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Formation mechanism of sidewall striation in high-aspect-ratio hole etching

Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SEEB02

2019

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Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SE0802

2019

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Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?

Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SE0803

2019

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Selective etch of poly(methyl methacrylate) in block copolymer based on control of ion energy and design of gas chemistry for directed self assembly lithography

Japanese Journal of Applied Physics, 2014-03, Vol.53 (3S2), p.3-1-03DD03-4

2014

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Electrical Via Chain Yield for DSA Contact Hole Shrink Process

Journal of Photopolymer Science and Technology, 2013/06/25, Vol.26(1), pp.21-26

2013

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Sub-30nm via interconnects fabricated using directed self-assembly

Microelectronic engineering, 2013-10, Vol.110, p.152-155

2013

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CASE OF INFLAMMATORY FIBROID POLYP OF THE ESOPHAGOGASTRIC JUNCTION

Digestive endoscopy, 2009-04, Vol.21 (2), p.97-100

2009

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The Photopolymer Science and Technology Award

Journal of Photopolymer Science and Technology, 2014/07/08, Vol.27(1), pp.7-10

2014

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REFRACTORY DIVERTICULAR COLITIS WITH PROGRESSIVE ULCERATIVE COLITIS‐LIKE CHANGES EXTENDING TO THE RECTUM

Digestive endoscopy, 2009-07, Vol.21 (3), p.188-191

2009

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EUVL Challenges towards 1x nm Generation

Journal of Photopolymer Science and Technology, 2011/06/21, Vol.24(1), pp.19-23

2011

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Highly selective removal of poly(methyl methacrylate) from polystyrene- block -poly(methyl methacrylate) by CO/H2 plasma etching

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2015-11, Vol.33 (6)

2015

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REFRACTORY GASTRIC ANTRAL ULCER OF UNKNOWN ETIOLOGY

Digestive endoscopy, 2008-10, Vol.20 (4), p.203-206

2008

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Two Cases of Refractory Post-Bulbar Duodenal Ulcer

Internal Medicine, 2007, Vol.46(17), pp.1413-1418

2007

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Layer-by-layer etching of LaAlSiOx

Plasma sources science & technology, 2017-05, Vol.26 (6)

2017

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Future of plasma etching for microelectronics: Challenges and opportunities

Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2024-07, Vol.42 (4)

2024

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Highly selective etching of LaAlSiOx to Si using C4F8/Ar/H2 plasma

Japanese Journal of Applied Physics, 2015-06, Vol.54 (6S2)

2015

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Layer-by-layer etching of LaAlSiO x

Plasma sources science & technology, 2017-05, Vol.26 (6), p.65015

2017

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MULTIPLE INFLAMMATORY MYOGLANDULAR POLYPS OF THE COLON

Digestive endoscopy, 2007-10, Vol.19 (4), p.192-194

2007

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Highly selective etching of LaAlSiO x to Si using C 4 F 8 /Ar/H 2 plasma

Japanese Journal of Applied Physics, 2015-06, Vol.54 (6S2), p.6

2015

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Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development

Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SE0804

2019

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Sub-30 nm via interconnects fabricated using directed self-assembly

Microelectronic engineering, 2013-10, Vol.110, p.152-155

2013

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Adenoma of the duodenal ampulla impacted in the common bile duct caused acute cholangitis

Progress of digestive endoscopy (2000), 2012-12, Vol.81 (2), p.156-157

2012

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A case of indeterminate mucin-producing cystic neoplasm of the pancreas presenting with acute rupture

Suizo, 2015/10/25, Vol.30(5), pp.663-670

2015

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A case of indeterminate mucin-producing cystic neoplasm of the pancreas presenting with acute rupture

Suizō, 2015, Vol.30 (5), p.663-670

2015

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Solid pseudopapillary neoplasm in the pancreatic head in a young male

Suizō, 2013, Vol.28 (1), p.67-73

2013

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Formation mechanism of sidewall striation in high-aspect-ratio hole etching

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Progress and perspectives in dry processes for emerging multidisciplinary applications: how can we improve our use of dry processes?

Selective etch of poly(methyl methacrylate) in block copolymer based on control of ion energy and design of gas chemistry for directed self assembly lithography

Electrical Via Chain Yield for DSA Contact Hole Shrink Process

Sub-30nm via interconnects fabricated using directed self-assembly

CASE OF INFLAMMATORY FIBROID POLYP OF THE ESOPHAGOGASTRIC JUNCTION

The Photopolymer Science and Technology Award

REFRACTORY DIVERTICULAR COLITIS WITH PROGRESSIVE ULCERATIVE COLITIS‐LIKE CHANGES EXTENDING TO THE RECTUM

EUVL Challenges towards 1x nm Generation

Highly selective removal of poly(methyl methacrylate) from polystyrene- block -poly(methyl methacrylate) by CO/H2 plasma etching

REFRACTORY GASTRIC ANTRAL ULCER OF UNKNOWN ETIOLOGY

Two Cases of Refractory Post-Bulbar Duodenal Ulcer

Layer-by-layer etching of LaAlSiOx

Future of plasma etching for microelectronics: Challenges and opportunities

Highly selective etching of LaAlSiOx to Si using C4F8/Ar/H2 plasma

Layer-by-layer etching of LaAlSiO x

MULTIPLE INFLAMMATORY MYOGLANDULAR POLYPS OF THE COLON

Highly selective etching of LaAlSiO x to Si using C 4 F 8 /Ar/H 2 plasma

Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development

Sub-30 nm via interconnects fabricated using directed self-assembly

Adenoma of the duodenal ampulla impacted in the common bile duct caused acute cholangitis

A case of indeterminate mucin-producing cystic neoplasm of the pancreas presenting with acute rupture

A case of indeterminate mucin-producing cystic neoplasm of the pancreas presenting with acute rupture

Solid pseudopapillary neoplasm in the pancreatic head in a young male

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