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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2019-01, Vol.37 (1)
2019
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2018-11, Vol.36 (6)
2018
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Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists
2017
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2017-11, Vol.35 (6)
2017
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ACS sustainable chemistry & engineering, 2023-10, Vol.11 (39), p.14538-14548
2023
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