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Controlling stress and stress gradient during the release process in gold suspended micro-structures
2010
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Journal of micromechanics and microengineering, 2016-07, Vol.26 (7), p.74004
2016
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Journal of micromechanics and microengineering, 2013-02, Vol.23 (2), p.25025-8
2013
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Applied physics letters, 2000-05, Vol.76 (18), p.2523-2525
2000
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Journal of micromechanics and microengineering, 2014-07, Vol.24 (7), p.75003-9
2014
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Microelectronics and reliability, 2013-05, Vol.53 (5), p.706-711
2013
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Surface science, 2005-07, Vol.585 (3), p.137-143
2005
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Microsystem technologies, 2012-08, Vol.18 (7-8), p.965-971
2012
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Optical materials, 2018-04, Vol.78, p.407-414
2018
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Thin solid films, 2020-08, Vol.708, p.138118, Article 138118
2020
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Materials science & engineering. B, Solid-state materials for advanced technology, 2009-07, Vol.163 (3), p.199-203
2009
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Microelectronic engineering, 2007-05, Vol.84 (5), p.1358-1362
2007
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Journal of luminescence, 1998-12, Vol.80 (1), p.43-52
1998
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Microsystem technologies : sensors, actuators, systems integration, 2016-07, Vol.22 (7), p.1585-1592
2016
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Surface science, 2001-06, Vol.481 (1), p.105-112
2001
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Materials science & engineering. B, Solid-state materials for advanced technology, 2000-01, Vol.69, p.59-65
2000
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Microelectronic engineering, 2016-07, Vol.160, p.63-67
2016
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Semiconductor science and technology, 1999-12, Vol.14 (12), p.1052-1059
1999
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Sensors and Microsystems, p.107-113
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Microsystem technologies : sensors, actuators, systems integration, 2016-03, Vol.22 (3), p.495-501
2016
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2017 IEEE International Reliability Physics Symposium (IRPS), 2017, p.PA-1.1-PA-1.5
2017
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2015 XVIII AISEM Annual Conference, 2015, p.1-4
2015
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Biosensors & bioelectronics, 2005-04, Vol.20 (10), p.1968-1976
2005
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2015 XVIII AISEM Annual Conference, 2015, p.1-4
2015
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Materials science & engineering. B, Solid-state materials for advanced technology, 2000, Vol.69, p.109-113
2000
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