UB Paderborn / Katalog / Suche / in CDI

Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

Journal of process control, 2008-12, Vol.18 (10), p.961-974

2008

Volltextzugriff (PDF)

An Approach for Factory-Wide Control Utilizing Virtual Metrology

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.364-375

2007

Volltextzugriff (PDF)

The Emergence of Industrial Control Networks for Manufacturing Control, Diagnostics, and Safety Data

Proceedings of the IEEE, 2007-01, Vol.95 (1), p.29-47

2007

Volltextzugriff (PDF)

SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing

IEEE transactions on semiconductor manufacturing, 2007-11, Vol.20 (4), p.408-420

2007

Volltextzugriff (PDF)

Favorable effect of time delays on tracking performance of type-I control systems

IET control theory & applications, 2008-03, Vol.2 (3), p.210-218

2008

Volltextzugriff (PDF)

REMOVED: Favorable effects of time delays on tracking performance of control systems

Systems & control letters, 2006-10

2006

Volltextzugriff (PDF)

Using deadbands to reduce communication in networked control systems

Proceedings of the 2002 American Control Conference (IEEE Cat. No.CH37301), 2002, Vol.4, p.3015-3020 vol.4

2002

Volltextzugriff (PDF)

Discussion on: “Stabilization of Networked Control Systems with Data Packet Dropout and Transmission Delays: Continuous-Time Case”

European journal of control, 2005, Vol.11 (1), p.51-53

2005

Volltextzugriff (PDF)

On-line control reconfiguration at the machine and cell levels: case studies from the reconfigurable factory testbed

2005 IEEE Conference on Emerging Technologies and Factory Automation, 2005, Vol.1, p.8 pp.-648

2005

Volltextzugriff (PDF)

Performance evaluation of control networks: Ethernet, ControlNet, and DeviceNet

IEEE Control Systems Magazine, 2001-02, Vol.21 (1), p.66-83

2001

Volltextzugriff (PDF)

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

IEEE transactions on semiconductor manufacturing, 1995-08, Vol.8 (3), p.286-297

1995

Volltextzugriff (PDF)

Performance evaluation of wireless networks for factory automation applications

2009 IEEE International Conference on Automation Science and Engineering, 2009, p.340-346

2009

Volltextzugriff (PDF)

An application of entity-relationship data modeling techniques to the automated manufacturing process

Proceedings. Second International Conference on Data and Knowledge Systems for Manufacturing and Engineering, 1989, p.206-215

1989

Volltextzugriff (PDF)

A generic cell controller for the automated VLSI manufacturing facility

IEEE transactions on semiconductor manufacturing, 1992-05, Vol.5 (2), p.77-87

1992

Volltextzugriff (PDF)

Experimental determination of network quality of service in Ethernet: UDP, OPC, and VPN

2006 American Control Conference, 2006, p.6 pp.

2006

Volltextzugriff (PDF)

Control performance study of a networked machining cell

Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334), 2000, Vol.4, p.2337-2341 vol.4

2000

Volltextzugriff (PDF)

A process-independent run-to-run controller and its application to chemical-mechanical planarization

Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop, 1995, p.194-200

1995

Volltextzugriff (PDF)

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings, 1996, p.375-381

1996

Volltextzugriff (PDF)

A prototype SECS message service for communication in the semiconductor manufacturing environment

IEEE transactions on semiconductor manufacturing, 1989-11, Vol.2 (4), p.165-177

1989

Volltextzugriff (PDF)

A design methodology for databases with uncertain data

Seventh International Working Conference on Scientific and Statistical Database Management, 1994, p.32-41

1994

Volltextzugriff (PDF)

A monitoring and diagnostics system for a plasma etching cell

[1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, 1991, p.48-53

1991

Volltextzugriff (PDF)

Menü

Weitere Dienste

Einstellungen

Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

An Approach for Factory-Wide Control Utilizing Virtual Metrology

The Emergence of Industrial Control Networks for Manufacturing Control, Diagnostics, and Safety Data

SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing

Favorable effect of time delays on tracking performance of type-I control systems

REMOVED: Favorable effects of time delays on tracking performance of control systems

Using deadbands to reduce communication in networked control systems

Discussion on: “Stabilization of Networked Control Systems with Data Packet Dropout and Transmission Delays: Continuous-Time Case”

On-line control reconfiguration at the machine and cell levels: case studies from the reconfigurable factory testbed

Performance evaluation of control networks: Ethernet, ControlNet, and DeviceNet

Control of semiconductor manufacturing equipment: real-time feedback control of a reactive ion etcher

Performance evaluation of wireless networks for factory automation applications

An application of entity-relationship data modeling techniques to the automated manufacturing process

A generic cell controller for the automated VLSI manufacturing facility

Experimental determination of network quality of service in Ethernet: UDP, OPC, and VPN

Control performance study of a networked machining cell

A process-independent run-to-run controller and its application to chemical-mechanical planarization

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

A prototype SECS message service for communication in the semiconductor manufacturing environment

A design methodology for databases with uncertain data

A monitoring and diagnostics system for a plasma etching cell

Suchergebnisse filtern