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Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches

Journal of micromechanics and microengineering, 2008-10, Vol.18 (10), p.105010

2008

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Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

Journal of microelectromechanical systems, 2007-08, Vol.16 (4), p.989-996

2007

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Seek and Track-Follow for Scanning Probe Microscopy-Based Data Storage

IEEE transactions on magnetics, 2009-10, Vol.45 (10), p.3695-3698

2009

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Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Journal of micromechanics and microengineering, 2005-11, Vol.15 (11), p.2098-2104

2005

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A new method for analyzing the refill process and fabrication of a piezoelectric inkjet printing head for LCD color filter manufacturing

Journal of micromechanics and microengineering, 2008-12, Vol.18 (12), p.125011-125011 (13)

2008

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Neutron Diffraction and FT-Raman Study of Ion-Exchangeable Layered Titanates and Niobates

Chemistry of materials, 2000-06, Vol.12 (6), p.1771-1778

2000

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Charge Amplifier With an Enhanced Frequency Response for SPM-Based Data Storage

IEEE transactions on circuits and systems. II, Express briefs, 2010-09, Vol.57 (9), p.691-695

2010

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Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage

Sensors and actuators. A. Physical., 2007-03, Vol.135 (1), p.67-72

2007

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PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

Sensors and actuators. A, Physical, 2001-03, Vol.89 (1), p.166-173

2001

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Ultra-compact, zero-power magnetic latching piezoelectric inchworm motor with integrated position sensor

Sensors and actuators. A. Physical., 2010-03, Vol.158 (2), p.306-312

2010

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A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

Journal of micromechanics and microengineering, 2006-11, Vol.16 (11), p.2281-2286

2006

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A high-sag microlens array film with a full fill factor and its application to organic light emitting diodes

Journal of micromechanics and microengineering, 2008-06, Vol.18 (6), p.065003-065003 (6)

2008

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Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

Journal of micromechanics and microengineering, 2008-12, Vol.18 (12), p.125022-125022 (7)

2008

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A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR

Integrated ferroelectrics, 2009-01, Vol.105 (1), p.27-36

2009

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A High-Speed Single Crystal Silicon AFM Probe Integrated with PZT Actuator for High-Speed Imaging Applications

Journal of Electrical Engineering & Technology, 2011, 6(1), , pp.119-122

2011

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Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

Applied physics letters, 2003-12, Vol.83 (23), p.4839-4841

2003

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PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Sensors and actuators. A, Physical, 2003-01, Vol.103 (1), p.122-129

2003

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Electrostatic force microscopy study on the domain switching properties of the Pb(Zr0.2Ti0.8)O3 thin films with different crystallographic orientations for the probe-based data storage

Ultramicroscopy, 2008-09, Vol.108 (10), p.1081-1085

2008

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Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

Sensors and actuators. A. Physical., 2007-03, Vol.134 (2), p.329-333

2007

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A tunable planar inverted-F antenna with an RF MEMS switch for the correction of impedance mismatch due to human hand effects

Journal of micromechanics and microengineering, 2009-01, Vol.19 (1), p.015026-015026 (7)

2009

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Formation of hillocks in Pt/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering

Thin solid films, 2000-08, Vol.371 (1), p.264-271

2000

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CALIBRATION OF NON LINEAR PROPERTIES OF Pb(Zr, Ti)O3 CANTILEVER USING INTEGRATED PIEZORESISTIVE SENSOR FOR HIGH SPEED ATOMIC FORCE MICROSCOPY

Japanese Journal of Applied Physics, Part 1, 2002-11, Vol.41 (11B), p.7153-7157

2002

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Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches

Japanese Journal of Applied Physics, 2008-08, Vol.47 (8R), p.6558

2008

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Thermal analysis of micro cantilevers integrated with heaters for low power nano-data-storage application

Sensors and actuators. A. Physical., 2007-09, Vol.139 (1), p.12-16

2007

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Investigation of PZT Damage during Wafer-Level Bonding of Thermo-Piezoelectric Cantilevers with CMOS Wafers for Probe-Based Data Storage

Journal of the Korean Physical Society, 2007-10, Vol.51 (4), p.1374

2007

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Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switches

Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

Seek and Track-Follow for Scanning Probe Microscopy-Based Data Storage

Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

A new method for analyzing the refill process and fabrication of a piezoelectric inkjet printing head for LCD color filter manufacturing

Neutron Diffraction and FT-Raman Study of Ion-Exchangeable Layered Titanates and Niobates

Charge Amplifier With an Enhanced Frequency Response for SPM-Based Data Storage

Thermo-piezoelectric Si3N4 cantilever array on CMOS circuit for high density probe-based data storage

PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage

Ultra-compact, zero-power magnetic latching piezoelectric inchworm motor with integrated position sensor

A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator

A high-sag microlens array film with a full fill factor and its application to organic light emitting diodes

Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR

A High-Speed Single Crystal Silicon AFM Probe Integrated with PZT Actuator for High-Speed Imaging Applications

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application

PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM

Electrostatic force microscopy study on the domain switching properties of the Pb(Zr0.2Ti0.8)O3 thin films with different crystallographic orientations for the probe-based data storage

Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage

A tunable planar inverted-F antenna with an RF MEMS switch for the correction of impedance mismatch due to human hand effects

Formation of hillocks in Pt/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering

CALIBRATION OF NON LINEAR PROPERTIES OF Pb(Zr, Ti)O3 CANTILEVER USING INTEGRATED PIEZORESISTIVE SENSOR FOR HIGH SPEED ATOMIC FORCE MICROSCOPY

Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches

Thermal analysis of micro cantilevers integrated with heaters for low power nano-data-storage application

Investigation of PZT Damage during Wafer-Level Bonding of Thermo-Piezoelectric Cantilevers with CMOS Wafers for Probe-Based Data Storage

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