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Auto-Bias Electrical Variable Capacitor of Reduced Active Component Count and Voltage Stress for 13.56 MHz RF Plasma Process
IEEE transactions on industry applications, 2022-07, Vol.58 (4), p.4994-5004
2022
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Current-Source-Type Pulse Current Generator With Reduced Waveform Distortion for Capacitively Coupled Plasma Systems
IEEE transactions on industry applications, 2021-05, Vol.57 (3), p.2578-2590
2021
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Next-Generation Variable Capacitors to Reduce Capacitance Variable Time Using SiC MOSFETs and p-i-n Diodes in 13.56-MHz RF Plasma Systems
IEEE journal of emerging and selected topics in power electronics, 2022-04, Vol.10 (2), p.1353-1362
2022
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Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Journal of Power Electronics, 2020, 20(6), , pp.1562-1572
2020
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Pulse current generator with improved waveform fidelity for high-voltage capacitively coupled plasma systems
Journal of Power Electronics, 2020, 20(5), , pp.1316-1327
2020
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Open Access
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Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Journal of power electronics, 2020, Vol.20 (6), p.1562-1572
2020
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Open Access
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Pulse current generator with improved waveform fidelity for high-voltage capacitively coupled plasma systems
Journal of power electronics, 2020, Vol.20 (5), p.1316-1327
2020
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Electrical Variable Capacitor of Reduced Switch Count and Voltage Stress for 13.56MHz RF Plasma System
2021 IEEE Energy Conversion Congress and Exposition (ECCE), 2021, p.5933-5939
2021
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Hybrid Variable Capacitor in Impedance Matcher for RF Plasma Process
2021 IEEE 12th Energy Conversion Congress & Exposition - Asia (ECCE-Asia), 2021, p.2410-2414
2021
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Resonance Type Auto Bias Electrical Variable Capacitor with Improved Switch Reliability for 13.56MHz RF Plasma System
2023 11th International Conference on Power Electronics and ECCE Asia (ICPE 2023 - ECCE Asia), 2023, p.1255-1262
2023
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Electrical Variable Capacitor Using Symmetrical Switch Configuration in RF Plasma System
2019 10th International Conference on Power Electronics and ECCE Asia (ICPE 2019 - ECCE Asia), 2019, p.2114-2121
2019
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Pulse Current Generator with Improved Waveform Fidelity for High Voltage Capacitively-Coupled Plasma System
2018 IEEE Energy Conversion Congress and Exposition (ECCE), 2018, p.1-5
2018
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