UB Paderborn / Katalog / Suche / in CDI

Modern Scanning Electron Microscopy. 2. Test Objects for Scanning Electron Microscopy

Surface investigation, x-ray, synchrotron and neutron techniques, 2023-12, Vol.17 (6), p.1422-1438

Novikov, Yu. A.

2023

Volltextzugriff (PDF)

Modern Scanning Electron Microscopy. 3. Electron Probe

Surface investigation, x-ray, synchrotron and neutron techniques, 2024-02, Vol.18 (1), p.185-209

Novikov, Yu. A.

2024

Volltextzugriff (PDF)

Modern Scanning Electron Microscopy. 1. Secondary Electron Emission

Surface investigation, x-ray, synchrotron and neutron techniques, 2023-06, Vol.17 (3), p.598-611

Novikov, Yu. A.

2023

Volltextzugriff (PDF)

Calibration of a Scanning Electron Microscope: 2. Methods of Signal Processing

Surface investigation, x-ray, synchrotron and neutron techniques, 2021-09, Vol.15 (5), p.987-998

Novikov, Yu. A.

2021

Volltextzugriff (PDF)

Test Objects with a Rectangular Profile for SEM: 3. Coordinate Measurements on a SEM

Surface investigation, x-ray, synchrotron and neutron techniques, 2020-09, Vol.14 (5), p.965-977

Novikov, Yu. A.

2020

Volltextzugriff (PDF)

Virtual Spectrometer of Positron Annihilation Lifetimes Based on a Simulator

Russian journal of physical chemistry. B, 2023-06, Vol.17 (3), p.624-630

2023

Volltextzugriff (PDF)

SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits

Russian microelectronics, 2023-04, Vol.52 (2), p.35-42

2023

Volltextzugriff (PDF)

Test Object for SEM Calibration: 2. Correlation Analysis of SEM Signals

Surface investigation, x-ray, synchrotron and neutron techniques, 2018-11, Vol.12 (6), p.1224-1232

Novikov, Yu. A.

2018

Volltextzugriff (PDF)

Test Objects with a Rectangular Profile for SEM: 1. Fabrication Technology

Surface investigation, x-ray, synchrotron and neutron techniques, 2019-11, Vol.13 (6), p.1284-1295

Novikov, Yu. A.

2019

Volltextzugriff (PDF)

Test Objects with a Rectangular Profile for SEM: 2. Certification of the Groove Width

Surface investigation, x-ray, synchrotron and neutron techniques, 2020, Vol.14 (1), p.105-116

Novikov, Yu. A.

2020

Volltextzugriff (PDF)

Effect of the Focusing of a SEM Probe on the Formation of Relief Structure Images

Surface investigation, x-ray, synchrotron and neutron techniques, 2020-05, Vol.14 (3), p.609-616

Novikov, Yu. A.

2020

Volltextzugriff (PDF)

Test Object for SEM Calibration. 1. Methods for Quality Control of Manufacturing

Surface investigation, x-ray, synchrotron and neutron techniques, 2017-11, Vol.11 (6), p.1260-1264

Novikov, Yu. A.

2017

Volltextzugriff (PDF)

Formation of SEM Images in the Slow Secondary Electron Mode. 1. Structures with Large Side Wall Inclinations

Surface investigation, x-ray, synchrotron and neutron techniques, 2019-07, Vol.13 (4), p.727-733

Novikov, Yu. A.

2019

Volltextzugriff (PDF)

Formation of SEM Images in the Secondary Electron Mode. 2. Structures with a Trapezoidal Profile and Small Side-Wall Inclinations

Surface investigation, x-ray, synchrotron and neutron techniques, 2019-09, Vol.13 (5), p.972-978

Novikov, Yu. A.

2019

Volltextzugriff (PDF)

Calibration of a scanning electron microscope from two coordinates

Surface investigation, x-ray, synchrotron and neutron techniques, 2017-07, Vol.11 (4), p.890-896

Novikov, Yu. A.

2017

Volltextzugriff (PDF)

Monte Carlo method in scanning electron microscopy. 1. Modeling and experiment

Surface investigation, x-ray, synchrotron and neutron techniques, 2017-07, Vol.11 (4), p.853-864

Novikov, Yu. A.

2017

Volltextzugriff (PDF)

Monte Carlo Method in Scanning Electron Microscopy. 2. Problems and Solutions

Surface investigation, x-ray, synchrotron and neutron techniques, 2018, Vol.12 (1), p.179-184

Novikov, Yu. A.

2018

Volltextzugriff (PDF)

Monte Carlo Method in Scanning Electron Microscopy. 3. Modern Condition of the Problem

Surface investigation, x-ray, synchrotron and neutron techniques, 2018-05, Vol.12 (3), p.460-465

Novikov, Yu. A.

2018

Volltextzugriff (PDF)

Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model

Surface investigation, x-ray, synchrotron and neutron techniques, 2016-09, Vol.10 (5), p.892-905

Novikov, Yu. A.

2016

Volltextzugriff (PDF)

Measuring the sizes of microcircuit elements of widths less than 100 nm by the method of SEM probe defocusing

Russian microelectronics, 2017, Vol.46 (1), p.55-65

Novikov, Yu. A.

2017

Volltextzugriff (PDF)

Test Objects with a Rectangular Profile for SEM. 5. Mechanisms of SEM Signal Formation

Surface investigation, x-ray, synchrotron and neutron techniques, 2022-10, Vol.16 (5), p.806-819

Novikov, Yu. A.

2022

Volltextzugriff (PDF)

Test Objects with a Rectangular Profile for SEM. 4. Amplitude Measurements on a SEM

Surface investigation, x-ray, synchrotron and neutron techniques, 2022-10, Vol.16 (5), p.797-805

Novikov, Yu. A.

2022

Volltextzugriff (PDF)

Study of Microporosity of Polymer Glasses Using Techniques of Positron Annihilation and Low-Temperature Sorption of Carbon Dioxide

High energy chemistry, 2019-07, Vol.53 (4), p.276-281

2019

Volltextzugriff (PDF)

Calibration of a Scanning Electron Microscope: 1. Selection of the SEM Parameters

Surface investigation, x-ray, synchrotron and neutron techniques, 2021-05, Vol.15 (3), p.502-512

Novikov, Yu. A.

2021

Volltextzugriff (PDF)

Effect of Contamination on a Test Object for SEM Calibration

Surface investigation, x-ray, synchrotron and neutron techniques, 2020-11, Vol.14 (6), p.1387-1393

Novikov, Yu. A.

2020

Volltextzugriff (PDF)

Menü

Weitere Dienste

Einstellungen

Modern Scanning Electron Microscopy. 2. Test Objects for Scanning Electron Microscopy

Modern Scanning Electron Microscopy. 3. Electron Probe

Modern Scanning Electron Microscopy. 1. Secondary Electron Emission

Calibration of a Scanning Electron Microscope: 2. Methods of Signal Processing

Test Objects with a Rectangular Profile for SEM: 3. Coordinate Measurements on a SEM

Virtual Spectrometer of Positron Annihilation Lifetimes Based on a Simulator

SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits

Test Object for SEM Calibration: 2. Correlation Analysis of SEM Signals

Test Objects with a Rectangular Profile for SEM: 1. Fabrication Technology

Test Objects with a Rectangular Profile for SEM: 2. Certification of the Groove Width

Effect of the Focusing of a SEM Probe on the Formation of Relief Structure Images

Test Object for SEM Calibration. 1. Methods for Quality Control of Manufacturing

Formation of SEM Images in the Slow Secondary Electron Mode. 1. Structures with Large Side Wall Inclinations

Formation of SEM Images in the Secondary Electron Mode. 2. Structures with a Trapezoidal Profile and Small Side-Wall Inclinations

Calibration of a scanning electron microscope from two coordinates

Monte Carlo method in scanning electron microscopy. 1. Modeling and experiment

Monte Carlo Method in Scanning Electron Microscopy. 2. Problems and Solutions

Monte Carlo Method in Scanning Electron Microscopy. 3. Modern Condition of the Problem

Backscattered electron imaging of micro- and nanostructures: 5. SEM signal formation model

Measuring the sizes of microcircuit elements of widths less than 100 nm by the method of SEM probe defocusing

Test Objects with a Rectangular Profile for SEM. 5. Mechanisms of SEM Signal Formation

Test Objects with a Rectangular Profile for SEM. 4. Amplitude Measurements on a SEM

Study of Microporosity of Polymer Glasses Using Techniques of Positron Annihilation and Low-Temperature Sorption of Carbon Dioxide

Calibration of a Scanning Electron Microscope: 1. Selection of the SEM Parameters

Effect of Contamination on a Test Object for SEM Calibration

Suchergebnisse filtern