions on semiconductor manufacturing, 2000-08, Vol.13 (3), p.331-343

2000

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In situ estimation of blanket polish rates and wafer-to-wafer variation

IEEE transactions on semiconductor manufacturing, 2002-11, Vol.15 (4), p.513-522

2002

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Die level defects detection in semiconductor units

ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference, 2013, p.130-133

2013

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Special Section on Advanced Process Control

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.343-344

2007

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Automated optical inspection for die prep

2012 SEMI Advanced Semiconductor Manufacturing Conference, 2012, p.72-76

2012

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Lot allocation and process control in semiconductor manufacturing - a dynamic game approach

2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601), 2004, Vol.4, p.4243-4248 Vol.4

Patel, N.S.

2004

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Designing response surface model-based run-by-run controllers: a worst case approach

IEEE transactions on components, packaging and manufacturing technology. Part C, Manufacturing, 1996-04, Vol.19 (2), p.98-104

1996

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Choosing Optimal Control Structure for Run-to-Run Control - A Thin Film Example

The 17th Annual SEMI/IEEE ASMC 2006 Conference, 2006, p.272-277

2006

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A framework for robust run by run control with lot delayed measurements

IEEE transactions on semiconductor manufacturing, 1997-02, Vol.10 (1), p.75-83

1997

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Analysis of the Effects of Truncation on the EWMA Observer

2007 IEEE International Conference on Automation Science and Engineering, 2007, p.472-477

2007

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Robust control of set-valued discrete-time dynamical systems

Patel, Nital S

1995

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Derivation of Fuzzy Rules for Model-Free Tuning of PID Controllers

Journal of intelligent & fuzzy systems, 1995, Vol.3 (1), p.59-69

1995

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Generative Adversarial Networks for Synthetic Defect Generation in Assembly and Test Manufacturing

Guest Editorial Process-Level Machine Learning Applications in Semiconductor Manufacturing

Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units

Model Regularization for High-Mix Control

Introduction to the Special Section on Advanced Process Control

A Decentralized MILP Method for Rescheduling Semiconductor Assembly Systems with Re-Entrance and Time Window Constraints

Fast Schedule Recovery Method for Semiconductor Packaging Lines With Machine Failures and Constrained Time Windows

Multifeature, Sparse-Based Approach for Defects Detection and Classification in Semiconductor Units

Model Context Selection for Run-to-Run Control

Adaptive optimization of run-to-run controllers: the EWMA example

Supervisory control of LPCVD silicon nitride

Robust control of set-valued discrete-time dynamical systems

Model Regularization for High-Mix Control : Advanced process control

Device dependent control of chemical-mechanical polishing of dielectric films

In situ estimation of blanket polish rates and wafer-to-wafer variation

Die level defects detection in semiconductor units

Special Section on Advanced Process Control

Automated optical inspection for die prep

Lot allocation and process control in semiconductor manufacturing - a dynamic game approach

Designing response surface model-based run-by-run controllers: a worst case approach

Choosing Optimal Control Structure for Run-to-Run Control - A Thin Film Example

A framework for robust run by run control with lot delayed measurements

Analysis of the Effects of Truncation on the EWMA Observer

Robust control of set-valued discrete-time dynamical systems

Derivation of Fuzzy Rules for Model-Free Tuning of PID Controllers

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