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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-03, Vol.24 (2), p.657-663
2006
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-03, Vol.24 (2), p.651-656
2006
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Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2007-03, Vol.25 (2), p.459-463
2007
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Semiconductor international, 1996-07, Vol.19 (8), p.5p-5p
1996
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- Journal Of Vacuum Science & Technology. B, Microelectronics And Nanometer Structures Processing, Measurement And Phenomena
- Journal Of Vacuum Science & Technology B: Microelectronics And Nanometer Structures Processing, Measurement, And Phenomena
- Journal Of Vacuum Science And Technology. B, Nanotechnology & Microelectronics
- Semiconductor International