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Direct current microhollow cathode discharges on silicon devices operating in argon and helium

Plasma sources science & technology, 2018-02, Vol.27 (2), p.25005

2018

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Study of dc micro-discharge arrays made in silicon using CMOS compatible technology

Journal of physics. D, Applied physics, 2012-07, Vol.45 (28), p.285202-1-10

2012

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Mask undercut in deep silicon etch

Applied physics letters, 2011-04, Vol.98 (16), p.161502-161502-3

2011

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Breakdown study of dc silicon micro-discharge devices

Journal of physics. D, Applied physics, 2012-02, Vol.45 (6), p.65201-1-11

2012

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Chemical vapor deposition of aluminum from methylpyrrolidine alane complex

Thin solid films, 2006-07, Vol.510 (1), p.48-54

2006

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Integrated micro-plasmas in silicon operating in helium

The European physical journal. D, Atomic, molecular, and optical physics, 2010-12, Vol.60 (3), p.601-608

2010

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Optical Observation of Nitrogen Propagation in Argon Plasma

IEEE transactions on plasma science, 2011-11, Vol.39 (11), p.2544-2545

2011

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Durable diamond-like carbon templates for UV nanoimprint lithography

Nanotechnology, 2008-03, Vol.19 (10), p.105302-105302 (7)

2008

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Experimental study and simulation of a micro-discharge with limited cathode area

The European physical journal. D, Atomic, molecular, and optical physics, 2010-12, Vol.60 (3), p.565-574

2010

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Forming carbon nanotube composites by directly coating forests with inorganic materials using low pressure chemical vapor deposition

Thin solid films, 2008-11, Vol.517 (2), p.525-530

2008

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Surface kinetics with low ion energy bombardment in fluorocarbon plasmas

Plasma sources science & technology, 2007-11, Vol.16 (4), p.813-821

2007

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RF impedance measurements of DC atmospheric micro-discharges

The European physical journal. D, Atomic, molecular, and optical physics, 2010-12, Vol.60 (3), p.449-454

2010

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Transient effects caused by pulsed gas and liquid injections into low pressure plasmas

Plasma sources science & technology, 2010-06, Vol.19 (3), p.034013-034013

2010

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Progress report: Direct injection of liquids into low-pressure plasmas

Journal of physics. Conference series, 2009-04, Vol.162 (1), p.012014

2009

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Effects of pre-annealing of Fe catalysts on growth of spin-capable carbon nanotubes

Diamond and related materials, 2013-09, Vol.38, p.87-92

2013

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Oxidation threshold in silicon etching at cryogenic temperatures

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2006-07, Vol.24 (4), p.1073-1082

2006

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Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2009-07, Vol.27 (4), p.631-642

2009

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Carbon nanotubes based methanol sensor for fuel cells application

Journal of nanoscience and nanotechnology, 2006-11, Vol.6 (11), p.3608

2006

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Stabilizing inductively coupled plasma source impedance and plasma uniformity using a Faraday shield

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2001-05, Vol.19 (3), p.785-792

2001

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The effects on plasma properties of a current node on inductively coupled plasma sources

Plasma sources science & technology, 2003-08, Vol.12 (3), p.432-442

2003

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Plasma-surface interactions

Journal of physics. Conference series, 2008-10, Vol.133 (1), p.012010

2008

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Role of chamber dimension in fluorocarbon based deposition and etching of SiO2 and its effects on gas and surface-phase chemistry

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2008-05, Vol.26 (3), p.545-554

2008

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Ignition and extinction phenomena in helium micro hollow cathode discharges

Journal of applied physics, 2013-12, Vol.114

2013

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Effect of metastable atom reactions on the electron energy probability functions in afterglows

Plasma sources science & technology, 1998-11, Vol.7 (4), p.512-523

1998

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Observation of the ion-ion transition in an SF6 discharge using a fast floating double probe

Plasma sources science & technology, 1999-02, Vol.8 (1), p.70-78

1999

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Direct current microhollow cathode discharges on silicon devices operating in argon and helium

Study of dc micro-discharge arrays made in silicon using CMOS compatible technology

Mask undercut in deep silicon etch

Breakdown study of dc silicon micro-discharge devices

Chemical vapor deposition of aluminum from methylpyrrolidine alane complex

Integrated micro-plasmas in silicon operating in helium

Optical Observation of Nitrogen Propagation in Argon Plasma

Durable diamond-like carbon templates for UV nanoimprint lithography

Experimental study and simulation of a micro-discharge with limited cathode area

Forming carbon nanotube composites by directly coating forests with inorganic materials using low pressure chemical vapor deposition

Surface kinetics with low ion energy bombardment in fluorocarbon plasmas

RF impedance measurements of DC atmospheric micro-discharges

Transient effects caused by pulsed gas and liquid injections into low pressure plasmas

Progress report: Direct injection of liquids into low-pressure plasmas

Effects of pre-annealing of Fe catalysts on growth of spin-capable carbon nanotubes

Oxidation threshold in silicon etching at cryogenic temperatures

Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model

Carbon nanotubes based methanol sensor for fuel cells application

Stabilizing inductively coupled plasma source impedance and plasma uniformity using a Faraday shield

The effects on plasma properties of a current node on inductively coupled plasma sources

Plasma-surface interactions

Role of chamber dimension in fluorocarbon based deposition and etching of SiO2 and its effects on gas and surface-phase chemistry

Ignition and extinction phenomena in helium micro hollow cathode discharges

Effect of metastable atom reactions on the electron energy probability functions in afterglows

Observation of the ion-ion transition in an SF6 discharge using a fast floating double probe

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