UB Paderborn / Katalog / Suche / in CDI

Stroboscopic interferometer system for dynamic MEMS characterization

Journal of microelectromechanical systems, 2000-12, Vol.9 (4), p.409-418

2000

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IEEE_Xplore

Electrostatic charge and field sensors based on micromechanical resonators

Journal of microelectromechanical systems, 2003-10, Vol.12 (5), p.577-589

2003

Link zum Volltext
IEEE_Xplore

Measurement system for full three-dimensional motion characterization of MEMS

Journal of microelectromechanical systems, 2002-10, Vol.11 (5), p.479-488

2002

Link zum Volltext
IEEE_Xplore

Editorial Manuscript Central Update and Editorial Board Changes

Journal of microelectromechanical systems, 2005-12, Vol.14 (6), p.1213-1214

Muller, R.S.

2005

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IEEE_Xplore

Editorial New Editorial Board Members and Withdrawn Paper

Journal of microelectromechanical systems, 2004-12, Vol.13 (6), p.885-886

Muller, R.S.

2004

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Verfügbarkeit prüfen

Microfabricated torsional actuators using self-aligned plastic deformation of silicon

Journal of microelectromechanical systems, 2006-06, Vol.15 (3), p.553-562

2006

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IEEE_Xplore

Magnetically actuated, addressable microstructures

Journal of microelectromechanical systems, 1997-09, Vol.6 (3), p.249-256

1997

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IEEE_Xplore

Editorial Changes in the JMEMS Editorial Board

Journal of microelectromechanical systems, 2004-06, Vol.13 (3), p.389-390

Muller, R.S.

2004

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Fluidic self-assembly of micromirrors onto microactuators using capillary forces

IEEE journal of selected topics in quantum electronics, 2002-01, Vol.8 (1), p.4-11

2002

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IEEE_Xplore

Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors

Journal of microelectromechanical systems, 2006-12, Vol.15 (6), p.1555-1567

2006

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IEEE_Xplore

Editorial: Retirements and additions to JMEMS editorial board

Journal of microelectromechanical systems, 2003-08, Vol.12 (4), p.385-386

Muller, R.S.

2003

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IEEE_Xplore

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Journal of microelectromechanical systems, 1998-03, Vol.7 (1), p.27-37

1998

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IEEE_Xplore

Simple Fabrication Process for Self-Aligned, High-Performance Microscanners- Demonstrated Use to Generate a 2-D Ablation Pattern

Journal of microelectromechanical systems, 2007-04, Vol.16 (2), p.260-268

2007

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IEEE_Xplore

Magnetic microactuation of polysilicon flexure structures

Journal of microelectromechanical systems, 1995-12, Vol.4 (4), p.162-169

1995

Link zum Volltext
IEEE_Xplore

Sensitivity estimates for diffuse, point-like, and extended neutrino sources with KM3NeT/ARCA

Journal of instrumentation, 2021-09, Vol.16 (9), p.C09030

2021

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Micromachined polysilicon microscanners for barcode readers

IEEE photonics technology letters, 1996-12, Vol.8 (12), p.1707-1709

1996

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IEEE_Xplore

Sensitivity estimates for diffuse, point-like, and extended neutrino sources with KM3NeT/ARCA

Journal of instrumentation, 2021-09, Vol.16 (9)

2021

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Verfügbarkeit prüfen

Surface micromachining for microelectromechanical systems

Proceedings of the IEEE, 1998-08, Vol.86 (8), p.1552-1574

1998

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IEEE_Xplore

Editorial

Journal of microelectromechanical systems, 2005-08, Vol.14 (4), p.649

Muller, R.S

2005

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Verfügbarkeit prüfen

Editorial

Journal of microelectromechanical systems, 2005-08, Vol.14 (4), p.649-650

Muller, R.S.

2005

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Verfügbarkeit prüfen

Editorial

Journal of microelectromechanical systems, 2005-08, Vol.14 (4), p.649-650

Muller, R.S.

2005

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IEEE_Xplore

Integrated movable micromechanical structures for sensors and actuators

IEEE transactions on electron devices, 1988-06, Vol.35 (6), p.724-730

1988

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IEEE_Xplore

Etch rates for micromachining processing

Journal of microelectromechanical systems, 1996-12, Vol.5 (4), p.256-269

1996

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IEEE_Xplore

Electrical and optical characteristics of vacuum-sealed polysilicon microlamps

IEEE transactions on electron devices, 1992-06, Vol.39 (6), p.1363-1375

1992

Link zum Volltext
IEEE_Xplore

Surface-micromachined microoptical elements and systems

Proceedings of the IEEE, 1998-08, Vol.86 (8), p.1705-1720

1998

Link zum Volltext
IEEE_Xplore

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Stroboscopic interferometer system for dynamic MEMS characterization

Electrostatic charge and field sensors based on micromechanical resonators

Measurement system for full three-dimensional motion characterization of MEMS

Editorial Manuscript Central Update and Editorial Board Changes

Editorial New Editorial Board Members and Withdrawn Paper

Microfabricated torsional actuators using self-aligned plastic deformation of silicon

Magnetically actuated, addressable microstructures

Editorial Changes in the JMEMS Editorial Board

Fluidic self-assembly of micromirrors onto microactuators using capillary forces

Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors

Editorial: Retirements and additions to JMEMS editorial board

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Simple Fabrication Process for Self-Aligned, High-Performance Microscanners- Demonstrated Use to Generate a 2-D Ablation Pattern

Magnetic microactuation of polysilicon flexure structures

Sensitivity estimates for diffuse, point-like, and extended neutrino sources with KM3NeT/ARCA

Micromachined polysilicon microscanners for barcode readers

Sensitivity estimates for diffuse, point-like, and extended neutrino sources with KM3NeT/ARCA

Surface micromachining for microelectromechanical systems

Editorial

Editorial

Editorial

Integrated movable micromechanical structures for sensors and actuators

Etch rates for micromachining processing

Electrical and optical characteristics of vacuum-sealed polysilicon microlamps

Surface-micromachined microoptical elements and systems

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