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High- k dielectrics for future generation memory devices (Invited Paper)

Microelectronic engineering, 2009-07, Vol.86 (7), p.1789-1795

2009

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Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

Journal of applied physics, 2009-11, Vol.106 (9)

2009

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(111)-textured Mn-substituted BiFeO3 thin films on SrRuO3∕Pt∕Ti∕SiO2∕Si structures

Applied physics letters, 2007-06, Vol.90 (24)

2007

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Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers

Microelectronic engineering, 2009-07, Vol.86 (7-9), p.1815-1817

2009

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Polarization fatigue in PbZr0.45Ti0.55O3-based capacitors studied from high resolution synchrotron x-ray diffraction

Journal of applied physics, 2005-03, Vol.97 (6)

2005

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A highly reliable 3-D integrated SBT ferroelectric capacitor enabling FeRAM scaling

IEEE transactions on electron devices, 2005-04, Vol.52 (4), p.447-453

2005

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Effect of the composition on the bandgap width of high-κ MexTiyOz (Me = Hf, Ta, Sr) layers

Thin solid films, 2011-06, Vol.519 (17), p.5730-5733

2011

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Degradation and recovery of polarization under synchrotron x rays in SrBi2Ta2O9 ferroelectric capacitors

Journal of applied physics, 2005-02, Vol.97 (4)

2005

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Nondestructive microstructural diagnostic of integrated ferroelectric capacitor arrays: Correlation with electrical characteristics

Journal of applied physics, 2006-03, Vol.99 (5), p.054504-054504-5

2006

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Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

Journal of the Electrochemical Society, 2010, Vol.157 (1), p.G1

2010

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Influence of irradiation on the switching behavior in PZT thin films

Materials science & engineering. B, Solid-state materials for advanced technology, 2005-07, Vol.120 (1), p.141-145

2005

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Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors

Applied physics letters, 2005-08, Vol.87 (7)

2005

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In situ synchrotron x-ray diffraction study of electrical field induced fatigue in Pt/PbZr0.45Ti0.55O3/Pt ferroelectric capacitors

Journal of physics. Condensed matter, 2005-12, Vol.17 (48), p.7681-7688

2005

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Metal-Organic Chemical Vapor Deposition of Ferroelectric SrBi2Ta2O9 Films from a Fluorine-Containing Precursor System

Chemistry of materials, 2006-02, Vol.18 (4), p.1016-1022

2006

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Composition control and ferroelectric properties of sidewalls in integrated three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Journal of applied physics, 2005-09, Vol.98 (5)

2005

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Microstructural analysis of integrated pin-shaped two-dimensional and three-dimensional ferroelectric capacitors from micro-focused synchrotron X-ray techniques

Journal of applied crystallography, 2006-06, Vol.39 (3), p.376-384

2006

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Effect of Penetrating Irradiation on Polarization Reversal in PZT Thin Films

Ferroelectrics, 2006-01, Vol.340 (1), p.161-167

2006

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Polarization fatigue in Pb Zr 0.45 Ti 0.55 O 3 -based capacitors studied from high resolution synchrotron x-ray diffraction

Journal of applied physics, 2005-03, Vol.97 (6), p.064108-064108-6

2005

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Effect of the composition on the bandgap width of high-κ Me xTi yO z (Me = Hf, Ta, Sr) layers

Thin solid films, 2011, Vol.519 (17), p.5730-5733

2011

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Failure Analysis of FeCAPs. Electrical Behaviour Under Synchrotron X-Ray Irradiation

Integrated ferroelectrics, 2004-01, Vol.61 (1), p.89-95

2004

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(111)-textured Mn-substituted Bi Fe O 3 thin films on Sr Ru O 3 ∕ Pt ∕ Ti ∕ Si O 2 ∕ Si structures

Applied physics letters, 2007-06, Vol.90 (24), p.242914-242914-3

2007

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Sidewalls contribution in integrated three-dimensional Sr 0.8 Bi 2.2 Ta 2 O 9 -based ferroelectric capacitors

Applied physics letters, 2005-08, Vol.87 (7), p.073502-073502-3

2005

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Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO 3 layers

Microelectronic engineering, 2009, Vol.86 (7), p.1815-1817

2009

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Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Microelectronic engineering, 2009-07, Vol.86 (7-9), p.1936-1938

2009

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Le dépassement des limites. Au-delà de l'humain: Nouvelles Recherches sur l'Imaginaire, XLIII

Gourmelen, Laurent

2021

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High- k dielectrics for future generation memory devices (Invited Paper)

Composition influence on the physical and electrical properties of SrxTi1−xOy-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

(111)-textured Mn-substituted BiFeO3 thin films on SrRuO3∕Pt∕Ti∕SiO2∕Si structures

Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO3 layers

Polarization fatigue in PbZr0.45Ti0.55O3-based capacitors studied from high resolution synchrotron x-ray diffraction

A highly reliable 3-D integrated SBT ferroelectric capacitor enabling FeRAM scaling

Effect of the composition on the bandgap width of high-κ MexTiyOz (Me = Hf, Ta, Sr) layers

Degradation and recovery of polarization under synchrotron x rays in SrBi2Ta2O9 ferroelectric capacitors

Nondestructive microstructural diagnostic of integrated ferroelectric capacitor arrays: Correlation with electrical characteristics

Atomic Layer Deposition of Strontium Titanate Films Using Sr([sup t]Bu[sub 3]Cp)[sub 2] and Ti(OMe)[sub 4]

Influence of irradiation on the switching behavior in PZT thin films

Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors

In situ synchrotron x-ray diffraction study of electrical field induced fatigue in Pt/PbZr0.45Ti0.55O3/Pt ferroelectric capacitors

Metal-Organic Chemical Vapor Deposition of Ferroelectric SrBi2Ta2O9 Films from a Fluorine-Containing Precursor System

Composition control and ferroelectric properties of sidewalls in integrated three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Microstructural analysis of integrated pin-shaped two-dimensional and three-dimensional ferroelectric capacitors from micro-focused synchrotron X-ray techniques

Effect of Penetrating Irradiation on Polarization Reversal in PZT Thin Films

Polarization fatigue in Pb Zr 0.45 Ti 0.55 O 3 -based capacitors studied from high resolution synchrotron x-ray diffraction

Effect of the composition on the bandgap width of high-κ Me xTi yO z (Me = Hf, Ta, Sr) layers

Failure Analysis of FeCAPs. Electrical Behaviour Under Synchrotron X-Ray Irradiation

(111)-textured Mn-substituted Bi Fe O 3 thin films on Sr Ru O 3 ∕ Pt ∕ Ti ∕ Si O 2 ∕ Si structures

Sidewalls contribution in integrated three-dimensional Sr 0.8 Bi 2.2 Ta 2 O 9 -based ferroelectric capacitors

Comprehensive investigation of trap-assisted conduction in ultra-thin SrTiO 3 layers

Sr excess accommodation in ALD grown SrTiO3 and its impact on the dielectric response

Le dépassement des limites. Au-delà de l'humain: Nouvelles Recherches sur l'Imaginaire, XLIII

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