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Real-Time End-Point Detection Using Modified Principal Component Analysis for Small Open Area SiO2 Plasma Etching

Industrial & engineering chemistry research, 2008-06, Vol.47 (11), p.3907-3911

2008

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Bowing Profile Induced by Ion Implant Damage during Silicon Gate Etching

Japanese Journal of Applied Physics, 2002-02, Vol.41 (Part 1, No. 2A), p.930-935

2002

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Analysis of Novel Helmholtz-inductively Coupled Plasma Source and Its Application for Nano-Scale MOSFETs

Transactions on electrical and electronic materials, 2009-04, Vol.10 (2), p.35-39

2009

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Suppression of Nickel-germanide (NiGe) Agglomeration and Ni Penetration by Hydrogen (H) Ion Shower Doping in NiGe on a Thin Epitaxial Ge-on-Si Substrate

Journal of the Korean Physical Society, 2009, 55(1), , pp.221-226

2009

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Comparative transcriptomics elucidates adaptive phenol tolerance and utilization in lipid-accumulating Rhodococcus opacus PD630

Nucleic acids research, 2016-03, Vol.44 (5), p.2240

2016

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Humidity sensitive field effect transistors

Sensors and actuators. B, Chemical, 1996-09, Vol.35 (1), p.80-84

1996

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Modified PCA algorithm for the end point monitoring of the small open area plasma etching process using the whole optical emission spectra

2007 International Conference on Control, Automation and Systems, 2007, p.869-873

2007

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Real-Time End-Point Detection Using Modified Principal Component Analysis for Small Open Area SiO 2 Plasma Etching

Industrial & engineering chemistry research, 2008-06, Vol.47 (11), p.3907-3911

2008

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Multi-way principal component analysis for the endpoint detection of the metal etch process using the whole optical emission spectra

Korean Journal of Chemical Engineering, 2008, 25(1), 112, pp.13-18

2008

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Automatic End Point Detection of Plasma Etching Process Using the Multi-Way PCA of the Whole Optical Emission Spectrum

2006 SICE-ICASE International Joint Conference, 2006, p.1709-1714

2006

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Analysis of Novel Helmholtz-inductively Coupled Plasma Source and Its Application for Nano-Scale MOSFETs

Transactions on Electrical and Electronic Materials, 2009, 10(2), , pp.35-39

2009

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Suppression of Nickel-germanide (NiGe) Agglomeration and NiPenetration by Hydrogen (H) Ion Shower Doping in NiGe on a ThinEpitaxial Ge-on-Si Substrate

Journal of the Korean Physical Society, 2009-07, Vol.55 (1), p.221-226

2009

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Characterization and Improvement of Reverse Leakage Current of Shallow Silicided Junction for Sub-100 nm CMOS Technology Utilizing N2 PAI

Journal of the Korean Physical Society, 2006, 49(III), , pp.795-799

2006

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Niche-specific MHC II and PD-L1 regulate CD4+CD8αα+ intraepithelial lymphocyte differentiation

The Journal of experimental medicine, 2021-04, Vol.218 (4)

2021

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Principal Component Analysis Based Support Vector Machine for the End Point Detection of the Metal Etch Process

IFAC Proceedings Volumes, 2008, Vol.41 (2), p.4560-4565

2008

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DEVELOPMENT OF ENDPOINT DETECTION ALGORITHM IN THE MULTI-STEP PLASMA ETCHING PROCESS

IFAC Proceedings Volumes, 2007, Vol.40 (5), p.291-296

2007

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Understanding the Host Innate Immune Responses against SARS-CoV-2 Infection and COVID-19 Pathogenesis

Immune Network, 2021, 21(1), , pp.1-16

2021

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Understanding the Host Innate Immune Responses against SARS-CoV-2 Infection and COVID-19 Pathogenesis

Immune network, 2021, Vol.21 (1), p.1.1-1.16

2021

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IL-7-primed bystander CD8 tumor-infiltrating lymphocytes optimize the antitumor efficacy of T cell engager immunotherapy

Cell reports. Medicine, 2024-05, Vol.5 (5), p.101567-101567, Article 101567

2024

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Fc-fused IL-7 provides broad antiviral effects against respiratory virus infections through IL-17A-producing pulmonary innate-like T cells

Cell reports. Medicine, 2024-01, Vol.5 (1), p.101362-101362, Article 101362

2024

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The prognostic value of 2D strain in assessment of the right ventricle in patients with dilated cardiomyopathy

European heart journal cardiovascular imaging, 2019-09, Vol.20 (9), p.1043-1050

2019

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Early Detection of Perforation of the Right Ventricle by a Permanent Pacemaker Lead

Korean circulation journal, 2007, Vol.37 (9), p.453

2007

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AS-9: Thrombus Aspiration in Primary Percutaneous Coronary Intervention Improves Early Myocardial Reperfusion in Patients with ST-Segment Elevation Myocardial Infarction without Upstream Use of Glycoprotein IIb/IIIa Inhibitors

The American journal of cardiology, 2010, Vol.105 (9), p.4A-4A

2010

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AS-179: Stent Underexpansion and Recoil in First- and Second-Generation Drug-Eluting Stents: Quantitative Coronary Angiography Analysis

The American journal of cardiology, 2010, Vol.105 (9), p.75A-75A

2010

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Primary Cardiac Lymphoma Presenting With Atrioventricular Block

Korean Circulation Journal, 2010, 40(2), , pp.94-98

2010

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Real-Time End-Point Detection Using Modified Principal Component Analysis for Small Open Area SiO2 Plasma Etching

Bowing Profile Induced by Ion Implant Damage during Silicon Gate Etching

Analysis of Novel Helmholtz-inductively Coupled Plasma Source and Its Application for Nano-Scale MOSFETs

Suppression of Nickel-germanide (NiGe) Agglomeration and Ni Penetration by Hydrogen (H) Ion Shower Doping in NiGe on a Thin Epitaxial Ge-on-Si Substrate

Comparative transcriptomics elucidates adaptive phenol tolerance and utilization in lipid-accumulating Rhodococcus opacus PD630

Humidity sensitive field effect transistors

Modified PCA algorithm for the end point monitoring of the small open area plasma etching process using the whole optical emission spectra

Real-Time End-Point Detection Using Modified Principal Component Analysis for Small Open Area SiO 2 Plasma Etching

Multi-way principal component analysis for the endpoint detection of the metal etch process using the whole optical emission spectra

Automatic End Point Detection of Plasma Etching Process Using the Multi-Way PCA of the Whole Optical Emission Spectrum

Analysis of Novel Helmholtz-inductively Coupled Plasma Source and Its Application for Nano-Scale MOSFETs

Suppression of Nickel-germanide (NiGe) Agglomeration and NiPenetration by Hydrogen (H) Ion Shower Doping in NiGe on a ThinEpitaxial Ge-on-Si Substrate

Characterization and Improvement of Reverse Leakage Current of Shallow Silicided Junction for Sub-100 nm CMOS Technology Utilizing N2 PAI

Niche-specific MHC II and PD-L1 regulate CD4+CD8αα+ intraepithelial lymphocyte differentiation

Principal Component Analysis Based Support Vector Machine for the End Point Detection of the Metal Etch Process

DEVELOPMENT OF ENDPOINT DETECTION ALGORITHM IN THE MULTI-STEP PLASMA ETCHING PROCESS

Understanding the Host Innate Immune Responses against SARS-CoV-2 Infection and COVID-19 Pathogenesis

Understanding the Host Innate Immune Responses against SARS-CoV-2 Infection and COVID-19 Pathogenesis

IL-7-primed bystander CD8 tumor-infiltrating lymphocytes optimize the antitumor efficacy of T cell engager immunotherapy

Fc-fused IL-7 provides broad antiviral effects against respiratory virus infections through IL-17A-producing pulmonary innate-like T cells

The prognostic value of 2D strain in assessment of the right ventricle in patients with dilated cardiomyopathy

Early Detection of Perforation of the Right Ventricle by a Permanent Pacemaker Lead

AS-9: Thrombus Aspiration in Primary Percutaneous Coronary Intervention Improves Early Myocardial Reperfusion in Patients with ST-Segment Elevation Myocardial Infarction without Upstream Use of Glycoprotein IIb/IIIa Inhibitors

AS-179: Stent Underexpansion and Recoil in First- and Second-Generation Drug-Eluting Stents: Quantitative Coronary Angiography Analysis

Primary Cardiac Lymphoma Presenting With Atrioventricular Block

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