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2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM), 2015, p.44-47

2015

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Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors

2015 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK), 2015, p.86-87

2015

Link zum Volltext
IEEE_Xplore

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Buckling behavior of piezoelectric diaphragms for highly sensitive structures of ultrasonic microsensors controlled through intrinsic stress of PZT films

Vibration mode analysis on piezoelectric diaphragms for ultrasonic microsensors

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