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Analytic representations of the dielectric functions of materials for device and structural modeling

Thin solid films, 1998-02, Vol.313 (1-2), p.132-136

1998

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Broadband spectral operation of a rotating-compensator ellipsometer

Thin solid films, 1998-02, Vol.313 (1-2), p.58-61

1998

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Thermal-wave depth profiling: Theory

Journal of applied physics, 1982-06, Vol.53 (6), p.4240-4246

1982

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Combined beam profile reflectometry, beam profile ellipsometry and ultraviolet-visible spectrophotometry for the characterization of ultrathin oxide-nitride-oxide films on silicon

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1999-03, Vol.17 (2), p.380-384

1999

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Nonlinear fundamental photothermal response : Experimental results for tungsten

Solid state communications, 2000-03, Vol.114 (3), p.133-136

2000

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Characterization of titanium nitride (TiN) films on various substrates using spectrophotometry, beam profile reflectometry, beam profile ellipsometry and spectroscopic beam profile ellipsometry

Thin solid films, 1998-02, Vol.313 (1-2), p.308-313

1998

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Quantitative photothermal characterization of ion-implanted layers in Si

Journal of applied physics, 2002-03, Vol.91 (5), p.2874-2882

2002

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Analytic representations of the dielectric functions of crystalline and amorphous Si and crystalline Ge for very large scale integrated device and structural modeling

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 1998-05, Vol.16 (3), p.1654-1657

1998

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Dynamics of the plasma and thermal waves in surface-modified semiconductors (invited)

Review of Scientific Instruments, 2003-01, Vol.74 (1), p.545-549

2003

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Simultaneous measurement of six layers in a silicon on insulator film stack using spectrophotometry and beam profile reflectometry

Journal of applied physics, 1997-04, Vol.81 (8), p.3570-3578

1997

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Simultaneous measurement of six layers in a silicon on insulator film stack using visible-near-IR spectrophotometry and single-wavelength beam profile reflectometry

Thin solid films, 1998-02, Vol.313 (1-2), p.270-275

1998

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Towards nondestructive carrier depth profiling

Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2006-05, Vol.24 (3), p.1139-1146

2006

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