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The Journal of Science Policy and Research Management, 2022/10/15, Vol.37(2), pp.144-159
2022
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Microelectronic engineering, 2006-04, Vol.83 (4), p.940-943
2006
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Journal of applied physics, 2005-03, Vol.97 (6), p.063517-063517-4
2005
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Journal of vacuum science and technology. B, Nanotechnology & microelectronics, 2010-03, Vol.28 (2), p.263-267
2010
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Microelectronic engineering, 2008-05, Vol.85 (5-6), p.1193-1196
2008
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Microelectronic engineering, 2010-05, Vol.87 (5), p.982-984
2010
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Japanese Journal of Applied Physics, 2006-06, Vol.45 (6S), p.5538
2006
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Japanese Journal of Applied Physics, 2011-06, Vol.50 (6S), p.6
2011
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Diamond and related materials, 2008-07, Vol.17 (7), p.1706-1709
2008
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Applied surface science, 2004-11, Vol.238 (1-4), p.324-330
2004
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Microelectronic engineering, 2009-04, Vol.86 (4), p.497-499
2009
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Japanese Journal of Applied Physics, 2011-06, Vol.50 (6), p.06GB06-06GB06-6
2011
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研究 技術 計画, 2022/10/15, Vol.37(2), pp.144-159
2022
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Japanese Journal of Applied Physics, 2000-12, Vol.39 (12S), p.7070
2000
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Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 6B), p.4194-4197
2002
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Japanese Journal of Applied Physics, 2006-01, Vol.45 (1L), p.L68
2006
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Japanese Journal of Applied Physics, 2007-03, Vol.46 (3L), p.L215
2007
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Japanese Journal of Applied Physics, 2008-06, Vol.47 (6S), p.5156
2008
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Applied surface science, 2007-01, Vol.253 (6), p.3284-3291
2007
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Japanese Journal of Applied Physics, 2002, Vol.41 (Part 1, No. 6B), p.4173-4177
2002
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Japanese Journal of Applied Physics, 2003, Vol.42 (Part 1, No. 6B), p.3871-3873
2003
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Applied physics letters, 2009-06, Vol.94 (22), p.223102-223102-3
2009
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Japanese Journal of Applied Physics, 1996-12, Vol.35 (12B), p.6574-6578
1996
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